公开(公告)号：US08268660B2

公开(公告)日：2012-09-18

申请号：US10551271

申请日：2004-04-02

申请人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

发明人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

IPC分类号： H01L21/00

CPC分类号： H03H3/0072 ,  B81B7/0012

摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).

摘要翻译： 提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。 在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

公开(公告)号：US20060216847A1

公开(公告)日：2006-09-28

申请号：US10551271

申请日：2004-04-02

申请人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

发明人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

IPC分类号： H01L21/00

CPC分类号： H03H3/0072 ,  B81B7/0012

摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).

摘要翻译： 提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。 在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

公开(公告)号：US20050183950A1

公开(公告)日：2005-08-25

申请号：US11063816

申请日：2005-02-23

申请人： Masanari Yamaguchi

发明人： Masanari Yamaguchi

IPC分类号： B41J2/16 ,  B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B81B3/00 ,  B81C1/00 ,  C25B9/00

CPC分类号： B41J2/14314

摘要： A fluid actuating apparatus is proposed, which includes: a diaphragm for providing a pressure change in fluid; a diaphragm-side electrode, formed for the diaphragm, for actuating the diaphragm; a substrate-side electrode formed so that it faces the diaphragm-side electrode; a space formed between the diaphragm-side electrode and the substrate-side electrode; and a support post, formed on the substrate-side electrode, for supporting the diaphragm-side electrode through the space. where the diaphragm-side electrode is formed so that it passes through the support post and extends to and covers part of the bottom of the support post.

摘要翻译： 提出了一种流体致动装置，其包括：用于在流体中提供压力变化的隔膜; 为膜片而形成的用于致动膜片的隔膜侧电极; 形成为使其面向隔膜侧电极的基板侧电极; 在隔膜侧电极和基板侧电极之间形成的空间; 以及支撑柱，形成在基板侧电极上，用于通过该空间支撑隔膜侧电极。 其中隔膜侧电极形成为使得其穿过支撑柱并延伸到并覆盖支撑柱的底部的一部分。

公开(公告)号：US20110013245A1

公开(公告)日：2011-01-20

申请号：US12801995

申请日：2010-07-07

申请人： Hiroshi Tanaka ,  Kazuya Hayashibe ,  Masanari Yamaguchi ,  Kunihiko Saruta ,  Keita Ishikawa ,  Teppei Imamura

发明人： Hiroshi Tanaka ,  Kazuya Hayashibe ,  Masanari Yamaguchi ,  Kunihiko Saruta ,  Keita Ishikawa ,  Teppei Imamura

IPC分类号： G02B26/10

CPC分类号： G02B26/105 ,  G02B27/0172 ,  G02B2027/015

摘要： Disclosed herein is an image display device including a light source and a scanner. The scanner includes (a) a first mirror on which a light beam emitted from the light source is incident, (b) a first light deflector on which the light beam output from the first mirror is incident and that outputs collimated light forming a first output angle depending on a first incident angle of the light beam in association with the pivoting of the first mirror, (c) a second mirror on which the collimated light output from the first light deflector is incident, and (d) a second light deflector on which the collimated light output from the second mirror is incident and that outputs collimated light forming a second output angle depending on a second incident angle of the collimated light in association with the pivoting of the second mirror.

摘要翻译： 本文公开了包括光源和扫描仪的图像显示装置。 扫描器包括：（a）从光源发射的光束入射的第一反射镜，（b）从第一反射镜输出的光束入射到其上的第一光偏转器，并且输出形成第一输出的准直光 与第一反射镜的枢转相关联的光束的第一入射角的角度，（c）从第一光偏转器输出的准直光入射到其上的第二反射镜，以及（d）第二光偏转器， 其中从第二反射镜输出的准直光入射，并且根据与第二反射镜的枢转相关联的准直光的第二入射角，输出形成第二输出角的准直光。

公开(公告)号：US08390933B2

公开(公告)日：2013-03-05

申请号：US12801995

申请日：2010-07-07

申请人： Hiroshi Tanaka ,  Kazuya Hayashibe ,  Masanari Yamaguchi ,  Kunihiko Saruta ,  Keita Ishikawa ,  Teppei Imamura

发明人： Hiroshi Tanaka ,  Kazuya Hayashibe ,  Masanari Yamaguchi ,  Kunihiko Saruta ,  Keita Ishikawa ,  Teppei Imamura

IPC分类号： G02B3/00

CPC分类号： G02B26/105 ,  G02B27/0172 ,  G02B2027/015

摘要： Disclosed herein is an image display device including a light source and a scanner. The scanner includes (a) a first mirror on which a light beam emitted from the light source is incident, (b) a first light deflector on which the light beam output from the first mirror is incident and that outputs collimated light forming a first output angle depending on a first incident angle of the light beam in association with the pivoting of the first mirror, (c) a second mirror on which the collimated light output from the first light deflector is incident, and (d) a second light deflector on which the collimated light output from the second mirror is incident and that outputs collimated light forming a second output angle depending on a second incident angle of the collimated light in association with the pivoting of the second mirror.

摘要翻译： 本文公开了包括光源和扫描仪的图像显示装置。 扫描器包括：（a）从光源发射的光束入射的第一反射镜，（b）从第一反射镜输出的光束入射到其上的第一光偏转器，并且输出形成第一输出的准直光 与第一反射镜的枢转相关联的光束的第一入射角的角度，（c）从第一光偏转器输出的准直光入射到其上的第二反射镜，以及（d）第二光偏转器， 其中从第二反射镜输出的准直光入射，并且根据与第二反射镜的枢转相关联的准直光的第二入射角，输出形成第二输出角的准直光。