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1.发明授权Method of coil fabrication for thin-film magnetic recording heads using phase-shifting masks 失效使用相移掩模的薄膜磁记录头的线圈制造方法
公开(公告)号：US5512394A
公开(公告)日：1996-04-30
申请号：US337808
申请日：1994-11-14
CPC分类号： G11B5/3163 , G03F7/00 , G03F7/2002 , H01F41/046
摘要： A method for fabricating a thin-film magnetic read/write head that eliminates contrast effects producing notching in a thin-film magnetic head coil caused by subsurface reflectivity at a reflective layer step during a photolithography step in the fabrication of the coil is provided. The method comprises the steps of forming a first permalloy yoke on a substrate, wherein the edges of the first yoke create steps from the top of the first yoke down to the substrate, forming a partial conformal layer of an electric insulation material over the first permalloy yoke and the substrate, forming a conformal copper seed layer over the electric insulation layer, forming a conductive coil on the electric insulation layer, wherein the copper coil is fabricated using a lithography process including placing a phase-shifting mask, formed in the image of the coil and containing non-printable openings covered by transparent material of a thickness that creates a 180.degree. phase-shift in illumination, over a photoresist layer, the phase-shifting mask creating illumination destructive interference in regions of the photoresist that are covered by the mask layer and immediately adjacent to regions of the photoresist not covered by the mask, forming a second electric insulation layer over the conductive coil, wherein the second electric insulation layer planarizes the coil topography, and forming a second permalloy yoke over the second electric insulation layer, wherein the second yoke is joined to the first yoke at a back gap but separated from the first yoke by a thin insulating layer at a recording gap.
摘要翻译： 提供一种制造薄膜磁读/写头的方法，该方法消除了在制造线圈的光刻步骤期间在反射层步骤中由表面反射率引起的在薄膜磁头线圈中产生切口的对比度效应。 该方法包括以下步骤：在衬底上形成第一坡莫合金磁轭，其中第一磁轭的边缘从第一磁轭的顶部下降到衬底，在第一坡莫合金上形成电绝缘材料的部分共形层 轭和衬底，在电绝缘层上形成共形铜籽晶层，在电绝缘层上形成导电线圈，其中铜线圈使用光刻工艺制造，包括放置形成在图像中的相移掩模 该线圈并且包含由透明材料覆盖的不可打印的开口，其厚度在光致抗蚀剂层上在照明中产生180°的相移，所述相移掩模在由所述光致抗蚀剂覆盖的区域中产生光照的相消干涉 掩模层，并且紧邻未被掩模覆盖的光致抗蚀剂的区域，形成第二电绝缘层 r所述导电线圈，其中所述第二电绝缘层平坦化所述线圈形貌，并且在所述第二电绝缘层上形成第二坡莫合金磁轭，其中所述第二磁轭在后间隙处与所述第一磁轭接合，但是与所述第一磁轭分离， 在记录间隙处的薄绝缘层。
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2.发明授权Magnetic storage system using thin film magnetic recording heads using phase-shifting mask 失效使用移相掩模的薄膜磁记录头的磁存储系统
公开(公告)号：US5414580A
公开(公告)日：1995-05-09
申请号：US242810
申请日：1994-05-13
CPC分类号： G11B5/3163 , G03F7/00 , G03F7/2002 , H01F41/046
摘要： A method for fabricating a thin-film magnetic read/write head that eliminates contrast effects producing notching in a thin-film magnetic head coil caused by subsurface reflectivity at a reflective layer step during a photolithography step in the fabrication of the coil is provided. The method comprises the steps of forming a first permalloy yoke on a substrate, wherein the edges of the first yoke create steps from the top of the first yoke down to the substrate, forming a partial conformal layer of an electric insulation material over the first permalloy yoke and the substrate, forming a conformal copper seed layer over the electric insulation layer, forming a conductive coil on the electric insulation layer, wherein the copper coil is fabricated using a lithography process including placing a phase-shifting mask, formed in the image of the coil and containing non-printable openings covered by transparent material of a thickness that creates a 180.degree. phase-shift in illumination, over a photoresist layer, the phase-shifting mask creating illumination destructive interference in regions of the photoresist that are covered by the mask layer and immediately adjacent to regions of the photoresist not covered by the mask, forming a second electric insulation layer over the conductive coil, wherein the second electric insulation layer planarizes the coil topography, and forming a second permalloy yoke over the second electric insulation layer, wherein the second yoke is joined to the first yoke at a back gap but separated from the first yoke by a thin insulating layer at a recording gap.
