公开(公告)号：US20070011875A1

公开(公告)日：2007-01-18

申请号：US10568341

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kani ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kani ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B21D53/76

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  G03F7/095 ,  Y10T29/49401

摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

摘要翻译： 微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括 作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤 材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

公开(公告)号：US08017307B2

公开(公告)日：2011-09-13

申请号：US10568341

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03F7/20

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  G03F7/095 ,  Y10T29/49401

摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

摘要翻译： 微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括 作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤 材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

公开(公告)号：US07629111B2

公开(公告)日：2009-12-08

申请号：US10576249

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B41J2/16

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2002/14475 ,  G03F7/038

摘要： A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

摘要翻译： 一种制造液体排出头的方法包括以下步骤：在其上布置能量产生元件的衬底上沉积用于形成流路的固体层，以产生用于排出液体的能量，在衬底上形成固体 层，用于涂覆固体层的涂层，在固体层上形成的涂层中，通过光刻工艺形成用于排出液体的排出口，并除去固体层，形成连通的流路 能量元件和排出口，由此用于涂层的材料含有可阳离子聚合的化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成与部分的边界的固体层的材料 其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。

公开(公告)号：US20060277755A1

公开(公告)日：2006-12-14

申请号：US10565658

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B21D53/76

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2002/14475 ,  Y10T29/49401

摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer are formed contains a copolymer of methacrylic acid and methacrylate ester.

摘要翻译： 根据本发明，液体排出头的制造方法包括以下步骤：在其上布置能量产生元件以产生用于排出液体的能量的基板上形成用于形成流路的固体层; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且除去固体层以形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂， 与形成涂层的排出口的部分形成边界的固体层包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

公开(公告)号：US08227043B2

公开(公告)日：2012-07-24

申请号：US10565658

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： B05D1/36 ,  B05D7/00

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2002/14475 ,  Y10T29/49401

摘要： A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

摘要翻译： 一种液体排出头的制造方法，其特征在于，包括以下步骤：在基板上形成固体层，所述基板上配置能量产生元件，以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。 用于涂层的材料包含阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，并且与形成涂层的排出口的部分形成边界的固体层的材料包含 甲基丙烯酸和甲基丙烯酸酯的共聚物。

公开(公告)号：US20070099121A1

公开(公告)日：2007-05-03

申请号：US10576249

申请日：2005-06-27

申请人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Takumi Suzuki ,  Tamaki Sato ,  Ryoji Kanri ,  Maki Hatta ,  Kazuhiro Asai ,  Shoji Shiba ,  Etsuko Hino ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03C5/00

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  B41J2002/14475 ,  G03F7/038

摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and a inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

摘要翻译： 根据本发明，一种液体排出头的制造方法包括以下步骤：在其上布置能量产生元件的基板上沉积形成流路的固体层，以产生用于排出液体的能量， 在固体层安装的基板上，涂布固体层的涂层，通过光刻工艺形成用于排出液体的排出口，在固体层上形成的涂层中去除固体层 形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子聚合化学化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成固体层的材料 与形成涂层的排出口的部分的边界包含甲基丙烯酸酐的共聚物 甲基丙烯酸酯和甲基丙烯酸酯。

公开(公告)号：US20080252689A1

公开(公告)日：2008-10-16

申请号：US11941431

申请日：2007-11-16

申请人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

发明人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

IPC分类号： B41J2/135 ,  G03F7/20

CPC分类号： B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  B41J2202/11 ,  G03F1/00 ,  G03F1/50 ,  G03F1/70

摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.

摘要翻译： 本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。 该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到 排出口，其中该层对于曝光用的光，每1μm厚度的吸光度为约0.02至约0.07。

公开(公告)号：US07971964B2

公开(公告)日：2011-07-05

申请号：US11941431

申请日：2007-11-16

申请人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

发明人： Shoji Shiba ,  Akihiko Okano ,  Yoshikazu Saito ,  Kazuhiro Asai ,  Tamaki Sato ,  Takumi Suzuki ,  Masahiko Kubota ,  Maki Kato ,  Hiroe Ishikura ,  Shinsuke Tsuji

IPC分类号： B41J2/14

CPC分类号： B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  B41J2202/11 ,  G03F1/00 ,  G03F1/50 ,  G03F1/70

摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.

摘要翻译： 本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。 该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到 排出口，其中该层对于曝光用的光具有每1μm厚度的约0.02至约0.07的吸光度。

公开(公告)号：US07592131B2

公开(公告)日：2009-09-22

申请号：US10615289

申请日：2003-07-09

申请人： Masahiko Kubota ,  Yoshinori Tagawa ,  Wataru Hiyama ,  Tatsuya Masukawa ,  Shoji Shiba ,  Yoshiaki Kurihara ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Yoshinori Tagawa ,  Wataru Hiyama ,  Tatsuya Masukawa ,  Shoji Shiba ,  Yoshiaki Kurihara ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03F7/40 ,  B41J2/05 ,  B41J2/16

CPC分类号： B41J2/1645 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639

摘要： The invention is to provide a method for producing a fine structured member and a fine hollow structure, useful for producing a liquid discharge head which is inexpensive, precise and highly reliable, also to provide a method for producing a liquid discharge head utilizing such producing method for the fine structured member and the fine hollow structure and a liquid discharge head obtained by such producing method. A positive-working photosensitive material, including a ternary polymer containing an acrylate ester as a principal component, acrylic acid for thermal crosslinking and a monomer unit for expanding a sensitivity region, is used as a material for forming the Line structured member.

摘要翻译： 本发明提供一种制造精细的结构构件和精细中空结构的方法，该方法可用于制造廉价，精确和高度可靠的液体排出头，还提供一种使用这种制造方法制造排液头的方法 用于精细结构构件和细小中空结构以及通过这种制造方法获得的液体排出头。 使用包含以丙烯酸酯为主要成分的三元聚合物的正性感光材料，用于热交联的丙烯酸和用于扩大感光度区域的单体单元作为用于形成线结构体的材料。

公开(公告)号：US06986980B2

公开(公告)日：2006-01-17

申请号：US10615302

申请日：2003-07-09

申请人： Masahiko Kubota ,  Wataru Hiyama ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

发明人： Masahiko Kubota ,  Wataru Hiyama ,  Shoji Shiba ,  Hiroe Ishikura ,  Akihiko Okano

IPC分类号： G03F7/30 ,  B41J2/135

CPC分类号： B41J2/1628 ,  B41J2/1404 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1637 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11 ,  Y10T29/49401

摘要： The present invention discloses a method of producing a liquid flow path shape capable of refilling ink at a high speed by optimizing a three-dimensional shape of the liquid flow path and suppressing the vibration of a meniscus and a head thereof. According to the invention, a pattern to form the liquid flow path to be formed on a substrate with a heater is formed by a positive photosensitive material in a two-layered structure of upper and lower layers, and the lower layer is used for forming the liquid flow path after being thermally crosslinked.

摘要翻译： 本发明公开了一种能够通过优化液体流路的三维形状并抑制弯液面及其头部的振动来高速重新填充油墨的液体流道形状的方法。 根据本发明，通过正面感光材料形成在具有加热器的基板上形成的液体流动路径的图案，由上下层的双层结构形成，下层用于形成 热交联后的液体流路。