公开(公告)号：US11536765B2

公开(公告)日：2022-12-27

申请号：US16892076

申请日：2020-06-03

Applicant: MPI Corporation

Inventor： Kang-Yen Fu ,  Ya-Hung Lo ,  Shou-Jen Tsai ,  Wei-Cheng Ku

IPC: G01R31/28 ,  H01L21/67 ,  G01R1/073

Abstract: A probing apparatus includes a frame, a testing device, a rotatable testing platform, and a probe module. The testing device is disposed on the frame and is displaceable along an X direction and a Y direction perpendicular to the X direction. The rotatable testing platform is disposed on the frame and is rotatable around a rotating axis extending in the X direction. A direction perpendicular to the X direction and the Y direction is a Z direction, and the rotatable testing platform and the testing device are located at different positions of the Z direction. The probe module is disposed on the rotatable testing platform.