公开(公告)号：US08410663B2

公开(公告)日：2013-04-02

申请号：US12446175

申请日：2006-10-20

申请人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

发明人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

IPC分类号： H01L41/083

CPC分类号： H01L41/0838 ,  H01L41/273 ,  Y10T29/42

摘要： A piezoelectric actuator unit which undergoes less change in the amount of displacement and shows high durability in continuous operation under a high voltage and a high pressure over a long period of time is provided.The piezoelectric actuator unit including a multi-layer piezoelectric element having piezoelectric layers and metal layers with the piezoelectric layers and the metal layers being stacked one on another, and a case which houses the multi-layer piezoelectric element, wherein at least one of the plurality of metal layers is stress relieving layer which consists of a plurality of partial metal layers that are scattered throughout the entire region between two piezoelectric layers which adjoin the partial metal layers in the direction of stacking, and voids, and a peel-off section is formed at least in a part of the interface between the stress relieving layer and the piezoelectric layer that adjoins therewith.

摘要翻译： 提供了一种压电致动器单元，其在较高的电压和高压下长时间地进行位移量变化较小并且连续运行时的耐久性较高。 压电致动器单元包括具有压电层的层压型压电元件和压电层和金属层彼此堆叠的金属层，以及容纳多层压电元件的壳体，其中，多个 金属层的应力消除层由多个部分金属层构成，该多个部分金属层在层叠方向上与部分金属层相邻的两个压电层之间的整个区域分散，形成空隙，形成剥离部 至少在应力消除层和与其相邻的压电层之间的界面的一部分中。

公开(公告)号：US08212451B2

公开(公告)日：2012-07-03

申请号：US12447640

申请日：2006-10-31

申请人： Masahiro Inagaki ,  Takami Sakamoto ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

发明人： Masahiro Inagaki ,  Takami Sakamoto ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

IPC分类号： H01L41/083

CPC分类号： H01L41/0838

摘要： A multi-layer piezoelectric element includes a stack having metal layers and piezoelectric layers stacked one on another, and a pair of external electrodes formed on the side faces of the stack. At least one of the metal layers is a stress relieving layer having partial metal layers scattered between the two piezoelectric layers and voids. Junction sections are formed between the two piezoelectric layers to join and are disposed on both sides of an imaginary straight line drawn to connect the center of width of one of the external electrodes and the center of width of the other of the external electrodes in a plane including the stress relieving perpendicular to the stacking direction.

摘要翻译： 层叠型压电元件包括​​具有层叠的金属层和压电体的叠层以及形成在叠层的侧面的一对外部电极。 至少一个金属层是在两个压电层和空隙之间分散有部分金属层的应力消除层。 接合部分形成在两个压电层之间以连接并布置在假想直线的两侧，其被绘制以连接外部电极之一的宽度的中心和另一个外部电极的宽度的中心在平面中 包括垂直于堆叠方向的应力消除。

公开(公告)号：US20100060110A1

公开(公告)日：2010-03-11

申请号：US12447640

申请日：2006-10-31

申请人： Masahiro Inagaki ,  Takami Sakamoto ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

发明人： Masahiro Inagaki ,  Takami Sakamoto ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

IPC分类号： H01L41/047

CPC分类号： H01L41/0838

摘要： A multi-layer piezoelectric element which undergo less change in the amount of displacement and shows high durability during continuous operation under a high voltage and pressure over a long period are provided.The multi-layer piezoelectric element comprises a stack having metal layers and piezoelectric layers stacked one on another, and a pair of external electrodes formed on the side faces of the stack, wherein at least one of the metal layers is stress relieving layer having partial metal layers scattered between the two piezoelectric layers and voids, wherein junction sections are formed between the two piezoelectric layers to join and are disposed on both sides of an imaginary straight line drawn to connect the center of width of one of the external electrodes and the center of width of the other of the external electrodes in a plane including the stress relieving perpendicular to the stacking direction.

