公开(公告)号：US09133960B2

公开(公告)日：2015-09-15

申请号：US13753019

申请日：2013-01-29

Applicant: MKS Instruments, Inc.

Inventor： Paul D. Lucas ,  Gordon Hill ,  Jaroslaw Wojciech Pisera

IPC: F16K3/36 ,  F16K49/00

CPC classification number: F16K49/00 ,  F16K1/2261 ,  F16K3/10 ,  F16K49/007 ,  Y10T137/0419 ,  Y10T137/6416

Abstract: A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway. The injection of the second gas when the valve flow control element is at or near its closed position helps minimize condensate being deposited on the valve flow control element, as well as reduce the closed conductance of the valve.

Abstract translation: 阀组件包括：阀体，其包括通道，第一气体可以穿过所述通道穿过所述阀组件; 阀流量控制元件，其可相对于阀体在打开位置之间移动，打开位置，其中通过通道的流动处于最大流动，以及关闭位置，其中流过通道的流动处于最小流量，阀流量控制元件的形状使得 在阀体和阀流量控制元件之间提供控制间隙，第一气体可以通过该控制间隙流动，并且控制间隙的尺寸根据阀流量控制元件相对于阀体的位置而变化; 以及气体喷射器装置，用于当阀组件用于控制通过通道的第一气体的流动时，将第二气体选择性地喷射到控制间隙中。 当阀流量控制元件处于或接近其关闭位置时，第二气体的注入有助于最小化沉积在阀流量控制元件上的冷凝物，并且减小阀的闭合电导。

公开(公告)号：US20140209181A1

公开(公告)日：2014-07-31

申请号：US13753019

申请日：2013-01-29

Applicant: MKS Instruments, Inc.

Inventor： Paul D. Lucas ,  Gordon Hill ,  Jaroslaw Wojciech Pisera

IPC: F16K49/00

CPC classification number: F16K49/00 ,  F16K1/2261 ,  F16K3/10 ,  F16K49/007 ,  Y10T137/0419 ,  Y10T137/6416

Abstract: A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway. The injection of the second gas when the valve flow control element is at or near its closed position helps minimize condensate being deposited on the valve flow control element, as well as reduce the closed conductance of the valve.

Abstract translation: 阀组件包括：阀体，其包括通道，第一气体可以穿过所述通道穿过所述阀组件; 阀流量控制元件，其可相对于阀体在打开位置之间移动，打开位置，其中通过通道的流动处于最大流动，以及关闭位置，其中流过通道的流动处于最小流量，阀流量控制元件的形状使得 在阀体和阀流量控制元件之间提供控制间隙，第一气体可以通过该控制间隙流动，并且控制间隙的尺寸根据阀流量控制元件相对于阀体的位置而变化; 以及气体喷射器装置，用于当阀组件用于控制通过通道的第一气体的流动时，将第二气体选择性地喷射到控制间隙中。 当阀流量控制元件处于或接近其关闭位置时，第二气体的注入有助于最小化沉积在阀流量控制元件上的冷凝物，并且减小阀的闭合电导。