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公开(公告)号：US10132707B2
公开(公告)日：2018-11-20
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
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Patent Agency Ranking
公开(公告)号：US09927317B2
公开(公告)日：2018-03-27
申请号：US14795729
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
Abstract: Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.
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3.发明申请Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges 审中-公开漏电流检测和离子化测量中的去污设备及方法公开(公告)号：US20170010171A1
公开(公告)日：2017-01-12
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
IPC: G01L21/32
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。
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公开(公告)号：US09806685B1
公开(公告)日：2017-10-31
申请号：US15153915
申请日：2016-05-13
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
CPC classification number: H03F3/45 , G01R19/0061 , H03F1/083 , H03F1/3211 , H03F1/34 , H03F3/45475 , H03F2200/153 , H03F2200/261 , H03F2200/462 , H03F2203/45138 , H03F2203/45161 , H03F2203/45288 , H03F2203/45528
Abstract: A wide dynamic range trans-impedance amplifier includes a first trans-impedance amplifier configured to receive a first input current and produce a first voltage as a function of the first input current, and a second trans-impedance amplifier configured to receive a second input current and produce a second voltage as a function of the second input current. A current steering element causes a first portion of current from a current source to flow to the first trans-impedance amplifier until the first current portion reaches the first threshold current, and causes a second portion of current from the current source to flow to the second trans-impedance amplifier, until the second current portion reaches the second threshold current. The second current portion is current from the current source that exceeds the first threshold current. The wide dynamic range trans-impedance amplifier may receive, for example, ion collector current from a hot cathode ionization gauge (HCIG).
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5.发明申请Ionization Pressure Gauge With Bias Voltage And Emission Current Control And Measurement 有权具有偏压和发射电流控制和测量的电离压力表公开(公告)号：US20170010172A1
公开(公告)日：2017-01-12
申请号：US14795729
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
IPC: G01L21/32
Abstract: Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.
Abstract translation: 提供了设备和相应的方法来操作热阴极电离压力计（HCIG）。 晶体管电路可以被配置为传递具有低输入阻抗的电子发射电流并且控制阴极偏置电压。 发射电流和阴极偏置电压可以彼此独立地控制，而不需要伺服稳定时间。 HCIG可以相对漏电流进行校准。
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公开(公告)号：US20170331440A1
公开(公告)日：2017-11-16
申请号：US15153915
申请日：2016-05-13
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
CPC classification number: H03F3/45 , G01R19/0061 , H03F1/083 , H03F1/3211 , H03F1/34 , H03F3/45475 , H03F2200/153 , H03F2200/261 , H03F2200/462 , H03F2203/45138 , H03F2203/45161 , H03F2203/45288 , H03F2203/45528
Abstract: A wide dynamic range trans-impedance amplifier includes a first trans-impedance amplifier configured to receive a first input current and produce a first voltage as a function of the first input current, and a second trans-impedance amplifier configured to receive a second input current and produce a second voltage as a function of the second input current. A current steering element causes a first portion of current from a current source to flow to the first trans-impedance amplifier until the first current portion reaches the first threshold current, and causes a second portion of current from the current source to flow to the second trans-impedance amplifier, until the second current portion reaches the second threshold current. The second current portion is current from the current source that exceeds the first threshold current. The wide dynamic range trans-impedance amplifier may receive, for example, ion collector current from a hot cathode ionization gauge (HCIG).
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