公开(公告)号：US5162656A

公开(公告)日：1992-11-10

申请号：US841790

申请日：1992-03-02

申请人： Masakazu Matsugu ,  Kenji Saitoh ,  Shigeyuki Suda ,  Ryo Kuroda ,  Yukichi Niwa ,  Noriyuki Nose

发明人： Masakazu Matsugu ,  Kenji Saitoh ,  Shigeyuki Suda ,  Ryo Kuroda ,  Yukichi Niwa ,  Noriyuki Nose

IPC分类号： G03F9/00

CPC分类号： G03F9/7023 ,  G03F9/7049

摘要： A device for detecting positional relationship between a first and second objects in a predetermined direction is disclosed. The device includes light source for projecting light upon the first object so that the light incident on the first object is deflected thereby and emanates therefrom in a direction perpendicular to the predetermined direction; a light receiving portion disposed in a direction in which the light having been deflected perpendicularly to the predetermined direction and having been deflected again by the second object advances, the light receiving portion being operable to detect the position of incidence of the light thereupon, wherein the position of the light upon the light receiving means is changeable with the position of incidence of the light upon the second object; and a detecting system for detecting the positional relationship between the first and second objects in the predetermined direction, on the basis of the detection by the light receiving portion.

摘要翻译： 公开了一种用于检测预定方向上的第一和第二物体之间的位置关系的装置。 该装置包括用于将光投射到第一物体上的光源，使得入射在第一物体上的光由此偏转，并在垂直于预定方向的方向上从其发出; 光接收部分沿着垂直于预定方向偏转并被第二物体再次偏转的方向设置的方向延伸，光接收部分可操作以检测其上的光的入射位置，其中， 光在光接收装置上的位置可随着第二物体上的光入射位置而改变; 以及检测系统，用于基于光接收部分的检测来检测第一和第二物体在预定方向上的位置关系。

公开(公告)号：US5327221A

公开(公告)日：1994-07-05

申请号：US919380

申请日：1992-07-29

申请人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

发明人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

IPC分类号： G03F9/00 ,  G01B9/02

CPC分类号： G03F9/7023 ,  G03F9/7049

摘要： A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.

摘要翻译： 一种用于检测在预定方向上的第一和第二物体之间的位置关系的装置包括：用于沿与第一或第二物体的方向发射光的光源;以及第一检测部分，用于检测第一和第二物体偏转的第一光的入射位置 第一和第二物体，其中在第一检测部分上的第一光的入射位置随预定方向上第一和第二物体之间的位置关系的改变而改变。 第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态 在预定方向上的物体与第一光不同。 基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受其倾斜的影响。

公开(公告)号：US5294980A

公开(公告)日：1994-03-15

申请号：US58662

申请日：1993-05-10

申请人： Masakazu Matsugu ,  Kenji Saitoh ,  Yukichi Niwa ,  Noriyuki Nose ,  Ryo Kuroda ,  Shigeyuki Suda

发明人： Masakazu Matsugu ,  Kenji Saitoh ,  Yukichi Niwa ,  Noriyuki Nose ,  Ryo Kuroda ,  Shigeyuki Suda

IPC分类号： G03F9/00 ,  G01B11/00 ,  G01N21/85

CPC分类号： G03F9/70

摘要： A device for detecting a relative positional relationship between first and second objects with respect to a predetermined direction includes an illumination system for irradiating the first object with light, wherein the first and second objects are provided with first and second physical optic elements, respectively, each having a light converging or diverging function in at least one direction and wherein the illumination system illuminates the first physical optic element. A photodetecting system detects light passing through the first object and emanating from the second object, and is operable to detect light convergently or divergently influenced by both of the first and physical optic elements, such that the relative positional relationship between the first and second objects can be detected on the basis of the detection by the photodetecting system. At least one of the first and second physical optic elements has a light converging or diverging function in a direction perpendicular to the one direction and has different focal lengths in the perpendicular direction and in the one direction.

摘要翻译： 用于检测相对于预定方向的第一和第二物体之间的相对位置关系的装置包括用于用光照射第一物体的照明系统，其中第一和第二物体分别设置有第一和第二物理光学元件， 在至少一个方向上具有聚光或发散功能，并且其中所述照明系统照亮所述第一物理光学元件。 光检测系统检测穿过第一物体并从第二物体发出的光，并且可操作以从第一物理光学元件和物理光学元件两者收敛或分散地检测光，使得第一和第二物体之间的相对位置关系 基于光检测系统的检测来检测。 第一和第二物理光学元件中的至少一个在垂直于一个方向的方向上具有聚光或发散功能，并且在垂直方向和一个方向上具有不同的焦距。

公开(公告)号：US5325176A

公开(公告)日：1994-06-28

申请号：US875601

申请日：1992-04-28

申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

IPC分类号： G03F9/00 ,  G01B11/02

CPC分类号： G03F9/7076

摘要： A device usable with a first object and a second object at least one of which is provided with a diffraction grating, for detecting the position of the second object relative to the first object, is disclosed. The device includes a light source for projecting a position detecting beam upon the first object; a beam detecting portion for receiving the position detecting beam after it is directed from the first object and being incident on the second object, the beam detecting portion receiving the position detecting beam to detect the position of the second object relative to the first object; wherein at least one diffraction grating is disposed in the path of the position detecting beam to be received by the beam detecting portion, which diffraction grating is effective to diffract the position detecting beam at least twice and wherein the beam detecting portion is disposed at a site effective not to receive unwanted diffraction light produced from the or at least one diffraction grating.

