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公开(公告)号:US08187902B2
公开(公告)日:2012-05-29
申请号:US12170190
申请日:2008-07-09
申请人: Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
发明人: Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
IPC分类号: H01L21/00 , G01P15/125 , G01C19/56
CPC分类号: G01C19/574 , G01C19/5719 , Y10T156/1039 , Y10T428/2495
摘要: A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
摘要翻译: 传感器包括由悬挂梁悬挂的检验质量块,悬挂梁的厚度小于检验质量块的厚度。
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公开(公告)号:US20100005884A1
公开(公告)日:2010-01-14
申请号:US12170190
申请日:2008-07-09
申请人: Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
发明人: Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
CPC分类号: G01C19/574 , G01C19/5719 , Y10T156/1039 , Y10T428/2495
摘要: A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
摘要翻译: 传感器包括由悬挂梁悬挂的检验质量块,悬挂梁的厚度小于检验质量块的厚度。
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