摘要:
In the present invention, temperature drop amounts of heating plate regions when the substrate is mounted on a heating plate are detected to detect a warped state of the substrate. From the temperature drop amounts of the heating plate regions, correction values for set temperatures of the heating plate regions are calculated. The calculation of the correction values for the set temperatures of the heating plate regions is performed by estimating steady temperatures within the substrate to be heat-processed on the heating plate from the temperature drop amounts of the heating plate regions using a correlation obtained in advance. From the estimated steady temperatures within the substrate and the temperature drop amounts of the heating regions, the correction values for the set temperatures of the heating plate regions are calculated. Based on the correction values for the set temperatures, the set temperatures of the heating plate regions are changed.
摘要:
An electric vehicle incorporates a ground fault detecting system and has first and second ungrounded power supplies. The ground fault detecting system includes a first insulation resistance detector for detecting a first insulation resistance of the first ungrounded power supply with respect to a grounded region of the electric vehicle, and a second insulation resistance detector for detecting a second insulation resistance of the second ungrounded power supply with respect to the grounded region. The first insulation resistance detector and the second insulation resistance detector detect the first insulation resistance and the second insulation resistance at different times, respectively.
摘要:
When a malfunction of an ungrounded drive electric system including first and second ungrounded power supplies, an inverter, and a motor which is energized by the first and second ungrounded power supplies through the inverter, i.e., an erroneous opening of switches of a battery, is detected, switches of an insulation resistance detector are opened to insolate the insulation resistance detector from the ungrounded drive electric system.
摘要:
An electric vehicle incorporates a ground fault detecting system for preventing a ground fault detector from detecting a ground fault in error. First and second ground fault detectors are associated respectively with first and second ungrounded power supplies which generate respective different voltages. Since the first and second ground fault detectors are activated in different periods, the ground fault detecting system prevents a ground fault from being detected in error.