摘要翻译： 公开了一种可用于第一物体和第二物体的装置，其中至少一个具有用于检测第二物体相对于第一物体的位置的衍射光栅。 该装置包括用于将位置检测光束投射到第一物体上的光源; 光束检测部分，用于在从第一物体引导之后接收位置检测光束并入射到第二物体上，光束检测部分接收位置检测光束以检测第二物体相对于第一物体的位置; 其中至少一个衍射光栅设置在所述位置检测光束的路径中，以由所述光束检测部分接收，所述衍射光栅有效地将所述位置检测光束衍射至少两次，并且其中所述光束检测部分设置在位置 有效地不接收由该至少一个衍射光栅产生的不想要的衍射光。

公开(公告)号：US5000572A

公开(公告)日：1991-03-19

申请号：US542656

申请日：1990-06-25

申请人： Noriyuki Nose ,  Minoru Yoshii ,  Yukichi Niwa ,  Ryo Kuroda

发明人： Noriyuki Nose ,  Minoru Yoshii ,  Yukichi Niwa ,  Ryo Kuroda

IPC分类号： G01D5/38

CPC分类号： G01D5/38

摘要： A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.

摘要翻译： 用于测量两个相对移动物体的移动距离的装置包括设置在两个物体中的一个物体上并沿两个物体的相对移动方向设置的第一衍射光栅以及设置在另一物体上的测量部分。 测量部分包括第二衍射光栅，光源和光电检测系统，其中光源提供投射在第二衍射光栅上的两个点上的光，使得它们以具有不同的衍射光的形式的两个点发射 衍射指令。 衍射光被引导到第一衍射光栅上的同一点，并被第一衍射光栅再次衍射，使得它们沿相同的方向发射，并且光电检测系统可操作以检测由于 从第一衍射光栅发出的两个光的干涉。 该装置还包括检测系统，用于根据受光检测的检测来检测两个物体的相对移动距离。

公开(公告)号：US4912408A

公开(公告)日：1990-03-27

申请号：US199706

申请日：1988-05-27

申请人： Takeshi Sawada ,  Ryo Kuroda ,  Noriyuki Nose ,  Yukichi Niwa

发明人： Takeshi Sawada ,  Ryo Kuroda ,  Noriyuki Nose ,  Yukichi Niwa

IPC分类号： G01B7/00 ,  G01D5/14 ,  G01D5/18 ,  H01L39/00

CPC分类号： G01D5/145 ,  G01D5/18 ,  Y10S505/843 ,  Y10S505/872

摘要： Disclosed is a distance measuring system suitably usable in a semiconductor microcircuit manufacturing lithographic apparatus such as an aligner or a stepper, for measuring the position or the distance of movement of a movable object such as a mask stage or a wafer stage. The system includes a magnetic field producing portion such as a magnet for producing a predetermined magnetic field, a superconducting quantum interference device coupled to the mask stage or the wafer stage. Further, there are provided a magnetic flux detecting portion for outputting signals corresponding to changes in the magnetic flux, in the magnetic field, passing through the superconducting quantum interference device and a signal processing unit for processing the output signals of the magnetic flux detecting portion to detect the position or the distance of movement of the mask stage or the wafer stage. Also, a shielding member is provided to shield at least the magnetic field producing portion and the magnetic flux detecting portion against an external magnetic field, by use of a superconductor. The distance measuring system of the present invention assures accurate measurement with a high resolution, for a wide movable range of the movable member such as a range not less than 100 mm.

摘要翻译： 公开了适用于半导体微电路制造光刻设备（例如对准器或步进器）中的距离测量系统，用于测量诸如掩模台或晶片台之类的可移动物体的位置或距离。 该系统包括磁场产生部分，例如用于产生预定磁场的磁体，连接到掩模台或晶片台的超导量子干涉装置。 此外，提供了一个磁通量检测部分，用于输出与通过超导量子干涉装置的磁场中的磁通量的变化相对应的信号，以及用于处理磁通检测部分的输出信号的信号处理单元 检测掩模台或晶片台的位置或移动距离。 此外，设置屏蔽构件，以通过使用超导体来抵御外部磁场来屏蔽至少磁场产生部分和磁通量检测部分。 本发明的距离测量系统可确保在可移动部件的宽的可移动范围内具有高分辨率的精确测量，例如不小于100mm的范围。

公开(公告)号：US5122660A

公开(公告)日：1992-06-16

申请号：US671657

申请日：1991-03-19

申请人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

发明人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

IPC分类号： G01D5/38 ,  G02B7/32 ,  G11B7/085

CPC分类号： G11B7/085 ,  G01D5/38 ,  G02B7/32

摘要： A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.

