公开(公告)号：US07655571B2

公开(公告)日：2010-02-02

申请号：US11553132

申请日：2006-10-26

申请人： Mark Naoshi Kawaguchi ,  Kin Pong Lo ,  Brett Christian Hoogensen ,  Sandy M. Wen ,  Steven M. Kim

发明人： Mark Naoshi Kawaguchi ,  Kin Pong Lo ,  Brett Christian Hoogensen ,  Sandy M. Wen ,  Steven M. Kim

IPC分类号： H01L21/302

CPC分类号： H01L21/02071 ,  H01L21/02057 ,  H01L21/67115 ,  H01L21/67126 ,  H01L21/67201 ,  H01L21/68742

摘要： A method and apparatus for removing volatile residues from a substrate are provided. In one embodiment, a method for volatile residues from a substrate includes providing a processing system having a load lock chamber and at least one processing chamber coupled to a transfer chamber, treating a substrate in the processing chamber with a chemistry comprising halogen, and removing volatile residues from the treated substrate in the load lock chamber.

摘要翻译： 提供了用于从基板中去除挥发性残留物的方法和装置。 在一个实施方案中，一种用于来自衬底的挥发性残余物的方法包括提供具有负载锁定室和至少一个耦合到转移室的处理室的处理系统，用包含卤素的化学处理处理室中的衬底并除去挥发性 来自加载锁定室中经处理的基底的残留物。

公开(公告)号：US10989535B1

公开(公告)日：2021-04-27

申请号：US16778589

申请日：2020-01-31

申请人： Steven M. Kim ,  Gregory A. Zimmerman ,  Daniel A. Tazartes

发明人： Steven M. Kim ,  Gregory A. Zimmerman ,  Daniel A. Tazartes

IPC分类号： G01C19/72 ,  G02B6/42 ,  G02F1/31 ,  G02B6/44 ,  G02B26/08

摘要： One example includes a fiber-optic gyroscope (FOG) system that includes a fiber coil. The coil includes an optical fiber wound around a spool of a FOG. The optical fiber includes a first input and a second input. The system also includes an optical beam controller comprising an optical switch that provides a first optical beam to the first input and a second optical beam to the second input during a first switching state, and provides the first optical beam to the second input and the second optical beam to the first input during a second switching state. The system further includes a controller that mitigates bias error in determining rotation of the FOG based on comparing the first and second optical beams output from the FOG during the first and second switching states.

公开(公告)号：US11047688B2

公开(公告)日：2021-06-29

申请号：US15783299

申请日：2017-10-13

申请人： Steven M. Kim ,  Stephan P. Lovstedt ,  Gregory A. Zimmerman ,  Wesley A. Snow ,  Ragini Saxena ,  Ricardo A. Rosete

发明人： Steven M. Kim ,  Stephan P. Lovstedt ,  Gregory A. Zimmerman ,  Wesley A. Snow ,  Ragini Saxena ,  Ricardo A. Rosete

IPC分类号： G01C19/72

摘要： One example includes fiber optic gyroscope (FOG) assembly. The FOG assembly includes a spool comprising a flange. The FOG assembly also includes an optical fiber comprising an optical fiber coil portion that is counter-wound in a first orientation and a second orientation opposite the first orientation. The optical fiber portion can be coupled to the flange. The optical fiber further includes a loopback portion with respect to the first orientation that is secured to the flange.

公开(公告)号：US11079230B2

公开(公告)日：2021-08-03

申请号：US16409375

申请日：2019-05-10

申请人： Steven M. Kim ,  Gregory A. Zimmerman ,  Daniel A. Tazartes ,  Brent Robert Bateman

发明人： Steven M. Kim ,  Gregory A. Zimmerman ,  Daniel A. Tazartes ,  Brent Robert Bateman

IPC分类号： G01C19/72

摘要： One example includes a FOG assembly including a spool that includes a flattened portion corresponding to a flange comprising an axial center corresponding to a sensitive axis about which an associated FOG system is configured to measure rotation. The FOG assembly also includes a magnetic shield arranged as a capped concentric cover about the sensitive axis and coupled to the spool and the flange to create a toroidal cavity between the magnetic shield and the flange. A fiber coil is disposed within the toroidal cavity and coupled to the flange. The fiber coil includes an optical fiber which is counter-wound in first and second orientations. The fiber coil has an axial dimension along the sensitive axis that is less than or equal to approximately 160% of a radial width corresponding to a difference between an outer radius and an inner radius of the fiber coil.

公开(公告)号：US10337867B1

公开(公告)日：2019-07-02

申请号：US15952355

申请日：2018-04-13

申请人： Bassam S. Dimashkie ,  Steven M. Kim ,  Manfred Schiruska

发明人： Bassam S. Dimashkie ,  Steven M. Kim ,  Manfred Schiruska

IPC分类号： G01C19/72 ,  G02B6/293

摘要： An apparatus includes a symmetrical wavelength multiplexor (SWM) that includes a first port that receives a depolarized beam of light of a first center wavelength for a first wavelength range. A second port of the SWM receives a second center wavelength of light for a second wavelength range that is greater than the first wavelength range. A third port of the SWM provides a substantially symmetrical wavelength output to drive a fiber optic gyroscope (FOG) in accordance with the second center wavelength. The depolarized beam of light of the first center wavelength travels from the first port to the second port of the SWM and light of the second center wavelength travels from the second port to the third port of the SWM. The SWM mitigates spectral asymmetries between orthogonal axes of the second wavelength.