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公开(公告)号：US09958380B2
公开(公告)日：2018-05-01
申请号：US14753366
申请日：2015-06-29
Applicant: MKS Instruments, Inc. , Pason Systems Corp.
Inventor： Vidi Saptari
IPC: G01N21/35 , G01N21/3504 , G01N21/359 , G01N21/31
CPC classification number: G01N21/3504 , G01N21/359 , G01N2021/3155 , G01N2021/3595
Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 μm can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.
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公开(公告)号：US09001335B2
公开(公告)日：2015-04-07
申请号：US13743671
申请日：2013-01-17
Applicant: MKS Instruments, Inc.
Inventor： Charles Mark Phillips , Barbara Marshik-Geurts , Leonard I. Kamlet , Martin L. Spartz , Vidi Saptari
IPC: G01J3/45 , G01B9/02 , G01N21/00 , G01N21/3504 , G01J3/02 , G01J3/42 , G01N21/03 , G01N21/45 , G01J3/453 , G01N21/05 , G01N21/09 , G01N21/35
CPC classification number: G01N21/3504 , G01J3/02 , G01J3/0291 , G01J3/42 , G01J3/453 , G01N21/031 , G01N21/05 , G01N21/09 , G01N21/45 , G01N2021/3595 , G01N2201/061 , G01N2201/0636 , G01N2201/1293
Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
Abstract translation: 提供了一种用于监测存在于沼气中的一种或多种含硅化合物的方法。 该方法包括基于第一光谱测量和第二光谱测量的比率产生第一吸收光谱。 第一光谱测量来自在感兴趣的特定波长范围内基本上没有红外吸收的非吸收性气体，并且第二光谱测量来自包括生物气体的样品气体。 所述方法包括基于选自具有已知浓度的较大组已知含硅化合物的一种或多种含硅化合物的子集中的每一个，至少基于至少单独的吸收光谱产生至少一种替代吸收光谱。 可以基于第一吸收光谱和至少一个替代吸收光谱来计算生物气体中一种或多种含硅化合物的总浓度。
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公开(公告)号：US11513108B2
公开(公告)日：2022-11-29
申请号：US16742172
申请日：2020-01-14
Applicant: MKS Instruments, Inc.
Inventor： Jim Ye , Vidi Saptari , Junhua Ding
Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
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Patent Agency Ranking
公开(公告)号：US20130193325A1
公开(公告)日：2013-08-01
申请号：US13743671
申请日：2013-01-17
Applicant: MKS INSTRUMENTS, INC.
Inventor： Charles Mark Phillips , Barbara Marshik-Geurts , Leonard I. Kamlet , Martin L. Spartz , Vidi Saptari
IPC: G01N21/35
CPC classification number: G01N21/3504 , G01J3/02 , G01J3/0291 , G01J3/42 , G01J3/453 , G01N21/031 , G01N21/05 , G01N21/09 , G01N21/45 , G01N2021/3595 , G01N2201/061 , G01N2201/0636 , G01N2201/1293
Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
Abstract translation: 提供了一种用于监测存在于沼气中的一种或多种含硅化合物的方法。 该方法包括基于第一光谱测量和第二光谱测量的比率产生第一吸收光谱。 第一光谱测量来自在感兴趣的特定波长范围内基本上没有红外吸收的非吸收性气体，并且第二光谱测量来自包括生物气体的样品气体。 所述方法包括基于选自具有已知浓度的较大组已知含硅化合物的一种或多种含硅化合物的子集中的每一个，至少基于至少单独的吸收光谱产生至少一种替代吸收光谱。 可以基于第一吸收光谱和至少一个替代吸收光谱来计算生物气体中一种或多种含硅化合物的总浓度。
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公开(公告)号：US20230031118A1
公开(公告)日：2023-02-02
申请号：US17757902
申请日：2021-01-11
Applicant: MKS Instruments, Inc.
Inventor： Jim Ye , Vidi Saptari , Junhua Ding
Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
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公开(公告)号：US09372152B2
公开(公告)日：2016-06-21
申请号：US14637094
申请日：2015-03-03
Applicant: MKS Instruments, Inc.
Inventor： Charles Mark Phillips , Barbara Marshik-Geurts , Leonard I. Kamlet , Martin L. Spartz , Vidi Saptari
IPC: G01B9/02 , G01J3/45 , G01N21/3504 , G01J3/02 , G01J3/42 , G01N21/03 , G01N21/45 , G01J3/453 , G01N21/05 , G01N21/09 , G01N21/35
CPC classification number: G01N21/3504 , G01J3/02 , G01J3/0291 , G01J3/42 , G01J3/453 , G01N21/031 , G01N21/05 , G01N21/09 , G01N21/45 , G01N2021/3595 , G01N2201/061 , G01N2201/0636 , G01N2201/1293
Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
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公开(公告)号：US20210215655A1
公开(公告)日：2021-07-15
申请号：US16742172
申请日：2020-01-14
Applicant: MKS Instruments, Inc.
Inventor： Jim Ye , Vidi Saptari , Junhua Ding
Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
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公开(公告)号：US20150355081A1
公开(公告)日：2015-12-10
申请号：US14637094
申请日：2015-03-03
Applicant: MKS Instruments, Inc.
Inventor： Charles Mark Phillips , Barbara Marshik-Geurts , Leonard I. Kamlet , Martin L. Spartz , Vidi Saptari
IPC: G01N21/3504 , G01J3/453 , G01N21/45
CPC classification number: G01N21/3504 , G01J3/02 , G01J3/0291 , G01J3/42 , G01J3/453 , G01N21/031 , G01N21/05 , G01N21/09 , G01N21/45 , G01N2021/3595 , G01N2201/061 , G01N2201/0636 , G01N2201/1293
Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
Abstract translation: 提供了一种用于监测存在于沼气中的一种或多种含硅化合物的方法。 该方法包括基于第一光谱测量和第二光谱测量的比率产生第一吸收光谱。 第一光谱测量来自在感兴趣的特定波长范围内基本上没有红外吸收的非吸收性气体，并且第二光谱测量来自包括生物气体的样品气体。 所述方法包括基于选自具有已知浓度的较大组已知含硅化合物的一种或多种含硅化合物的子集中的每一个，至少基于至少单独的吸收光谱产生至少一种替代吸收光谱。 可以基于第一吸收光谱和至少一个替代吸收光谱来计算生物气体中一种或多种含硅化合物的总浓度。
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