公开(公告)号：US20230087716A1

公开(公告)日：2023-03-23

申请号：US17993498

申请日：2022-11-23

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F3/195 ,  H03F1/02

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

公开(公告)号：US20220182024A1

公开(公告)日：2022-06-09

申请号：US17111700

申请日：2020-12-04

Applicant: MKS Instruments, Inc.

Inventor： Duy NGUYEN ,  Albert KURAMSHIN ,  Aaron T. RADOMSKI ,  Alexander JURKOV ,  Hangon KIM ,  Kelvin LEE

IPC: H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F1/02 ,  H03F3/195

Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

公开(公告)号：US20230050119A1

公开(公告)日：2023-02-16

申请号：US17873624

申请日：2022-07-26

Applicant: MKS Instruments, Inc.

Inventor： Linnell MARTINEZ ,  Dinh-Vuong LE ,  Alexander JURKOV ,  Jaechul JUNG ,  Aaron RADOMSKI

IPC: H01J37/32 ,  H03H11/28

Abstract: A power supply system includes a RF generator, a matching network, and a control module. The matching network includes at least one mechanically variable impedance element and at least one electrically variable impedance element. The control module is coupled to the matching network and configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element to vary an impedance match between the generator and a load. In other examples, a hybrid variable impedance module includes at least one mechanically variable impedance element, at least one electrically variable impedance element, and a control module. The control module is configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element.