公开(公告)号：US20220182024A1

公开(公告)日：2022-06-09

申请号：US17111700

申请日：2020-12-04

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron T. RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F1/02 ,  H03F3/195

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

公开(公告)号：US20230087716A1

公开(公告)日：2023-03-23

申请号：US17993498

申请日：2022-11-23

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F3/195 ,  H03F1/02

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

公开(公告)号：US20210118649A1

公开(公告)日：2021-04-22

申请号：US17073709

申请日：2020-10-19

Applicant: MKS Instruments, Inc.

Inventor： Jin HUH ,  Aaron T. RADOMSKI ,  Duy NGUYEN ,  Soohan KIM

IPC: H01J37/32 ,  H05H1/46

Abstract: A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency. The matching network includes a first matching network section for providing an impedance match between the first power supply and the load. The matching network also includes a second matching network section for providing an impedance match between the second power supply and the load. A the first matching network section includes a first variable reactance, and the variable reactance is controlled in accordance with IMD sensed in the signal applied to the load by the first RF power supply. The variable reactance is adjusted in accordance with the IMD to reduce the detected IMD.