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    Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
    3.
    发明授权
    Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout 失效
    具有压电读数的梳齿驱动微机械音叉陀螺仪

    公开(公告)号：US5767405A

    公开(公告)日：1998-06-16

    申请号：US584377

    申请日：1996-01-11

    申请人： Jonathan J. Bernstein ,  Marc S. Weinberg

    发明人： Jonathan J. Bernstein ,  Marc S. Weinberg

    IPC分类号： G01C19/5719 ,  H03H9/02 ,  G01P9/04

    CPC分类号： G01C19/5719 ,  H03H9/02259 ,  H03H2009/02496 ,  H03H2009/02511

    摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    摘要翻译： 一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑梁和基板之间的电容变化的感测电极定位在支撑梁的每个端部下方的基板上。 在替代实施例中，压电感测电容器设置在挠曲件上以检测支撑电极的旋转。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何变化以及所产生的支撑电极和感测电极之间或压电电容器内的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

    Comb drive micromechanical tuning fork gyro
    4.
    发明授权
    Comb drive micromechanical tuning fork gyro 失效
    梳齿驱动微机械音叉陀螺仪

    公开(公告)号：US5349855A

    公开(公告)日：1994-09-27

    申请号：US870414

    申请日：1992-04-07

    申请人： Jonathan J. Bernstein ,  Marc S. Weinberg

    发明人： Jonathan J. Bernstein ,  Marc S. Weinberg

    IPC分类号： G01C19/5719 ,  G01P15/08 ,  H03H9/02 ,  G01P9/04

    CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01R33/0286 ,  H03H9/02259 ,  G01P2015/0814 ,  H03H2009/02354 ,  H03H2009/02496

    摘要： A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    摘要翻译： 微调音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

    Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
    5.
    发明授权
    Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation 有权
    微型音叉陀螺仪和相关的三轴惯性测量系统可以感测到平面外的旋转

    公开(公告)号：US06257059B1

    公开(公告)日：2001-07-10

    申请号：US09405721

    申请日：1999-09-24

    申请人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

    发明人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

    IPC分类号： G01C1900

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

    摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。 证明质量通过静电梳驱动器配对并设置在相反的振动运动中。 响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。 在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。 当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压 。 外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。

    Micromechanical d'arsonval magnetometer
    6.
    发明授权
    Micromechanical d'arsonval magnetometer 失效
    微机械直流磁力计

    公开(公告)号：US5731703A

    公开(公告)日：1998-03-24

    申请号：US550923

    申请日：1995-10-31

    申请人： Jonathan J. Bernstein ,  Marc S. Weinberg

    发明人： Jonathan J. Bernstein ,  Marc S. Weinberg

    IPC分类号： G01R33/02 ,  G01R33/00

    CPC分类号： G01R33/02

    摘要： A micromechanical D'Arsonval magnetometer for sensing magnetic fields at low frequency with high sensitivity for operation near the resonant frequency of a micromechanical structure comprising a movable proof mass supported by torsion flexures, a conductive winding formed on the movable proof mass, at least one bridge electrode spanning the movable proof mass, a source for electrically biasing the movable proof mass relative to the bridge electrode(s), and a drive for electrically driving the conductive winding. Magnetic fields in the plane of the proof mass perpendicular to an axis of rotation formed by the torsion flexures interact with current passing through the conductive winding so as to torque the proof mass about the axis of rotation, whereby the resulting rotation is sensed through capacitors formed between the proof mass and the bridge electrode(s). The present invention micromechanical D'Arsonval magnetometer can be operated either open or closed loop. An open loop embodiment allows the proof mass to twist solely under the influence of the magnetic fields, while a closed loop embodiment restrains the proof mass motion. The loop can be closed by constructing additional electrodes or by using the existing bridge electrode(s) for both sensing and rebalancing.

