公开(公告)号：US11513108B2

公开(公告)日：2022-11-29

申请号：US16742172

申请日：2020-01-14

Applicant: MKS Instruments, Inc.

Inventor： Jim Ye ,  Vidi Saptari ,  Junhua Ding

IPC: G01N33/00 ,  G01F1/76 ,  G01F15/00 ,  G05D11/13 ,  H01L21/67

Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

公开(公告)号：US20210215655A1

公开(公告)日：2021-07-15

申请号：US16742172

申请日：2020-01-14

Applicant: MKS Instruments, Inc.

Inventor： Jim Ye ,  Vidi Saptari ,  Junhua Ding

IPC: G01N33/00 ,  G01F1/76

Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

公开(公告)号：US20230031118A1

公开(公告)日：2023-02-02

申请号：US17757902

申请日：2021-01-11

Applicant: MKS Instruments, Inc.

Inventor： Jim Ye ,  Vidi Saptari ,  Junhua Ding

IPC: G01N33/00 ,  G01F1/76 ,  G05D11/13

Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.