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公开(公告)号：US5879448A
公开(公告)日：1999-03-09
申请号：US883046
申请日：1997-06-26
CPC分类号： C30B15/30 , C30B15/22 , Y10T117/1032 , Y10T117/1072
摘要： A method and an apparatus for pulling a single crystal are disclosed. A first neck portion, a convex portion, and a second neck portion are formed in this order under a seed crystal held by a seed chuck, and subsequent to the second neck portion, a single crystal having a diameter-expanding portion and a straight cylindrical portion is formed. Lifting holders are brought around and in proximity to the second neck portion when the second neck portion rises to a predetermined position during the pulling by the seed chuck. The single crystal and the lifting holders are moved relative to each other in the vertical direction to thereby bring the convex portion into contact with the lifting holders in a resting manner, so that part of a load borne by the seed chuck is shifted to the lifting holders. Subsequently, the pulling operation is performed by the lifting holders. Accordingly, a single crystal having a larger weight can be pulled safely while maintaining high quality.
摘要翻译： 公开了一种拉制单晶的方法和装置。 第一颈部，凸部和第二颈部依次由种子卡盘保持的晶种形成，在第二颈部之后，形成具有直径扩大部和直圆筒状的单晶 形成部分。 当通过种子卡盘拉动时，当第二颈部部分上升到预定位置时，提升架被带到第二颈部的附近并且靠近第二颈部部分。 单晶和提升架在垂直方向上彼此相对移动，从而使凸部以静止的方式与升降保持器接触，使得由种子卡盘承载的负载的一部分转移到提升 持有人 随后，拉升操作由提升保持器进行。 因此，可以在保持高质量的同时安全地拉出重量更大的单晶。
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公开(公告)号：US6113686A
公开(公告)日：2000-09-05
申请号：US945209
申请日：1998-02-03
申请人： Eiichi Iino , Yasushi Nakamura , Seiichiro Otsuka , Koji Midzuishi , Masanori Kimura , Hirotoshi Yamagishi
发明人： Eiichi Iino , Yasushi Nakamura , Seiichiro Otsuka , Koji Midzuishi , Masanori Kimura , Hirotoshi Yamagishi
CPC分类号： C30B15/30 , C30B15/22 , Y10S117/90 , Y10S117/911 , Y10T117/1032
摘要： A method and apparatus for growing and manufacturing a single crystal according to a so-called Czochralski (CZ) method. A seed crystal 12 is connected to a tip end of a wire 41a as a hanging member 41 to pull and form a single crystal part 15, arm-shaped members 44a of a lifting jig 44 are engaged in a recess 16 of a corrugated portion 14 formed on the single crystal part 15 during the pulling operation, the pulling speeds of both of the arm-shaped members 44a and wire 41a are synchronously controlled to provide smooth transfer between the arm-shaped members 44a and wire 41a, whereby the single crystal part 15 is pulled always at a constant pulling speed. In particular, a heavy-weight single crystal can be safely pulled and formed without any dislocation therein while minimizing an impact force applied to the crystal.
摘要翻译： PCT No.PCT / JP96 / 01089 Sec。 371日期1998年2月3日 102（e）1998年2月3日PCT 1996年4月22日PCT PCT。 公开号WO96 / 33301 日期：1996年10月24日根据所谓的Czochralski（CZ）方法生长和制造单晶的方法和装置。 将晶种12连接到线41a的顶端作为悬挂构件41拉动并形成单晶部分15，提升夹具44的臂状构件44a接合在波纹状部分14的凹部16中 在牵引操作期间在单晶部分15上形成的两个臂状部件44a和线41a的牵引速度被同步地控制，以在臂状部件44a和线41a之间平滑地传递，由此单晶部分 15总是以恒定的拉速拉。 特别地，可以安全地拉和形成重量级的单晶而没有任何位错，同时最小化施加到晶体的冲击力。
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公开(公告)号：US5910216A
公开(公告)日：1999-06-08
申请号：US916155
申请日：1997-09-02
申请人： Yasushi Nakamura , Seiichiro Otsuka
发明人： Yasushi Nakamura , Seiichiro Otsuka
IPC分类号： C30B15/30 , C30B15/32 , C30B29/06 , H01L21/208 , C30B35/00
CPC分类号： C30B15/32 , C30B15/30 , Y10S117/90 , Y10S117/911 , Y10T117/1072
摘要： In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a crystal is held by a lifting jig during a single-crystal growing process wherein the seed crystal is brought into contact with a material melt and is subsequently pulled while being rotated. The tip end portion of the lifting jig includes a swinging portion having a short stroke which swings to hold or release the corrugated portion. A lock mechanism is also provided in order to swing the swinging portion for opening/closing operation and to lock the swinging portion. Accordingly, it is possible to reliably hold the corrugated portion of a crystal while the crystal is pulled in accordance with the CZ method, for example.
摘要翻译： 在晶体保持装置中，在单晶生长过程中，晶种与晶体的直圆柱形部分之间的波纹状部分由提升夹具保持，其中晶种与材料熔体接触并随后被拉 同时旋转。 提升夹具的前端部包括具有短行程的摆动部分，其摆动以保持或释放波纹部分。 还提供了一种锁定机构，以便摆动用于打开/关闭操作的摆动部分并锁定摆动部分。 因此，例如可以按照CZ方法拉伸晶体时可靠地保持晶体的波纹状部分。
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公开(公告)号：US4916955A
公开(公告)日：1990-04-17
申请号：US230777
申请日：1988-08-10
CPC分类号： C30B15/28 , C30B15/30 , Y10T117/1004 , Y10T117/1072
摘要： A load measuring device for measuring the pulling up load of a monocystalline rod (38) grown by the Czochralski method utilizes a strain gauge (20). The monocrystalline rod (38) is pulled up by wire rope (36) consisting of multiple strands. The pulley (34) guiding the wire rope between a drum (36) and a crystal holder (44) has a guide groove which has a cross-sectional shape which is substantially identical to a semicircle circumscribing the wire rope.
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