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公开(公告)号：US11561097B2
公开(公告)日：2023-01-24
申请号：US17328754
申请日：2021-05-24
IPC分类号： G01C19/5747
摘要： A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.
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公开(公告)号：US11377346B2
公开(公告)日：2022-07-05
申请号：US17015539
申请日：2020-09-09
摘要： The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.
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公开(公告)号：US11193768B2
公开(公告)日：2021-12-07
申请号：US16783726
申请日：2020-02-06
IPC分类号： G01C19/5712
摘要： A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.
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公开(公告)号：US20210372794A1
公开(公告)日：2021-12-02
申请号：US17241814
申请日：2021-04-27
IPC分类号： G01C19/5712
摘要： A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.
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公开(公告)号：US11137252B2
公开(公告)日：2021-10-05
申请号：US16747681
申请日：2020-01-21
IPC分类号： G01C19/5712 , G01C19/5747 , G01C19/5684 , G01C19/5677
摘要： This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.
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公开(公告)号：US11060866B2
公开(公告)日：2021-07-13
申请号：US16747659
申请日：2020-01-21
IPC分类号： G01C19/5712 , G01C19/574
摘要： A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.
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公开(公告)号：US10137851B2
公开(公告)日：2018-11-27
申请号：US14948503
申请日：2015-11-23
发明人： Ville-Pekka Rytkönen , Matti Liukku
摘要： The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame, a substrate, a proof-mass a spring connected to the proof-mass and to the substrate, and comb electrodes. The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame. The semiconductor package of the invention comprises at least one MEMS sensor.
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公开(公告)号：US12075605B2
公开(公告)日：2024-08-27
申请号：US17572073
申请日：2022-01-10
IPC分类号： H05K9/00
CPC分类号： H05K9/0049
摘要： An electronic component is provided that includes a package base and a metallic cap. The metallic cap separates the enclosure into at least a first compartment and a second compartment. An electronic chip is in the first compartment, and the metallic cap separates the enclosure into the first and second compartments with its shape which forms a separator which extends from the ceiling of the first compartment toward the mounting plane of the electronic chip.
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公开(公告)号：US11820648B2
公开(公告)日：2023-11-21
申请号：US17052287
申请日：2019-05-13
发明人： Matti Liukku , Ville-Pekka Rytkönen
IPC分类号： B81B7/00 , G01P15/125 , G01P15/08
CPC分类号： B81B7/0016 , G01P15/125 , B81B2201/0235 , G01P2015/0882
摘要： A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.
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公开(公告)号：US11442077B2
公开(公告)日：2022-09-13
申请号：US16911830
申请日：2020-06-25
IPC分类号： G01P15/125 , G01P1/00 , G01P15/18
摘要： The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.
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