公开(公告)号：US07990165B2

公开(公告)日：2011-08-02

申请号：US12297732

申请日：2007-04-19

申请人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shoichi Imai ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shoichi Imai ,  Shigeo Kiyota

IPC分类号： G01R31/02

CPC分类号： G01R3/00 ,  G01R1/06772 ,  G01R1/07342 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T156/10

摘要： To provide a contact probe which can easily be connected with a measurement apparatus electrically, can measure a high speed and high frequency signal with a fine pitch easily and correctly, and can easily cope with signal measurement for a plurality of channels, and a method of making the contact probe.It includes a first printed wiring board 3 having a signal electrode 10a and a ground electrode 10b used as a contact part with respect to a measuring object, in which the signal electrode 10a and ground electrode 10b are formed of a metal wiring pattern on a substrate, and a second printed wiring board 2 with a coaxial line structure having shield electrodes 12, 17, 18 which enclose a signal line 15a and the surroundings of the signal line 15a through an insulating layer. The signal electrode 10a of the first printed wiring board 3 and the signal line 15a of the second printed wiring board 2 are electrically connected together, and the ground electrode 10b of the first printed wiring board 3 and the shield electrodes 12, 17, 18 of the second printed wiring board 2 are electrically connected together.

摘要翻译： 为了提供可以容易地与测量装置电连接的接触探针，可以容易且正确地测量具有细间距的高速和高频信号，并且可以容易地处理多个通道的信号测量，以及一种方法 使接触探针。 它包括具有信号电极10a和接地电极10b的第一印刷线路板3，该接地电极用作相对于测量对象的接触部分，其中信号电极10a和接地电极10b由基板上的金属布线图形成 以及具有同轴线结构的第二印刷布线板2，其具有通过绝缘层包围信号线15a和信号线15a的周围的屏蔽电极12,17,18。 第一印刷线路板3的信号电极10a和第二印刷线路板2的信号线15a电连接在一起，第一印刷线路板3的接地电极10b和屏蔽电极12,17,18的 第二印刷线路板2电连接在一起。

公开(公告)号：US20110247209A1

公开(公告)日：2011-10-13

申请号：US13168136

申请日：2011-06-24

申请人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

IPC分类号： H05K3/36

CPC分类号： G01R3/00 ,  G01R1/06772 ,  G01R1/07342 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T156/10

摘要： [Problem] To provide a contact probe which can easily be connected with a measurement apparatus electrically, can measure a high speed and high frequency signal with a fine pitch easily and correctly, and can easily cope with signal measurement for a plurality of channels, and a method of making the contact probe.[Means to Solve Problem] It includes a first printed wiring board 3 having a signal electrode 10a and a ground electrode 10b used as a contact part with respect to a measuring object, in which the signal electrode 10a and ground electrode 10b are formed of a metal wiring pattern on a substrate, and a second printed wiring board 2 with a coaxial line structure having shield electrodes 12, 17, 18 which enclose a signal line 15a and the surroundings of the signal line 15a through an insulating layer. The signal electrode 10a of the first printed wiring board 3 and the signal line 15a of the second printed wiring board 2 are electrically connected together, and the ground electrode 10b of the first printed wiring board 3 and the shield electrodes 12, 17, 18 of the second printed wiring board 2 are electrically connected together.

摘要翻译： [问题]为了提供可以容易地与测量装置电连接的接触探针，可以容易且准确地测量具有细间距的高速和高频信号，并且可以容易地处理多个通道的信号测量，以及 制作接触探针的方法。 解决问题的手段包括：第一印刷线路板3，其具有信号电极10a和接地电极10b，该接地电极用作相对于测量对象的接触部分，其中信号电极10a和接地电极10b由 金属布线图案和具有同轴线结构的第二印刷布线板2，其具有通过绝缘层包围信号线15a和信号线15a的周围的屏蔽电极12,17,18。 第一印刷线路板3的信号电极10a和第二印刷线路板2的信号线15a电连接在一起，第一印刷线路板3的接地电极10b和屏蔽电极12,17,18的 第二印刷线路板2电连接在一起。

公开(公告)号：US09134346B2

公开(公告)日：2015-09-15

申请号：US13168136

申请日：2011-06-24

申请人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

IPC分类号： H01R43/00 ,  G01R3/00 ,  G01R1/067 ,  G01R1/073

CPC分类号： G01R3/00 ,  G01R1/06772 ,  G01R1/07342 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T156/10

摘要： A method of making a contact probe including a step of making a first printed wiring board having a signal electrode and a ground electrode used as a contact part of the contact probe with respect to a measuring object, in which the signal electrode and ground electrode are formed of a metal wiring pattern, and making a second printed wiring board with a coaxial line structure having a shield electrode which encloses a signal line and the surroundings of the signal line through an insulating layer. The signal electrode of the first printed wiring board and the signal line of the second printed wiring board are electrically connected together, and the ground electrode of the first printed wiring board and the shield electrode of the second printed wiring board are electrically connected together.

