公开(公告)号：US09412934B2

公开(公告)日：2016-08-09

申请号：US13897591

申请日：2013-05-20

申请人： MURATA ELECTRONICS OY

发明人： Antti Iihola ,  Ville Kaajakari ,  Jarmo Kemppainen ,  Pasi Kivinen ,  Risto Mourujärvi ,  Marcus Rinkiö

IPC分类号： H01L21/00 ,  H01L41/39 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24

CPC分类号： H01L41/39 ,  H03H3/0076 ,  H03H9/02259 ,  H03H9/2457 ,  H03H2009/02291 ,  H03H2009/02322 ,  H03H2009/02496

摘要： A method for manufacturing microelectromechanical flexural resonators with a deforming element that has an elongate body extending along a spring axis. A deforming element is positioned on the semiconductor wafer with a defined nominal n-type doping concentration such that a crystal orientation angle is formed between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is adjusted to a specific range, based on total frequency error of the deforming element in a broad temperature range. The combination is optimized to a range where also sensitivity to variations in the material properties is minimized.

摘要翻译： 一种用于制造具有沿弹簧轴延伸的细长主体的变形元件的微机电弯曲谐振器的方法。 变形元件以规定的标称n型掺杂浓度定位在半导体晶片上，使得在变形元件的弹簧轴线和硅半导体晶片的晶轴之间形成晶体取向角。 基于变形元件在宽温度范围内的总频率误差，将晶体取向角和标称n型掺杂浓度的组合调整到特定范围。 该组合被优化到对材料性质的变化的敏感性最小化的范围。