公开(公告)号：US20220182024A1

公开(公告)日：2022-06-09

申请号：US17111700

申请日：2020-12-04

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron T. RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F1/02 ,  H03F3/195

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

公开(公告)号：US20230087716A1

公开(公告)日：2023-03-23

申请号：US17993498

申请日：2022-11-23

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F3/195 ,  H03F1/02

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.