公开(公告)号：US11767594B2

公开(公告)日：2023-09-26

申请号：US17251847

申请日：2019-06-24

Applicant: MOLECULAR PLASMA GROUP SA

Inventor： Gill Scheltjens ,  Régis Heyberger ,  Malek Alnasser

IPC: C23C16/513 ,  B05B7/22 ,  B05B15/18 ,  B05B7/04 ,  B05B13/02 ,  C23C16/455 ,  H05H1/28 ,  H05H1/24

CPC classification number: C23C16/513 ,  B05B7/04 ,  B05B7/22 ,  B05B13/0214 ,  B05B13/0228 ,  B05B15/18 ,  C23C16/45563 ,  H05H1/28 ,  H05H1/2406 ,  H05H1/47

Abstract: A method for plasma coating an object includes an object profile, having the steps of: a) manufacturing a replaceable shield comprising a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet, wherein the nozzle outlet includes an edge essentially congruent to at least part of the object profile; b) detachably attaching the replaceable shield to a jet outlet of a plasma jet generator; c) placing the object at the nozzle outlet such that the object profile fits closely to the nozzle outlet edge; d) plasma coating the object with a low-temperature, oxygen-free plasma at an operating pressure which is higher than the atmospheric pressure by providing a plasma jet in the shield via the plasma jet generator and injecting coating precursors in the plasma jet in the shield.