摘要翻译： 提供了一种在长时间的高压和高压连续运行期间经历较少位移变化并显示高耐久性的层叠型压电元件。 所述层叠型压电元件具有层叠的金属层和压电体层叠体以及形成在所述层叠体的侧面的一对外部电极，所述金属层中的至少一层为具有部分金属的应力消除层 分散在两个压电层和空隙之间的层，其中在两个压电层之间形成接合部分以连接并设置在连接外部电极之一的宽度的中心的假想直线的两侧和 包括垂直于层叠方向的应力消除的平面中的另一个外部电极的宽度。

公开(公告)号：US08196843B2

公开(公告)日：2012-06-12

申请号：US12532606

申请日：2007-03-27

申请人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

发明人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

IPC分类号： B05B17/04

CPC分类号： H01L41/273 ,  F02M51/0603 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/0838 ,  Y10T29/42

摘要： A multi-layer piezoelectric element having higher durability which experience less decrease in the amount of displacement even when operated continuously over a long period of time under a high pressure and a high voltage is provided. The multi-layer piezoelectric element comprises a plurality of piezoelectric layers and a plurality of internal electrode layers, wherein the piezoelectric layers and the internal electrode layers are stacked alternately one on another, and at least one of the plurality of internal electrode layers contains at least one nitride, titanium nitride or zirconium nitride.

摘要翻译： 具有更高耐久性的层叠型压电元件即使在高压和高电压下连续长时间运行，也具有更小的位移减少量。 层叠型压电元件包括​​多个压电层和多个内部电极层，其中，压电层和内部电极层交替地层叠，多个内部电极层中的至少一个至少含有 一种氮化物，氮化钛或氮化锆。

公开(公告)号：US20100327704A1

公开(公告)日：2010-12-30

申请号：US12446175

申请日：2006-10-20

申请人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

发明人： Takami Sakamoto ,  Masahiro Inagaki ,  Harald-Johannes Kastl ,  Carsten Schuh ,  Bernhard Doellgast ,  Atsushi Ochi

IPC分类号： H01L41/083 ,  H01L41/24

CPC分类号： H01L41/0838 ,  H01L41/273 ,  Y10T29/42

摘要： A piezoelectric actuator unit which undergoes less change in the amount of displacement and shows high durability in continuous operation under a high voltage and a high pressure over a long period of time is provided.The piezoelectric actuator unit including a multi-layer piezoelectric element having piezoelectric layers and metal layers with the piezoelectric layers and the metal layers being stacked one on another, and a case which houses the multi-layer piezoelectric element, wherein at least one of the plurality of metal layers is stress relieving layer which consists of a plurality of partial metal layers that are scattered throughout the entire region between two piezoelectric layers which adjoin the partial metal layers in the direction of stacking, and voids, and a peel-off section is formed at least in a part of the interface between the stress relieving layer and the piezoelectric layer that adjoins therewith.

摘要翻译： 提供了一种压电致动器单元，其在较高的电压和高压下长时间地进行位移量变化较小并且连续运行时的耐久性较高。 压电致动器单元包括具有压电层的层压型压电元件和压电层和金属层彼此堆叠的金属层，以及容纳多层压电元件的壳体，其中，多个 金属层的应力消除层由多个部分金属层构成，该多个部分金属层在层叠方向上与部分金属层相邻的两个压电层之间的整个区域分散，形成空隙，形成剥离部 至少在应力消除层和与其相邻的压电层之间的界面的一部分中。

公开(公告)号：US07851974B2

公开(公告)日：2010-12-14

申请号：US12032465

申请日：2008-02-15

申请人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

发明人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

IPC分类号： H01L41/04 ,  H01L41/08

CPC分类号： H01L41/0838 ,  H01L41/273 ,  Y10T29/42

摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.