摘要翻译： 一种制造接触探针的方法，包括以下步骤：制作具有信号电极和接地电极的第一印刷线路板，所述信号电极和接地电极相对于测量对象用作接触探针的接触部分，其中信号电极和接地电极为 由金属布线图案形成，并且制造具有同轴线结构的第二印刷布线板，其具有通过绝缘层包围信号线和信号线周围的屏蔽电极。 第一印刷电路板的信号电极和第二印刷电路板的信号线电连接在一起，并且第一印刷线路板的接地电极和第二印刷线路板的屏蔽电极电连接在一起。

公开(公告)号：US20090224781A1

公开(公告)日：2009-09-10

申请号：US12297732

申请日：2007-04-19

申请人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Katsuya Kikuchi ,  Hiroshi Nakagawa ,  Yoshikuni Okada ,  Hiroyuki Fujita ,  Shouichi Imai ,  Shigeo Kiyota

IPC分类号： G01R31/02 ,  B32B37/00 ,  H01R43/00

CPC分类号： G01R3/00 ,  G01R1/06772 ,  G01R1/07342 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T156/10

摘要： [Problem]To provide a contact probe which can easily be connected with a measurement apparatus electrically, can measure a high speed and high frequency signal with a fine pitch easily and correctly, and can easily cope with signal measurement for a plurality of channels, and a method of making the contact probe. [Means to Solve Problem] It includes a first printed wiring board 3 having a signal electrode 10a and a ground electrode 10b used as a contact part with respect to a measuring object, in which the signal electrode 10a and ground electrode 10b are formed of a metal wiring pattern on a substrate, and a second printed wiring board 2 with a coaxial line structure having shield electrodes 12, 17, 18 which enclose a signal line 15a and the surroundings of the signal line 15a through an insulating layer. The signal electrode 10a of the first printed wiring board 3 and the signal line 15a of the second printed wiring board 2 are electrically connected together, and the ground electrode 10b of the first printed wiring board 3 and the shield electrodes 12, 17, 18 of the second printed wiring board 2 are electrically connected together.

摘要翻译： [问题]为了提供可以容易地与测量装置电连接的接触探针，可以容易且准确地测量具有细间距的高速和高频信号，并且可以容易地处理多个通道的信号测量，以及 制作接触探针的方法。 解决问题的手段包括：第一印刷线路板3，其具有信号电极10a和接地电极10b，该接地电极用作相对于测量对象的接触部分，其中信号电极10a和接地电极10b由 金属布线图案和具有同轴线结构的第二印刷布线板2，其具有通过绝缘层包围信号线15a和信号线15a的周围的屏蔽电极12,17,18。 第一印刷线路板3的信号电极10a和第二印刷线路板2的信号线15a电连接在一起，第一印刷线路板3的接地电极10b和屏蔽电极12,17,18的 第二印刷线路板2电连接在一起。

公开(公告)号：US20070065956A1

公开(公告)日：2007-03-22

申请号：US11602240

申请日：2006-11-21

申请人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

IPC分类号： H01L21/66

CPC分类号： G01R1/06772 ,  H05K1/0219 ,  H05K1/117 ,  Y10T29/49117

摘要： There is provided a contact probe that is smaller than 50 μm in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10a and a ground electrode 11a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1b electrically connected to the signal electrode 10a and an outer covering conductor la electrically connected to the ground electrode 11a, wherein the tip member is formed on a printed wiring board 2, and wherein the signal electrode 10a and the ground electrode 11a are constructed of fine coplanar strip lines formed on an insulating board 2a.

公开(公告)号：US20050264313A1

公开(公告)日：2005-12-01

申请号：US11136572

申请日：2005-05-25

申请人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

IPC分类号： G01R1/067 ,  G01R31/02 ,  H05K1/02 ,  H05K1/11

CPC分类号： G01R1/06772 ,  H05K1/0219 ,  H05K1/117 ,  Y10T29/49117

摘要： There is provided a contact probe that is smaller than 50 μm in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10a and a ground electrode 11a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1b electrically connected to the signal electrode 10a and an outer covering conductor 1a electrically connected to the ground electrode 1a, wherein the tip member is formed on a printed wiring board 2, and wherein the signal electrode 10a and the ground electrode 11a are constructed of fine coplanar strip lines formed on an insulating board 2a.