摘要翻译： 公开了一种用于测量两个相对移动的物体的相对移动距离的装置。 该装置包括形成在一个物体上的多个倾斜表面，并且沿相对移动的方向以预定间距排列，每个倾斜表面相对于相对移动的方向倾斜。 测量部分设置在另一物体上，用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离，并且检测部分检测两个物体在相对移动方向上的相对移动的距离 由测量部分测量的基础。

公开(公告)号：US08488125B2

公开(公告)日：2013-07-16

申请号：US12865171

申请日：2009-05-12

申请人： Kentaro Furusawa ,  Natsuhiko Mizutani ,  Ryo Kuroda

发明人： Kentaro Furusawa ,  Natsuhiko Mizutani ,  Ryo Kuroda

IPC分类号： G01B9/02

CPC分类号： G01B9/02014 ,  G01B9/02004 ,  G01B9/02069 ,  G01B9/02091

摘要： An optical tomography imaging a tomogram by using a coherent light by a backscattering light of a measured object and a reflected light of a reference mirror, which has supercontinuum light sources, an optical system having group velocity dispersion connected to the supercontinuum light source, an optical detection element detecting a coherent light by a backscattering light of the measured object and a reflected light of the reference mirror, a timing detection element detecting a timing of each wavelength component in an output light from the optical system having the group velocity dispersion, and a unit sampling a signal from the optical detector by using a timing signal from the timing detection element with a signal from the supercontinuum light source as a trigger, and detecting an optical tomogram signal imaging a tomogram, thereby acquiring an optical tomogram at a higher speed than a conventional SS-OCT.

摘要翻译： 光学断层摄影通过使用具有超连续光源的测量对象的反向散射光和参考反射镜的反射光使用相干光来成像断层图像，具有连接到超连续光源的组速度色散的光学系统，光学 检测元件通过测量对象的后向散射光和参考反射镜的反射光来检测相干光，定时检测元件，检测来自具有组速度色散的光学系统的输出光中的每个波长分量的定时，以及 通过使用来自定时检测元件的来自超连续光源的信号的定时信号作为触发来对来自光学检测器的信号进行采样，并且检测成像断层图像的光学层析图像信号，从而以更高的速度获取光学层析图像 常规的SS-OCT。

公开(公告)号：US20120038995A1

公开(公告)日：2012-02-16

申请号：US13279119

申请日：2011-10-21

申请人： Tomohiro Yamada ,  Ryo Kuroda

发明人： Tomohiro Yamada ,  Ryo Kuroda

IPC分类号： G02B5/22

CPC分类号： G02B5/204 ,  B82Y20/00 ,  G02B5/008

摘要： An optical filter includes a light-shielding conductive layer provided with a plurality of apertures on a substrate surface that selectively transmits light of a first wavelength, and a dielectric layer in contact with the conductive layer. A size of the apertures is a size equal to or less than the first wavelength, and a ratio of a surface area of the conductive layer to a surface area of the substrate surface is within a range of equal to or greater than 36% and equal to or less than 74%. A transmissivity of the first wavelength is increased by surface plasmons induced in the apertures by light falling on the conductive layer.

摘要翻译： 光学滤波器包括在衬底表面上设置有选择性透射第一波长的光的多个孔的光屏蔽导电层和与导电层接触的电介质层。 孔的尺寸为等于或小于第一波长的尺寸，并且导电层的表面积与基板表面的表面积的比率在等于或大于36％的范围内并且等于 至或小于74％。 第一波长的透射率通过落在导电层上的光在孔中引起的表面等离子体激元而增加。

公开(公告)号：US07915053B2

公开(公告)日：2011-03-29

申请号：US12088023

申请日：2006-12-20

申请人： Junta Yamamichi ,  Satoru Nishiuma ,  Tomohiro Yamada ,  Masaya Ogino ,  Ryo Kuroda ,  Hidenori Shiotsuka

发明人： Junta Yamamichi ,  Satoru Nishiuma ,  Tomohiro Yamada ,  Masaya Ogino ,  Ryo Kuroda ,  Hidenori Shiotsuka

IPC分类号： G01N33/551

CPC分类号： G01N21/554 ,  G01N21/648 ,  G01N21/658 ,  Y10S436/805

摘要： A substrate for forming a target substance detecting device includes a supporting member, an underlying layer disposed on a surface of the supporting member, and a metal pattern layer, disposed on a surface of the underlying layer, for being bound to a target substance trapping substance capable of trapping a target substance in a specimen solution at least containing water as a liquid medium to detect the target substance by utilizing plasmon resonance. The underlying layer has a refractive index nb satisfying the following relationship: 0.90 na≦nb≦1.05 na, wherein na represents a refractive index of water.

摘要翻译： 用于形成目标物质检测装置的基板包括支撑构件，设置在支撑构件的表面上的下层和设置在下层的表面上的金属图案层，用于与目标物质捕获物质结合 能够将至少含有水作为液体介质的样品溶液中的目标物质捕获，以通过利用等离子体共振来检测目标物质。 下层具有满足以下关系的折射率nb：0.90 na＆nlE; nb＆nlE; 1.05na，其中na表示水的折射率。