    摘要翻译： 一种微机械D'Arsonval磁强计，用于感测低频的磁场，具有高灵敏度，用于在微机械结构的谐振频率附近操作，包括由扭转挠曲支撑的可移动的检测质量，形成在可移动检验质量块上的导电绕组，至少一个桥 电极跨越可移动检测质量块，用于相对于桥接电极电动偏置可移动检验质量块的源和用于电驱动导电绕组的驱动器。 垂直于由扭转弯曲形成的旋转轴的检测质量平面中的磁场与通过导电绕组的电流相互作用，以便绕着旋转轴线扭转检验质量块，从而通过形成的电容感测所得的旋转 在检测质量块和桥接电极之间。 本发明的微机械D'Arsonval磁力计可以在开环或闭环操作。 开环实施例允许检测质量单独在磁场的影响下扭转，而闭环实施例限制了证明质量运动。 可以通过构造附加电极或通过使用现有的桥接电极来进行感测和重新平衡来闭合环路。

    Comb drive micromechanical tuning fork gyro fabrication method
    7.
    发明授权
    Comb drive micromechanical tuning fork gyro fabrication method 失效
    梳齿驱动微机械陀螺陀螺制造方法

    公开(公告)号：US5496436A

    公开(公告)日：1996-03-05

    申请号：US259989

    申请日：1994-06-15

    申请人： Jonathan J. Bernstein ,  Marc S. Weinberg

    发明人： Jonathan J. Bernstein ,  Marc S. Weinberg

    IPC分类号： G01C19/5719 ,  G01P15/08 ,  H03H9/02 ,  H01L21/3065 ,  H01L21/00

    CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01R33/0286 ,  H03H9/02259 ,  G01P2015/0814 ,  H03H2009/02354 ,  H03H2009/02496

    摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    摘要翻译： 一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

    Dual microwave cavity accelerometer
    8.
    发明授权
    Dual microwave cavity accelerometer 有权
    双微波腔加速度计

    公开(公告)号：US06928875B2

    公开(公告)日：2005-08-16

    申请号：US10341666

    申请日：2003-01-14

    申请人： James A. Bickford ,  Marc S. Weinberg ,  Anthony Petrovich

    发明人： James A. Bickford ,  Marc S. Weinberg ,  Anthony Petrovich

    IPC分类号： G01P15/08

    CPC分类号： G01P15/08

    摘要： A system and method for compensating for gradients in a dual cavity device such as but not limited to an accelerometer. A first source drives a first cavity at least two different modes, at least one mode varying with changes in cavity length. A second source drives a second cavity at least two different modes, at least one mode varying with changes in cavity length. A processor determines changes in cavity length as a function of both modes in both cavities to compensate for non-uniform behavior between the cavities.

    摘要翻译： 一种用于补偿双腔装置中的梯度的系统和方法，例如但不限于加速度计。 第一源驱动第一腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 第二源驱动第二腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 处理器确定腔长度的变化作为两个腔中的两种模式的函数，以补偿腔之间的不均匀行为。

    Force compensated comb drive
    10.
    发明授权
    Force compensated comb drive 有权
    强制补偿梳驱动

    公开(公告)号：US07302848B2

    公开(公告)日：2007-12-04

    申请号：US11076649

    申请日：2005-03-10

    申请人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    发明人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    IPC分类号： G01C19/00

    CPC分类号： G01C19/5719 ,  G01P15/125 ,  H02N1/008

    摘要： A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

    摘要翻译： 用于微机电系统的力补偿梳驱动器包括用于提供代表物理量的输出信号的MEMS机构; 用于致动MEMS机构的梳齿驱动器; 梳状驱动电路，用于向梳状驱动器提供驱动信号，用于将由梳状驱动器施加的预定位移显影到MEMS机构; 响应于力的变化的自动增益控制，以向梳状驱动电路提供校正信号以维持预定的运动; 以及响应于校正信号的补偿装置，用于调整MEMS机构的输出信号，以补偿由于预定力的变化导致的输出信号中的误差。