摘要翻译： 提供一种制造薄膜磁读/写头的方法，该方法消除了在制造线圈的光刻步骤期间在反射层步骤中由表面反射率引起的在薄膜磁头线圈中产生切口的对比度效应。 该方法包括以下步骤：在衬底上形成第一坡莫合金磁轭，其中第一磁轭的边缘从第一磁轭的顶部下降到衬底，在第一坡莫合金上形成电绝缘材料的部分共形层 轭和衬底，在电绝缘层上形成共形铜籽晶层，在电绝缘层上形成导电线圈，其中铜线圈使用光刻工艺制造，包括放置形成在图像中的相移掩模 该线圈并且包含由透明材料覆盖的不可打印的开口，其厚度在光致抗蚀剂层上在照明中产生180°的相移，所述相移掩模在由所述光致抗蚀剂覆盖的区域中产生光照的相消干涉 掩模层，并且紧邻未被掩模覆盖的光致抗蚀剂的区域，形成第二电绝缘层 r所述导电线圈，其中所述第二电绝缘层平坦化所述线圈形貌，并且在所述第二电绝缘层上形成第二坡莫合金磁轭，其中所述第二磁轭在后间隙处与所述第一磁轭接合，但是与所述第一磁轭分离， 在记录间隙处的薄绝缘层。
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公开(公告)号：US4193690A
公开(公告)日：1980-03-18
申请号：US843611
申请日：1977-10-19
摘要： A method and apparatus for heterodyne detection of coherent Raman signals from a Raman active sample exhibiting a Raman-induced Kerr effect. More specifically, a method and apparatus is disclosed for generating a local oscillator output and heterodyning this output with a portion of a probe laser output having its polarization shifted by 90 degrees due to a Raman-induced Kerr effect in a Raman active sample. A probe laser output and a pump laser output are directed into and intersect within the Raman active sample. When their frequency difference is equal to a Raman mode frequency, a non-linear optically induced birefringence in the sample shifts the probe polarization and produces a signal at the output of a polarization analyzer. This signal is heterodyned with a local oscillator output having substantially the same frequency. The local oscillator output is generated either by rotating the polarization analyzer, elliptically polarizing the probe laser output or reflecting a portion of the probe laser output directly into an optical detector. A combining of the local oscillator output and the polarization-shifted probe laser output creates a heterodyned cross-term signal which is linearly proportional to the Raman cross-section of the sample. In addition, an apparatus is disclosed for modulation of the pump laser output which in turn modulates the heterodyned cross-term signal and facilitates its subsequent detection and amplification.
摘要翻译： 用于从展示拉曼诱导的克尔效应的拉曼活性样品的外差检测相干拉曼信号的方法和装置。 更具体地，公开了一种用于产生本地振荡器输出并且由于在拉曼有源样本中由拉曼诱导的克尔效应使其偏振偏移90度的探针激光输出的一部分来产生本输出的方法和装置。 探针激光输出和泵浦激光输出被引导到拉曼活性样品内并与其相交。 当它们的频率差等于拉曼模式频率时，样本中的非线性光学诱导双折射移动探针偏振并在偏振分析器的输出处产生信号。 该信号与具有基本上相同频率的本地振荡器输出进行外差。 本地振荡器输出是通过旋转偏振分析仪产生的，椭圆偏振探测激光输出或将探测激光输出的一部分直接反射到光学检测器中。 本地振荡器输出和极化移位探针激光输出的组合产生与样品的拉曼截面成线性比例的外差交叉信号。 此外，公开了一种用于调制泵激光器输出的装置，该装置又调制外差交叉项信号并促进其随后的检测和放大。
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公开(公告)号：US6094267A
公开(公告)日：2000-07-25
申请号：US295213
申请日：1999-04-21
IPC分类号： G01J3/26 , G01J3/30 , G01J3/42 , G01J3/447 , G01J9/04 , G01N21/03 , G01N21/21 , G01N21/27 , G01N21/39 , H01S3/00 , G01B9/02
摘要： A cavity ring-down system for performing cavity ring-down spectroscopy (CRDS) using optical heterodyne detection of a ring-down wave E.sub.RD during a ring-down phase or a ring-up wave E.sub.RU during a ring up phase. The system sends a local oscillator wave E.sub.LO and a signal wave E.sub.SIGNAL to the cavity, preferably a ring resonator, and derives an interference signal from the combined local oscillator wave E.sub.LO and the ring-down wave E.sub.RD (or ring-up wave E.sub.RU). The local oscillator wave E.sub.LO has a first polarization and the ring-down wave E.sub.RD has a second polarization different from the first polarization. The system has a combining arrangement for combining or overlapping local oscillator wave E.sub.LO and the ring-down wave E.sub.RD at a photodetector, which receives the interference signal and generates a heterodyne current I.sub.H therefrom. Frequency and phase differences between the waves are adjustable.
