公开(公告)号：US20180109230A1

公开(公告)日：2018-04-19

申请号：US15846922

申请日：2017-12-19

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuriy ELNER ,  Daniel M. GILL

IPC: H03F1/56 ,  H03F3/24 ,  H03F3/195

Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.

公开(公告)号：US20190333738A1

公开(公告)日：2019-10-31

申请号：US16509088

申请日：2019-07-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuriy ELNER ,  Daniel M. GILL ,  Richard PHAM

IPC: H01J37/32

Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.

公开(公告)号：US20210311448A1

公开(公告)日：2021-10-07

申请号：US17232950

申请日：2021-04-16

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US20190391547A1

公开(公告)日：2019-12-26

申请号：US16297799

申请日：2019-03-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.