摘要翻译： 提供了在信号电极和接地电极之间以间距小于50um的接触探针，并且可以正确地进行高速高频测量，用于接触探针的测量垫以及制造方法 接触探头。 接触探针包括：具有与被测量物体接触的信号电极10a和接地电极11a的尖端部件; 以及具有电连接到信号电极10a的芯1b和电连接到接地电极1a的外部覆盖导体1A的同轴电缆1，其中尖端构件形成在印刷线路板2上，并且其中， 信号电极10a和接地电极11a由形成在绝缘板2a上的精细共面带状线构成。

公开(公告)号：US07208966B2

公开(公告)日：2007-04-24

申请号：US11136572

申请日：2005-05-25

申请人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

IPC分类号： G01R31/02

CPC分类号： G01R1/06772 ,  H05K1/0219 ,  H05K1/117 ,  Y10T29/49117

摘要： There is provided a contact probe that is smaller than 50 μm in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10a and a ground electrode 11a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1b electrically connected to the signal electrode 10a and an outer covering conductor 1a electrically connected to the ground electrode 1a, wherein the tip member is formed on a printed wiring board 2, and wherein the signal electrode 10a and the ground electrode 11a are constructed of fine coplanar strip lines formed on an insulating board 2a.

摘要翻译： 提供了在信号电极和接地电极之间以间距小于50um的接触探针，并且可以正确地进行高速高频测量，用于接触探针的测量垫以及制造方法 接触探头。 接触探针包括：具有与被测量物体接触的信号电极10a和接地电极11a的尖端部件; 以及具有电连接到信号电极10a的芯1b和电连接到接地电极1a的外部覆盖导体1A的同轴电缆1，其中尖端构件形成在印刷线路板2上，并且其中， 信号电极10a和接地电极11a由形成在绝缘板2a上的精细共面带状线构成。

公开(公告)号：US07227352B2

公开(公告)日：2007-06-05

申请号：US11602240

申请日：2006-11-21

申请人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

发明人： Masahiro Aoyagi ,  Hiroshi Nakagawa ,  Kazuhiko Tokoro ,  Katsuya Kikuchi ,  Yoshikuni Okada ,  Shigeo Kiyota

IPC分类号： G01R31/02 ,  H01R43/00

CPC分类号： G01R1/06772 ,  H05K1/0219 ,  H05K1/117 ,  Y10T29/49117

摘要： There is provided a contact probe that is smaller than 50 μm in a pitch between a signal electrode and a ground electrode and can correctly conduct a high-speed high-frequency measurement, a measuring pad used for the contact probe, and a method of manufacturing the contact probe. The contact probe includes: a tip member having a signal electrode 10a and a ground electrode 11a that are put into contact with an object to be measured; and a coaxial cable 1 having a core 1b electrically connected to the signal electrode 10a and an outer covering conductor la electrically connected to the ground electrode 11a, wherein the tip member is formed on a printed wiring board 2, and wherein the signal electrode 10a and the ground electrode 11a are constructed of fine coplanar strip lines formed on an insulating board 2a.

摘要翻译： 提供了在信号电极和接地电极之间以间距小于50um的接触探针，并且可以正确地进行高速高频测量，用于接触探针的测量垫以及制造方法 接触探头。 接触探针包括：具有与被测量物体接触的信号电极10a和接地电极11a的尖端部件; 以及具有电连接到信号电极10a的芯1b和电连接到接地电极11a的外覆盖导体1a的同轴电缆1，其中尖端构件形成在印刷线路板2上，并且其中信号 电极10a和接地电极11a由形成在绝缘板2a上的细共面带状线构成。

公开(公告)号：US6034534A

公开(公告)日：2000-03-07

申请号：US941738

申请日：1997-10-01

申请人： Shigeo Kiyota

发明人： Shigeo Kiyota

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R1/06

CPC分类号： G01R1/07342 ,  G01R1/06733 ,  G01R1/06772

摘要： There is provided a laminated contact probe for use in a high frequency region for inspection of an ultra-microscopic pitch of a plurality of contact probe plates. The contact probe plate is sandwiched with the ground plates with insulating material between the contact probe plate(s) and the ground plates. Each of the contact probes and the ground plates is formed with an ultra-thin plate. The contact probe has an elongated segment portion extending from the needle portion, the elongated segment portion being provided by forming a cut on the ultra-thin plate backward the needle portion, so that the needle portion is movable on an elastic basis in a direction perpendicularly intersecting to a direction of the cut.

摘要翻译： 提供了用于高频区域的层叠接触探针，用于检查多个接触探针板的超微距间距。 接触探针板在接触探针板和接地板之间用绝缘材料夹在接地板之间。 每个接触探针和接地板都由超薄板形成。 接触探针具有从针部延伸的细长段部分，细长段部分通过在针部分后方在超薄板上形成切口而提供，使得针部分可以在垂直方向上以弹性方式移动 与切割方向相交。