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1.发明申请Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges 审中-公开漏电流检测和离子化测量中的去污设备及方法公开(公告)号：US20170010171A1
公开(公告)日：2017-01-12
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
IPC: G01L21/32
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。
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公开(公告)号：US10132707B2
公开(公告)日：2018-11-20
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
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