摘要翻译： 一种空穴衰减系统，用于在振铃阶段期间使用环形衰减波ERR的环外波检测来执行空腔衰减光谱（CRDS）。 该系统将本地振荡器波ELO和信号波ESIGNAL发送到腔，优选地是环形谐振器，并且从组合的本地振荡器波ELO和衰减波ERD（或振铃波ERU）导出干扰信号。 本地振荡器波ELO具有第一极化，并且降波波ERD具有与第一极化不同的第二极化。 该系统具有用于组合或重叠本地振荡器波ELO和在光电检测器处的衰减波ERD的组合布置，其接收干扰信号并从其产生外差电流IH。 波之间的频率和相位差可调。
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公开(公告)号：US5161133A
公开(公告)日：1992-11-03
申请号：US722373
申请日：1991-06-25
申请人： Marc D. Levenson
发明人： Marc D. Levenson
IPC分类号： G11B11/105
CPC分类号： G11B11/10545 , G11B11/10515
摘要： A magneto-optical (M-O) storage detection channel which includes optical means for detecting edge transitions between magneto-optical domains. The beam returning from the storage medium is analyzed both spatially and in polarization. When a transition is centered under the read laser beam, the spatial reversal in the sign of the amplitude of the signal polarization due to the spatially nonuniform Kerr rotation is compensated by a reversal due to spatially nonuniform (split) detectors or a matched optical filter. The optical powers on the two sides of each split detectors or on two independent detectors sensitive to orthogonal polarizations become unequal thereby producing an electrical signal signal which comprises spaced peaks in opposite directions at the leading and trailing edges of the M-O domain or mark.
摘要翻译： 一种磁光（M-O）存储检测通道，其包括用于检测磁光域之间的边缘跃迁的光学装置。 从存储介质返回的光束在空间上和偏振中都被分析。 当转换中心在读取的激光束下方时，由空间不均匀克尔旋转引起的信号极化幅度的符号的空间反转由于空间不均匀（分裂）检测器或匹配滤光器的反转而被补偿。 每个分离检测器的两侧的光功率或对正交偏振敏感的两个独立检测器上的光功率变得不相等，从而产生电信号信号，其在M-O域或标记的前沿和后沿处包括相反方向上的间隔峰值。
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6.发明授权
公开(公告)号：US4523847A
公开(公告)日：1985-06-18
申请号：US511593
申请日：1983-07-07
CPC分类号： G01J3/4338 , G01J3/447 , G01J9/04 , G01N21/19
摘要： A method and device for detecting dichroic and/or birefringent narrow spectral features in a sample is described. The method includes the steps of providing a beam of light having an optical frequency bandwidth which is narrow compared to the width of the narrow spectral feature and having a center frequency .omega..sub.c which lies near the narrow spectral feature, polarization phase modulating a beam of light with a single RF frequency to provide a pure FM spectrum having upper and lower sidebands in which either the carrier and sidebands have been polarized with respect to one another, exposing the sample containing the narrow spectral feature to the polarized modulated light so that the FM sidebands probe the narrow spectral feature, polarization analyzing and then photodetecting the light emerging from the sample to detect a RF beat at the specific RF frequency used for the polarization phase modulation, and electronically monitoring the amplitude of the RF beat signal to indicate the strength of the narrow spectral feature. The device includes a polarization phase modulator and a polarization analyzer positioned on opposite sides of the sample. In a preferred embodiment the polarization phase modulator produces a frequency modulated optical spectrum with the sidebands polarized precisely orthogonal to the carrier.
摘要翻译： 描述了用于检测样品中二色性和/或双折射窄光谱特征的方法和装置。 该方法包括以下步骤：提供具有与窄光谱特征的宽度相比窄的光频带宽的光束，并具有位于窄光谱特征附近的中心频率ωc，调制光束的偏振相位 具有单个RF频率以提供具有上边带和下边带的纯FM频谱，其中载波和边带彼此相对极化，将包含窄频谱特征的样本曝光到偏振调制光，使得FM边带 探测窄谱特征，偏振分析，然后对从样本出射的光进行光电检测，以检测用于极化相位调制的特定RF频率的RF拍频，并电子监测RF拍频信号的幅度，以指示 窄谱特征。 该器件包括位于样品相对两侧的偏振相位调制器和偏振分析器。 在优选实施例中，偏振相位调制器产生频率调制的光谱，其中边带被精确地正交于载波极化。
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