公开(公告)号：US20140266492A1

公开(公告)日：2014-09-18

申请号：US13832901

申请日：2013-03-15

Applicant: MKS INSTRUMENTS, INC.

Inventor： Aaron T. RADOMSKI ,  Dennis M. BROWN ,  Nicholas NELSON

IPC: H03H7/40

CPC classification number: H03H7/40

Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.

Abstract translation: 射频（RF）生成系统包括接收RF电压和RF电流的阻抗确定模块。 阻抗确定模块还基于RF电压和RF电流来确定RF发生器阻抗。 RF发生系统还包括控制模块，该控制模块基于RF发生器阻抗来确定多个电气值。 匹配模块还基于RF发生器阻抗和多个电气部件来匹配负载的阻抗。 匹配模块还基于多个电气值确定2端口传送功能。 RF发生系统还包括虚拟传感器模块，其基于RF电压，RF发生器，RF发生器阻抗和2端口传递函数来估计负载电压，负载电流和负载阻抗。

公开(公告)号：US20250006478A1

公开(公告)日：2025-01-02

申请号：US18731703

申请日：2024-06-03

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Nicholas NELSON

IPC: H01J37/32 ,  H02M3/04

Abstract: A controller for a generator includes a feedforward control module. The feedforward control module is configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal. The feedforward control module generates a plurality of adjustment values in accordance with sub-regions of the output signal. Each sub-region includes a portion of the desired output signal.

公开(公告)号：US20140263199A1

公开(公告)日：2014-09-18

申请号：US13834786

申请日：2013-03-15

Applicant: MKS Instruments, Inc.

Inventor： Nicholas NELSON ,  David J. COUMOU

IPC: B23K10/00

Abstract: A radio frequency (RF) power delivery system includes a first RF generator and a second RF generator. The first RF generator operates as a master RF generator, and the second RF generator operates as a slave RF generator. The slave RF generator includes a detector for sensing an electrical characteristic of the RF signal of the slave RF generator. The slave RF generator also includes a detector for sensing an electrical characteristic of the RF signal from the master RF generator. Operation of the slave RF generator is controlled by a host or controller. The host or controller operates the slave RF generator in accordance with electrical properties determined by the second detector.

Abstract translation: 射频（RF）功率传递系统包括第一RF发生器和第二RF发生器。 第一RF发生器作为主RF发生器工作，第二RF发生器作为从RF发生器工作。 从RF发生器包括用于感测从RF发生器的RF信号的电特性的检测器。 从RF发生器还包括用于感测来自主RF发生器的RF信号的电特性的检测器。 从RF发射器的操作由主机或控制器控制。 主机或控制器根据由第二检测器确定的电特性来操作从RF发生器。