公开(公告)号：US20210311448A1

公开(公告)日：2021-10-07

申请号：US17232950

申请日：2021-04-16

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US20190391547A1

公开(公告)日：2019-12-26

申请号：US16297799

申请日：2019-03-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.