公开(公告)号：US11796561B2

公开(公告)日：2023-10-24

申请号：US17880526

申请日：2022-08-03

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Akira Konno ,  Yoshitaka Kato ,  Ville-Pekka Rytkonen

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P1/003 ,  G01P15/18

Abstract: The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.