TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORAGE MEDIUM, AND TEMPERATURE CONTROL APPARATUS OF HEAT PROCESSING PLATE
    1.
    发明申请
    TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORAGE MEDIUM, AND TEMPERATURE CONTROL APPARATUS OF HEAT PROCESSING PLATE 有权
    热处理板的温度控制方法,计算机存储介质和加热板的温度控制装置

    公开(公告)号:US20120279955A1

    公开(公告)日:2012-11-08

    申请号:US13551307

    申请日:2012-07-17

    IPC分类号: H05B1/02 H05B3/68

    CPC分类号: H05B1/0233 H01L21/67248

    摘要: In the present invention, temperature drop amounts of heating plate regions when the substrate is mounted on a heating plate are detected to detect a warped state of the substrate. From the temperature drop amounts of the heating plate regions, correction values for set temperatures of the heating plate regions are calculated. The calculation of the correction values for the set temperatures of the heating plate regions is performed by estimating steady temperatures within the substrate to be heat-processed on the heating plate from the temperature drop amounts of the heating plate regions using a correlation obtained in advance. From the estimated steady temperatures within the substrate and the temperature drop amounts of the heating regions, the correction values for the set temperatures of the heating plate regions are calculated. Based on the correction values for the set temperatures, the set temperatures of the heating plate regions are changed.

    摘要翻译: 在本发明中,检测将基板安装在加热板上时的加热板区域的温度下降量,以检测基板的翘曲状态。 根据加热板区域的温度下降量,计算加热板区域的设定温度的校正值。 通过使用预先获得的相关性,从加热板区域的温度下降量估计加热板上的待加热基板内的稳定温度来进行加热板区域的设定温度的校正值的计算。 从估计的基板内的稳定温度和加热区域的温度下降量,计算加热板区域的设定温度的校正值。 基于设定温度的校正值,改变加热板区域的设定温度。

    ELECTRIC VEHICLE WITH GROUND FAULT DETECTING SYSTEM
    2.
    发明申请
    ELECTRIC VEHICLE WITH GROUND FAULT DETECTING SYSTEM 有权
    电动车辆与地面故障检测系统

    公开(公告)号:US20100244850A1

    公开(公告)日:2010-09-30

    申请号:US12751247

    申请日:2010-03-31

    IPC分类号: G01R31/02

    摘要: An electric vehicle incorporates a ground fault detecting system and has first and second ungrounded power supplies. The ground fault detecting system includes a first insulation resistance detector for detecting a first insulation resistance of the first ungrounded power supply with respect to a grounded region of the electric vehicle, and a second insulation resistance detector for detecting a second insulation resistance of the second ungrounded power supply with respect to the grounded region. The first insulation resistance detector and the second insulation resistance detector detect the first insulation resistance and the second insulation resistance at different times, respectively.

    摘要翻译: 电动车辆包括接地故障检测系统,并具有第一和第二未接地电源。 接地故障检测系统包括第一绝缘电阻检测器,用于检测第一不接地电源相对于电动车辆的接地区域的第一绝缘电阻;以及第二绝缘电阻检测器,用于检测第二未接地电源的第二绝缘电阻 电源相对于接地区域。 第一绝缘电阻检测器和第二绝缘电阻检测器分别在不同时间检测第一绝缘电阻和第二绝缘电阻。

    ELECTRIC VEHICLE WITH GROUND FAULT DETECTING SYSTEM
    4.
    发明申请
    ELECTRIC VEHICLE WITH GROUND FAULT DETECTING SYSTEM 有权
    电动车辆与地面故障检测系统

    公开(公告)号:US20100244849A1

    公开(公告)日:2010-09-30

    申请号:US12750214

    申请日:2010-03-30

    IPC分类号: G01R31/12

    摘要: An electric vehicle incorporates a ground fault detecting system for preventing a ground fault detector from detecting a ground fault in error. First and second ground fault detectors are associated respectively with first and second ungrounded power supplies which generate respective different voltages. Since the first and second ground fault detectors are activated in different periods, the ground fault detecting system prevents a ground fault from being detected in error.

    摘要翻译: 电动车辆包括接地故障检测系统,用于防止接地故障检测器检测到接地故障。 第一和第二接地故障检测器分别与产生各自不同电压的第一和第二未接地电源相关联。 由于第一和第二接地故障检测器在不同的时间段内被激活,所以接地故障检测系统防止接地故障被错误地检测到。