公开(公告)号：US20120267985A1

公开(公告)日：2012-10-25

申请号：US13534623

申请日：2012-06-27

申请人： Makoto FURUHATA ,  Takashi YAMAZAKI ,  Yuji HAMAYAMA

发明人： Makoto FURUHATA ,  Takashi YAMAZAKI ,  Yuji HAMAYAMA

IPC分类号： H01L41/053

CPC分类号： H03H9/215 ,  H03H9/02102 ,  H03H9/02133

摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

摘要翻译： 弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域， 当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。 弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接 地区。

公开(公告)号：US20100244973A1

公开(公告)日：2010-09-30

申请号：US12729481

申请日：2010-03-23

申请人： Makoto FURUHATA ,  Takashi YAMAZAKI ,  Yuji HAMAYAMA

发明人： Makoto FURUHATA ,  Takashi YAMAZAKI ,  Yuji HAMAYAMA

IPC分类号： H03B5/32 ,  H01L41/04

CPC分类号： H03H9/215 ,  H03H9/02102 ,  H03H9/02133

摘要： A flexural vibration piece includes: a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region, wherein when m is the number of heat conduction paths, αth is the thermal conductivity of the heat conduction path, αv is the thermal conductivity of the flexural vibrator, tv is the thickness of the flexural vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth≧(tv/m)×(αv/αth) is satisfied.

摘要翻译： 弯曲振动片包括：弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域 并且当拉伸应力作用在第一区域上时施加压缩应力，并且在第一平面中进行弯曲振动; 以及由第一区域和第二区域附近的热传导路径，其由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接，其中当m 是热传导路径的数量，αth是导热路径的热导率，αv是弯曲振动器的热导率，tv是与第一平面正交的方向上的弯曲振动器的厚度，tth是 热传导路径的厚度，tth≥（tv / m）×（αv/αth）的关系被满足。

公开(公告)号：US20100244989A1

公开(公告)日：2010-09-30

申请号：US12729759

申请日：2010-03-23

申请人： Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

发明人： Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

IPC分类号： H03H9/24

CPC分类号： H03H9/215

摘要： A flexural vibration piece includes: a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path, between the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region, wherein when m is the number of heat conduction paths, ρth is the thermal resistivity of the heat conduction path, ρv is the thermal resistivity of the flexural vibrator, tv is the thickness of the flexural vibrator in, a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth≧(1/m)×tv×(ρth/ρv) is satisfied.

摘要翻译： 弯曲振动片包括：弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域 并且当拉伸应力作用在第一区域上时施加压缩应力，并且在第一平面中进行弯曲振动; 以及在第一区域和第二区域之间的热传导路径，其由导热率高于弯曲振动器的热导率的材料形成，并且在第一区域和第二区域之间热连接，其中当m为数 的导热路径的热阻，r是导热路径的热阻，v是弯曲振动器的热阻，tv是弯曲振子的厚度，与第一平面垂直的方向，第t 是热传导路径的厚度，满足tth≥（1 / m）×tv×（＆rgr; th /＆rgr; v）的关系。

公开(公告)号：US20110057549A1

公开(公告)日：2011-03-10

申请号：US12748714

申请日：2010-03-29

申请人： Hiroki KAWAI ,  Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

发明人： Hiroki KAWAI ,  Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

IPC分类号： H01L41/053 ,  H01L41/04

CPC分类号： H01L41/1132 ,  G01C19/5607 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/21

摘要： A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.

摘要翻译： 弯曲振动片包括基座和从其延伸的振动臂，每对振动臂具有沿着所述一对振动臂对准的方向的一个主表面沿所述振动臂的延伸方向形成的第一凹槽， 和在另一个主表面上与第一槽并排形成的第二槽，第一和第二槽部的深度之和大于一个主表面与另一个主表面之间的间隔，质量部分为 设置在所述一对振动臂中的每一个上，在作为所述第一凹槽的开口侧的一个主表面上，所述第一凹槽朝向与所述振动臂彼此面对的内侧相反的外侧形成。

公开(公告)号：US20110080070A1

公开(公告)日：2011-04-07

申请号：US12892096

申请日：2010-09-28

申请人： Makoto FURUHATA ,  Takashi YAMAZAKI

发明人： Makoto FURUHATA ,  Takashi YAMAZAKI

IPC分类号： H01L41/04 ,  H03B5/32

CPC分类号： H03H9/215 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator element includes: a base part; and a resonating arm part that extends from the base part in a first direction and performs flexing vibration, wherein the resonating arm part has one principal surface and the other principal surface opposed to the one principal surface, a first groove part provided along the first direction of the resonating arm part on the one principal surface, a second groove part provided in juxtaposition with the first groove part in a second direction orthogonal to the first direction in a plan view on the other principal surface, a third groove part provided in juxtaposition with the first groove part in the first direction in the plan view and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove part provided in juxtaposition with the second groove part in the first direction in the plan view and provided nearer the base part side than the second groove on the one principal surface, and wherein a sum of a depth of the first groove part and a depth of the second groove part and a sum of a depth of the third groove part and a depth of the fourth groove part are larger than a distance between the one principal surface and the other principal surface.

