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    Process for fabricating micromachine
    1.
    发明授权
    Process for fabricating micromachine 有权
    微机械制造工艺

    公开(公告)号：US08268660B2

    公开(公告)日：2012-09-18

    申请号：US10551271

    申请日：2004-04-02

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    IPC分类号： H01L21/00

    CPC分类号： H03H3/0072 ,  B81B7/0012

    摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).

    摘要翻译： 提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。 在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

    Process for fabricating micromachine
    2.
    发明申请
    Process for fabricating micromachine 有权
    微机械制造工艺

    公开(公告)号：US20060216847A1

    公开(公告)日：2006-09-28

    申请号：US10551271

    申请日：2004-04-02

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    IPC分类号： H01L21/00

    CPC分类号： H03H3/0072 ,  B81B7/0012

    摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).

    摘要翻译： 提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。 在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

    Micromachine and method of producing the same
    5.
    发明申请
    Micromachine and method of producing the same 失效
    微机械及其制造方法

    公开(公告)号：US20060049895A1

    公开(公告)日：2006-03-09

    申请号：US10537132

    申请日：2003-11-25

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    IPC分类号： H03H9/00

    CPC分类号： H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

    摘要： Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

    摘要翻译： 公开了作为高频滤波器的微机械，其包括高Q值并且适用于较高频带。 微机械（1）包括形成在基板（5）上的输出电极（7），覆盖基板（5）的层间绝缘膜（9），其中底部是输出电极（7） ）和形成在层间绝缘膜（9）上的带状谐振器电极（11），以横越开口（9a）中的空间（A）上方，谐振器电极（11）朝向开口凹入 9a）沿着开口（9a）的侧壁。

    Micromachine and method of producing the same
    6.
    发明授权
    Micromachine and method of producing the same 失效
    微机械及其制造方法

    公开(公告)号：US07212081B2

    公开(公告)日：2007-05-01

    申请号：US10537132

    申请日：2003-11-25

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    IPC分类号： H03H9/24 ,  B81B3/00 ,  B81C1/00

    CPC分类号： H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

    摘要： Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

    摘要翻译： 公开了作为高频滤波器的微机械，其包括高Q值并且适用于较高频带。 微机械（1）包括形成在基板（5）上的输出电极（7），覆盖基板（5）的层间绝缘膜（9），其中底部是输出电极（7） ）和形成在层间绝缘膜（9）上的带状谐振器电极（11），以横越开口（9a）中的空间（A）上方，谐振器电极（11）朝向开口凹入 9a）沿着开口（9a）的侧壁。

    Micro-resonator, band-pass filter, semiconductor device and communication apparataus
    7.
    发明申请
    Micro-resonator, band-pass filter, semiconductor device and communication apparataus 有权
    微谐振器，带通滤波器，半导体器件和通信设备

    公开(公告)号：US20060176125A1

    公开(公告)日：2006-08-10

    申请号：US11344842

    申请日：2006-01-31

    申请人： Shinya Morita ,  Takashi Kinoshita ,  Shun Mitarai

    发明人： Shinya Morita ,  Takashi Kinoshita ,  Shun Mitarai

    IPC分类号： H03H9/00

    CPC分类号： H03H9/2463 ,  H03H3/0077

    摘要： A micro-resonator of a single structure which outputs signals of two resonance frequencies of mutually opposite phases and in which different resonance frequencies are adjusted independently is provided. The micro-resonator includes: an oscillation portion 6 sustained with a gap by support portions 8 [8A, 8B] and an input electrode 3 and an output electrode 4 that become lower electrodes facing the oscillation portion 6 across the gap, in which the input electrode 3 and the output electrode 4 are disposed to face each other along a line intersecting the oscillation portion 6, the oscillation portion 6 generates torsional oscillation and flexural oscillation, and output signals of two resonance frequencies close to each other based on different resonance modes have mutually different phases by 180°.

    摘要翻译： 提供了输出相互相反的两个谐振频率的信号并且独立地调节不同谐振频率的单个结构的微谐振器。 微型谐振器包括：通过支撑部分8 [8A，8B]和输入电极3和输出电极4之间的间隙维持的振荡部分6，其成为跨越间隙面对振荡部分6的下电极，其中 输入电极3和输出电极4沿着与振荡部分6相交的线相对地配置，振荡部分6产生扭转振动和弯曲振荡，并且基于不同的谐振使彼此接近的两个谐振频率的输出信号 模式具有相互不同的相位180°。

    Micro-resonator, band-pass filter, semiconductor device and communication apparatus
    8.
    发明授权
    Micro-resonator, band-pass filter, semiconductor device and communication apparatus 有权
    微谐振器，带通滤波器，半导体器件和通信设备

    公开(公告)号：US07420439B2

    公开(公告)日：2008-09-02

    申请号：US11344842

    申请日：2006-01-31

    申请人： Shinya Morita ,  Takashi Kinoshita ,  Shun Mitarai

    发明人： Shinya Morita ,  Takashi Kinoshita ,  Shun Mitarai

    IPC分类号： H03H9/00

    CPC分类号： H03H9/2463 ,  H03H3/0077

    摘要： A micro-resonator of a single structure which outputs signals of two resonance frequencies of mutually opposite phases and in which different resonance frequencies are adjusted independently is provided. The micro-resonator includes: an oscillation portion 6 sustained with a gap by support portions 8 [8A, 8B] and an input electrode 3 and an output electrode 4 that become lower electrodes facing the oscillation portion 6 across the gap, in which the input electrode 3 and the output electrode 4 are disposed to face each other along a line intersecting the oscillation portion 6, the oscillation portion 6 generates torsional oscillation and flexural oscillation, and output signals of two resonance frequencies close to each other based on different resonance modes have mutually different phases by 180°.