摘要翻译： 压电陶瓷多层致动器（10）具有多个压电陶瓷层（12），安全层（20）和多个内部电极（16,18）。 压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。 安全层（20）具有第二材料并且设置在两个压电陶瓷层（12）之间。 多个内部电极（16,18）中的每一个具有第三材料并且沉积在两个压电陶瓷层（12）之间。 第二材料的烧结程度低于第三材料的烧结程度。

公开(公告)号：US08704430B2

公开(公告)日：2014-04-22

申请号：US12376346

申请日：2007-08-06

申请人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

发明人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

IPC分类号： H01L41/083

CPC分类号： H01L41/273 ,  H01L41/0838

摘要： A piezoceramic multilayer actuator has a first sub-stack (12, 14, 16) with a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, a second sub-stack (12, 14, 16) has a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, and a connection layer (40) arranged between the first sub-stack (12, 14, 16) and the second sub-stack (12, 14, 16), wherein the connection layer (40) is set up by a multitude of single connection points or connection lines (44) or other connection regions.

摘要翻译： 压电陶瓷多层致动器具有具有多个压电陶瓷层（22）和至少一个内部电极（24,26）的第一子堆叠（12,14,16），所述压电陶瓷层（22）和所述至少一个内部 电极（24,26）以交替的方式层压，第二子堆叠（12,14,16）具有多个压电陶瓷层（22）和至少一个内部电极（24,26），所述压电陶瓷层 22）和所述至少一个内部电极（24,26）以交替的方式层叠，以及布置在所述第一子堆叠（12,14）和所述第二子堆叠（12）之间的连接层（40） ，14,16），其中所述连接层（40）由多个单个连接点或连接线（44）或其它连接区域设置。

公开(公告)号：US07948150B2

公开(公告)日：2011-05-24

申请号：US12031385

申请日：2008-02-14

申请人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

发明人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

IPC分类号： H01L41/053

CPC分类号： H01L41/273 ,  H01L41/0838 ,  H01L41/1876

摘要： A piezoceramic multilayer actuator (10) includes a plurality of green layers, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).

摘要翻译： 压电陶瓷多层致动器（10）包括多个绿色层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。 提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。 将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。 将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接 ）。

公开(公告)号：US20080218028A1

公开(公告)日：2008-09-11

申请号：US12031385

申请日：2008-02-14

申请人： Bernhard Dollgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

发明人： Bernhard Dollgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

IPC分类号： H01L41/083 ,  H01L41/187 ,  H01L41/24

CPC分类号： H01L41/273 ,  H01L41/0838 ,  H01L41/1876

摘要： In a method of manufacturing a piezoceramic multilayer actuator (10), a plurality of green layers is provided, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).

摘要翻译： 在制造压电陶瓷多层致动器（10）的方法中，提供多个生坯层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。 提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。 将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。 将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接 ）。

公开(公告)号：US20100194247A1

公开(公告)日：2010-08-05

申请号：US12376346

申请日：2007-08-06

申请人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

发明人： Bernhard Döllgast ,  Masahiro Inagaki ,  Harald Johannes Kastl ,  Atsushi Ochi ,  Takami Sakamoto ,  Carsten Schuh

IPC分类号： H01L41/083

CPC分类号： H01L41/273 ,  H01L41/0838

摘要： A piezoceramic multilayer actuator has a first sub-stack (12, 14, 16) with a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, a second sub-stack (12, 14, 16) has a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, and a connection layer (40) arranged between the first sub-stack (12, 14, 16) and the second sub-stack (12, 14, 16), wherein the connection layer (40) is set up by a multitude of single connection points or connection lines (44) or other connection regions.

摘要翻译： 压电陶瓷多层致动器具有具有多个压电陶瓷层（22）和至少一个内部电极（24,26）的第一子堆叠（12,14,16），所述压电陶瓷层（22）和所述至少一个内部 电极（24,26）以交替的方式层压，第二子堆叠（12,14,16）具有多个压电陶瓷层（22）和至少一个内部电极（24,26），所述压电陶瓷层 22）和所述至少一个内部电极（24,26）以交替的方式层叠，以及布置在所述第一子堆叠（12,14）和所述第二子堆叠（12）之间的连接层（40） ，14,16），其中所述连接层（40）由多个单个连接点或连接线（44）或其它连接区域设置。