摘要翻译： 谐振器元件包括：基部; 以及谐振臂部，其从所述基部沿第一方向延伸并进行挠曲振动，所述谐振臂部具有一个主面，所述另一主面与所述一个主面相对;第一槽部，沿所述第一方向 所述谐振臂部分在所述一个主表面上的第二凹槽部分，在另一个主表面上的平面图中在与所述第一凹槽部分并排设置在与所述第一方向正交的第二方向上设置的第二凹槽部分;与所述第一凹槽部分并排设置的第三凹槽部分， 所述第一槽部分在所述平面图中的所述第一方向上，并且比所述另一个主表面上的所述第一槽更靠近所述基部侧;以及第四槽部，其在所述平面图中与所述第二槽部在所述第一方向上并列设置; 并且在一个主表面上比第二槽更靠近基部侧，并且其中第一槽部a的深度 并且第二凹槽部分的深度和第三凹槽部分的深度与第四凹槽部分的深度之和大于一个主表面和另一个主表面之间的距离。

公开(公告)号：US20100277041A1

公开(公告)日：2010-11-04

申请号：US12767851

申请日：2010-04-27

申请人： Takashi YAMAZAKI ,  Makoto FURUHATA

发明人： Takashi YAMAZAKI ,  Makoto FURUHATA

IPC分类号： H01L41/02

CPC分类号： H03H9/215 ,  H03H9/19

摘要： A flexural vibration piece includes: a base portion; and a vibration arm extending from the base portion, wherein the vibration arm has first and second main faces which are arranged to be opposite each other, the first and second main faces respectively have first and second grooves which are formed in the longitudinal direction of the vibration arm, the first groove has a plurality of first groove portions which are divided in the longitudinal direction of the vibration arm and arranged to be alternately shifted on both sides with respect to the longitudinal center line of the vibration arm in the longitudinal direction, the second groove has a plurality of second groove portions which are divided in the longitudinal direction of the vibration arm, and arranged to be alternately shifted on both sides with respect to the longitudinal center line of the vibration arm in the longitudinal direction and on an opposite side to the first groove portions with respect to the longitudinal center line, and a predetermined voltage is applied to first excitation electrodes provided at the first groove and the second groove and second excitation electrodes provided on both side faces of the vibration arm, such that the vibration arm flexural-vibrates in the in-plane direction of the first or second main face.

摘要翻译： 弯曲振动片包括：基部; 以及从所述基部延伸的振动臂，其中，所述振动臂具有彼此相对配置的第一和第二主面，所述第一主面和第二主面分别具有沿着所述第一和第二主面的纵向方向形成的第一和第二凹槽 所述第一槽具有多个第一槽部，所述第一槽部在所述振动臂的长度方向上被分割，并且相对于所述振动臂的纵向中心线在长度方向上在两侧交替地移动， 第二槽具有沿振动臂的长度方向分割的多个第二槽部，并且配置成相对于振动臂的纵向中心线在纵向方向和相对侧交替地移动 相对于纵向中心线到第一凹槽部分，并且将预定电压施加到fi 设置在第一槽处的第一激励电极和设置在振动臂的两个侧面上的第二激励电极，使得振动臂在第一或第二主面的面内方向上弯曲振动。

公开(公告)号：US20120092084A1

公开(公告)日：2012-04-19

申请号：US13331602

申请日：2011-12-20

申请人： Makoto FURUHATA ,  Takashi YAMAZAKI

发明人： Makoto FURUHATA ,  Takashi YAMAZAKI

IPC分类号： H01L41/04 ,  H03B5/32

CPC分类号： H03H9/215 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

摘要翻译： 具有基部的谐振器; 和谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在所述一个主表面上的第一凹槽，设置成在所述另一个主表面上与所述第一凹槽并置设置的第二凹槽，并置设置的第三凹槽 与第一槽相比设置在比另一主表面上的第一槽更靠近基部侧的第四槽和与第二槽并列设置的第四槽，并且设置在基体部分侧比主表面上的第二槽更靠近基部侧。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。