    摘要翻译： 提供了输出相互相反的两个谐振频率的信号并且独立地调节不同谐振频率的单个结构的微谐振器。 微型谐振器包括：通过支撑部分8 [8A，8B]和输入电极3和输出电极4之间的间隙维持的振荡部分6，其成为跨越间隙面对振荡部分6的下电极，其中 输入电极3和输出电极4沿着与振荡部分6相交的线相对地配置，振荡部分6产生扭转振动和弯曲振荡，并且基于不同的谐振使彼此接近的两个谐振频率的输出信号 模式具有相互不同的相位180°。

    Micromachine and method of manufacturing the micromachine
    9.
    发明授权
    Micromachine and method of manufacturing the micromachine 失效
    微机械和微机械的制造方法

    公开(公告)号：US07402877B2

    公开(公告)日：2008-07-22

    申请号：US10522080

    申请日：2003-07-14

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Takeshi Taniguchi ,  Koichi Ikeda

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Takeshi Taniguchi ,  Koichi Ikeda

    IPC分类号： H01L29/82

    CPC分类号： H03H9/2463 ,  H03H3/0072

    摘要： To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band.In a micromachine (20) including: an input electrode (7b), an output electrode (7a), and a support electrode (7c) disposed on a substrate (4); and a band-shaped vibrator electrode (15) formed by laying a beam (vibrating part) (16) over the output electrode (7a) with a space part (A) interposed between the output electrode (7a) and the vibrator electrode (15) in a state in which both end parts of the vibrator electrode (15) are supported on the input electrode (7b) and the substrate (4) with the support electrode (7c) interposed between the substrate (4) and the vibrator electrode (15), the entire surface of both end parts of the vibrator electrode (15) from an edge of the end parts to the beam (16) is completely fixed to the input electrode (7b) and the support electrode (7c).

    摘要翻译： 为了获得用作具有高Q值和较高频带的高频滤波器的微机械。 在微机械（20）中，包括：输入电极（7b），输出电极（7a）和设置在基板（4）上的支撑电极; 以及通过将输入电极（7a）上的光束（振动部分）（16）放置在输出电极（7a）和振动器电极（7a）之间的空间部分（A）而形成的带状振动器电极（15） （15）的两个端部被支撑在输入电极（7b）和基板（4）的状态下，支撑电极（7c）插入在基板（4）和 振动电极（15）从振动电极（15）的两端部到端部（16）的边缘的整个表面完全固定到输入电极（7b）和支撑电极 7 c）。

    Micromachine and method of manufacturing the micromachine
    10.
    发明申请
    Micromachine and method of manufacturing the micromachine 失效
    微机械和微机械的制造方法

    公开(公告)号：US20050245011A1

    公开(公告)日：2005-11-03

    申请号：US10522080

    申请日：2003-07-14

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Takeshi Taniguchi ,  Koichi Ikeda

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Takeshi Taniguchi ,  Koichi Ikeda

    IPC分类号： B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46 ,  H01L21/336

    CPC分类号： H03H9/2463 ,  H03H3/0072

    摘要： To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band. In a micromachine (20) including: an input electrode (7b), an output electrode (7a), and a support electrode (7c) disposed on a substrate (4); and a band-shaped vibrator electrode (15) formed by laying a beam (vibrating part) (16) over the output electrode (7a) with a space part (A) interposed between the output electrode (7a) and the vibrator electrode (15) in a state in which both end parts of the vibrator electrode (15) are supported on the input electrode (7b) and the substrate (4) with the support electrode (7c) interposed between the substrate (4) and the vibrator electrode (15), the entire surface of both end parts of the vibrator electrode (15) from an edge of the end parts to the beam (16) is completely fixed to the input electrode (7b) and the support electrode (7c).

    摘要翻译： 为了获得用作具有高Q值和较高频带的高频滤波器的微机械。 在微机械（20）中，包括：输入电极（7b），输出电极（7a）和设置在基板（4）上的支撑电极; 以及通过将输入电极（7a）上的光束（振动部分）（16）放置在输出电极（7a）和振动器电极（7a）之间的空间部分（A）而形成的带状振动器电极（15） （15）的两个端部被支撑在输入电极（7b）和基板（4）的状态下，支撑电极（7c）插入在基板（4）和 振动电极（15）从振动电极（15）的两端部到端部（16）的边缘的整个表面完全固定到输入电极（7b）和支撑电极 7 c）。