Process gas supply unit
    1.
    发明授权
    Process gas supply unit 失效
    工艺气体供应单元

    公开(公告)号:US6152175A

    公开(公告)日:2000-11-28

    申请号:US89346

    申请日:1998-06-03

    IPC分类号: F16K27/00 F17D1/04 F16K51/00

    摘要: A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

    摘要翻译: 没有常规管道的工艺气体供应单元。 过程气体供应单元可以包括质量流量控制器,输入阀,输出阀,净化阀,真空阀,止回阀,调节器和过滤器的组件。 模块通过螺栓从预定方向附接至至少一个部件。 模块通过螺栓从相同的预定方向安装在基板上,并且用相同的预定方向的螺栓将基板安装在安装面板上。

    Solenoid-operated valve for thermally insulated piping and attachment
construction therefor
    2.
    发明授权
    Solenoid-operated valve for thermally insulated piping and attachment construction therefor 失效
    用于隔热管道及其附件结构的电磁阀

    公开(公告)号:US5623960A

    公开(公告)日:1997-04-29

    申请号:US436422

    申请日:1995-05-23

    摘要: The present invention relates to a solenoid-operated valve for a thermally insulated piping having a thermally insulated outer periphery suitable for transporting low-temperature fluid, high-temperature fluid or the like and relates also to an attachment construction for the valve.Conventionally, with this type of solenoid-operated valve for a thermally insulated piping, since it is necessary to to increase a magnetic flux density of the solenoid coil by increasing the number of turns of the oil or the electric current to be applied thereto, there has been the problem of high production costs and running costs.In the case of the solenoid-operated valve for a thermally insulated piping according to the present invention, inside a heat-insulating layer (6) surrounding flow passages (7, 20, 21, 26, 33) in the form of a pipe, there is provided a fixed core (23) constituting a magnetic circuit between a solenoid coil (17) and a movable coil (18). Then, magnetic resistance between the solenoid coil and the movable core may be reduced, without entailing enlargement of the movable core and the production costs and the running costs may be reduced.

    摘要翻译: PCT No.PCT / JP93 / 01839 Sec。 371日期:1995年5月23日 102(e)日期1995年5月23日PCT提交1993年12月17日PCT公布。 出版物WO94 / 15127 日期:1994年7月7日本发明涉及一种用于隔热管道的电磁阀,其具有适用于输送低温流体,高温流体等的绝热外周边,还涉及用于 阀。 通常,对于这种用于隔热管道的电磁阀,由于需要通过增加油的匝数或施加到其上的电流来增加螺线管线圈的磁通密度,所以 一直是高生产成本和运行成本的问题。 在根据本发明的用于绝热管道的电磁阀的情况下,围绕管道形式的流动通道(7,20,21,26,33)的隔热层(6)内部, 提供构成螺线管线圈(17)和可动线圈(18)之间的磁路的固定铁心(23)。 于是,可以减小螺线管线圈和可动铁芯之间的磁阻,而不需要增大可动铁芯,并且可以降低生产成本并降低运行成本。