公开(公告)号：US20110181156A1

公开(公告)日：2011-07-28

申请号：US13083945

申请日：2011-04-11

申请人： Makoto FURUHATA ,  Takashi YAMAZAKI

发明人： Makoto FURUHATA ,  Takashi YAMAZAKI

IPC分类号： H01L41/04

CPC分类号： H03H9/215 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

摘要翻译： 具有基部的谐振器; 和谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在所述一个主表面上的第一凹槽，设置成在所述另一个主表面上与所述第一凹槽并置设置的第二凹槽，并置设置的第三凹槽 与第一槽相比设置在比另一主表面上的第一槽更靠近基部侧的第四槽和与第二槽并列设置的第四槽，并且设置在基体部分的侧面上而不是在主表面上的第二槽。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。

公开(公告)号：US20110215680A1

公开(公告)日：2011-09-08

申请号：US13037412

申请日：2011-03-01

申请人： Akinori YAMADA ,  Makoto FURUHATA

发明人： Akinori YAMADA ,  Makoto FURUHATA

IPC分类号： H01L41/04

CPC分类号： H01L41/04

摘要： A resonator element includes: a base section; and at least one resonating arm formed so as to extend from the base section, and having a flexural vibrating section, wherein the flexural vibrating section includes a pair of principal surfaces formed along a direction in which the resonating arm performs a flexural vibration, and outer side surfaces intersecting with the principal surfaces of the resonating arm, the flexural vibrating section is provided with at least three groove sections, the groove sections are formed on both or either one of the principal surfaces in a direction intersecting with the principal surfaces, and at least a part or the whole of an outer wall formed of the outer side surface and the groove section and at least a part or the whole of an inner wall formed of the groove sections adjacent to each other are electrically vibrated in a flexural manner.

摘要翻译： 谐振器元件包括：基部; 以及形成为从所述基部延伸的至少一个谐振臂，并具有弯曲振动部，所述弯曲振动部包括沿着所述共鸣臂进行弯曲振动的方向形成的一对主面，以及外部 与谐振臂的主表面相交的侧面，弯曲振动部设置有至少三个槽部，槽部形成在与主面交叉的方向的两个或两个主面上，并且在 由外侧表面和槽部形成的外壁的至少一部分或全部以及彼此相邻的槽部形成的内壁的至少一部分或全部以弯曲的方式电动振动。

公开(公告)号：US20110063041A1

公开(公告)日：2011-03-17

申请号：US12878629

申请日：2010-09-09

申请人： Akinori YAMADA ,  Makoto FURUHATA

发明人： Akinori YAMADA ,  Makoto FURUHATA

IPC分类号： H03B5/32 ,  H01L41/04

CPC分类号： H03H9/21 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator element includes: a base portion; and a resonating arm extending in a first direction from the base portion, wherein the resonating arm includes a first surface, a second surface facing the first surface, a first side surface extending in the first direction so as to connect the first and second surfaces, and a second side surface facing the first side surface, wherein the resonating arm includes a first width portion having a first width and a second width portion provided at a root of the resonating arm so as to have a second width larger than the first width, wherein the resonating arm includes a groove portion provided on at least one of the first and second surfaces so as to extend in the first direction, the groove portion in the second width portion having a width larger than a width of the groove portion in the first width portion, and wherein a sum of the width between the groove portion in the second width portion and the first side surface and the width between the groove portion in the second width portion and the second side surface is smaller than a sum of the width between the groove portion in the first width portion and the first side surface and the width between the groove portion in the first width portion and the second side surface.

摘要翻译： 谐振器元件包括：基部; 以及从所述基部沿第一方向延伸的谐振臂，其中所述谐振臂包括第一表面，面向所述第一表面的第二表面，沿所述第一方向延伸以便连接所述第一表面和所述第二表面的第一侧表面， 以及面对所述第一侧面的第二侧面，其中所述谐振臂包括具有第一宽度的第一宽度部分和设置在所述谐振臂的根部处的第二宽度部分，以具有大于所述第一宽度的第二宽度， 其中所述谐振臂包括设置在所述第一和第二表面中的至少一个上以沿所述第一方向延伸的凹槽部分，所述第二宽度部分中的所述凹槽部分的宽度大于所述第一和第二表面中的所述凹槽部分的宽度 宽度部分，并且其中第二宽度部分中的槽部分和第一侧表面之间的宽度与第二宽度部分中的槽部分之间的宽度之和 所述第二侧面小于所述第一宽度部的槽部与所述第一侧面之间的宽度与所述第一宽度部的槽部与所述第二侧面的宽度的和。