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    Rotational MEMS resonator for oscillator applications
    2.
    发明授权
    Rotational MEMS resonator for oscillator applications 有权
    用于振荡器应用的旋转MEMS谐振器

    公开(公告)号：US09509278B2

    公开(公告)日：2016-11-29

    申请号：US13828066

    申请日：2013-03-14

    Applicant: Silicon Laboratories Inc.

    Inventor： Aaron J. Caffee ,  Jeffrey L. Sonntag ,  Brian G. Drost ,  Mehrnaz Motiee

    IPC: H03H9/24 ,  H03H9/02 ,  H03B5/30

    CPC classification number: H03H9/2457 ,  H03B5/30 ,  H03H9/02259 ,  H03H9/02275 ,  H03H9/2431 ,  H03H2009/02291 ,  H03H2009/02346 ,  H03H2009/02496

    Abstract: An apparatus includes a microelectromechanical system (MEMS) device. The MEMS device includes a resonator suspended from a substrate, an anchor disposed at a center of the resonator, a plurality of suspended beams radiating between the anchor and the resonator, a plurality of first electrodes disposed about the anchor, and a plurality of second electrodes disposed about the anchor. The plurality of first electrodes and the resonator form a first electrostatic transducer. The plurality of second electrodes and the resonator form a second electrostatic transducer. The first electrostatic transducer and the second electrostatic transducer are configured to sustain rotational vibrations of the resonator at a predetermined frequency about an axis through the center of the resonator and orthogonal to a plane of the substrate in response to a signal on the first electrode.

    Abstract translation: 一种装置包括微机电系统（MEMS）装置。 MEMS器件包括从衬底悬挂的谐振器，设置在谐振器中心的锚，在锚和谐振器之间辐射的多个悬臂，围绕锚定器设置的多个第一电极和多个第二电极 围绕锚点布置。 多个第一电极和谐振器形成第一静电换能器。 多个第二电极和谐振器形成第二静电换能器。 第一静电换能器和第二静电换能器被配置为响应于第一电极上的信号，以围绕谐振器的中心的轴线以预定的频率维持谐振器的旋转振动并且与基板的平面正交。

    Electromechanical oscillators, parametric oscillators, and torsional resonators based on piezoresistive nanowires
    5.
    发明授权
    Electromechanical oscillators, parametric oscillators, and torsional resonators based on piezoresistive nanowires 有权
    基于压阻纳米线的机电振荡器，参数振荡器和扭转谐振器

    公开(公告)号：US08836440B2

    公开(公告)日：2014-09-16

    申请号：US13560037

    申请日：2012-07-27

    Applicant: Philip X.-L. Feng ,  Luis Guillermo Villanueva ,  Michael L. Roukes

    Inventor： Philip X.-L. Feng ,  Luis Guillermo Villanueva ,  Michael L. Roukes

    IPC: H03B5/30 ,  H03H7/00 ,  H03B5/32

    CPC classification number: H03B5/32 ,  H03B5/30 ,  H03H7/00 ,  H03H9/02259 ,  H03H9/2463 ,  H03H9/505 ,  H03H2009/02291 ,  H03H2009/02496 ,  H03H2009/02519

    Abstract: Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. In very thin nanowire structures (sub-micron-meter in width), additive piezoresistance patterning and fabrication can be highly difficult and thus need to be avoided. This invention shows that, in piezoresistive nanowires with homogeneous material composition and symmetric structures, no conventional and additive piezoresistance loops are needed. Using AC and DC drive signals, and bias signals of controlled frequency and amplitude, output signals having a variety of frequencies can be obtained. Various examples of such resonators and their theory of operation are described.

    Abstract translation: 双夹紧纳米线机电谐振器，可用于产生参数振荡和反馈自持续振荡。 纳米线机电谐振器可以使用传统的NEMS和CMOS制造方法制成。 在非常薄的纳米线结构（亚微米级宽度）中，添加剂压阻图案化和制造可能非常困难，因此需要避免。 本发明表明，在具有均匀材料组成和对称结构的压阻纳米线中，不需要常规和附加的压阻环路。 使用AC和DC驱动信号以及受控频率和幅度的偏置信号，可以获得具有各种频率的输出信号。 描述了这种谐振器的各种示例及其操作理论。

    MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR
    6.
    发明申请
    MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR 有权
    基于微电子机器的可变谐振器

    公开(公告)号：US20140184347A1

    公开(公告)日：2014-07-03

    申请号：US13732515

    申请日：2013-01-02

    Applicant: MOTOROLA MOBILITY LLC

    Inventor： William P. Alberth, Jr. ,  Gregory R. Black ,  Richard E. Mach

    IPC: H03B5/30

    CPC classification number: H03B5/30 ,  H03H9/02393 ,  H03H9/02409 ,  H03H9/19 ,  H03H9/2457 ,  H03H9/467 ,  H03H2007/008 ,  H03H2009/02291 ,  H03H2009/0233 ,  H03H2009/155

    Abstract: A tunable resonator is provided that has a high Q for each resonate frequency. The tunable resonator is a MEMs tunable resonator wherein the tuner is affected by moving a moveable mass, associated with the resonating portion of the resonator, form a first position to a second position such that the moveable mass is held in the first position or second position by a detent rather than a constant electromagnet magnetic or electrostatic force applied thereon.

    Abstract translation: 提供了一种可调谐谐振器，对于每个谐振频率具有高Q值。 可调谐谐振器是MEMs可调谐谐振器，其中调谐器通过移动与谐振器的谐振部分相关联的可移动质量而受到影响，形成第一位置到第二位置，使得可移动质量块保持在第一位置或第二位置 通过制动而不是施加在其上的恒定的电磁体磁性或静电力。

    Resonator and production method thereof
    7.
    发明授权
    Resonator and production method thereof 有权
    谐振器及其制作方法

    公开(公告)号：US08698257B2

    公开(公告)日：2014-04-15

    申请号：US13377898

    申请日：2010-06-30

    Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

    Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

    IPC: H01L29/84

    CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

    Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

    Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

    RESONATOR AND PRODUCTION METHOD THEREOF
    9.
    发明申请
    RESONATOR AND PRODUCTION METHOD THEREOF 有权
    谐振器及其生产方法

    公开(公告)号：US20120091547A1

    公开(公告)日：2012-04-19

    申请号：US13377898

    申请日：2010-06-30

    Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

    Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

    IPC: H01L29/84 ,  H01L21/02

    CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

    Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

    Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

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