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公开(公告)号：US07437927B2
公开(公告)日：2008-10-21
申请号：US11835981
申请日：2007-08-08
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： The invention provides a thermal type flow meter which has a high reliability and a low cost. In a thermal type flow meter provided with a flow rate detecting element in which at least a heat generating resistor and a lead electrode are formed on a surface of a tabular substrate, and a support body in which a concave portion accommodating the flow rate detecting element is formed on a surface, and in which the flow rate detecting element is firmly fixed and accommodated by an adhesive agent in a back surface of the tabular substrate and a part of a bottom surface of the concave portion, an approximately straight discharge groove which is deeper than a bottom surface of the concave portion and passes through both end surfaces in upward and downward sides of the concave portion is formed from the upstream side of the support body concave portion to the downstream side, between the cavity of the tabular substrate and the back surface region of the tabular substrate in which the lead electrode is formed. Accordingly, it is possible to achieve the thermal type flow meter which has the high reliability and the low cost.
摘要翻译： 本发明提供一种具有高可靠性和低成本的热式流量计。 在具有流量检测元件的热式流量计中，至少在片状基板的表面上形成有发热电阻体和引线电极，在支承体中容纳流量检测元件的凹部 形成在表面上，其中流量检测元件通过粘合剂牢固地固定并容纳在平板状基板的背面和凹部的底面的一部分中，大致直线的排出槽是 比凹部的底面深，并且穿过凹部的上下两侧的两个端面，从支撑体凹部的上游侧到下游侧，在平板状基板的空腔和 形成引线电极的平板状基板的背面区域。 因此，可以实现具有高可靠性和低成本的热式流量计。
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公开(公告)号：US08203102B2
公开(公告)日：2012-06-19
申请号：US12724399
申请日：2010-03-15
IPC分类号： H05B1/01
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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公开(公告)号：US07631555B2
公开(公告)日：2009-12-15
申请号：US10580112
申请日：2003-11-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6845
摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and a heating temperature control disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.
摘要翻译： 具有优异的温度特性和改进的测量精度的热空气流量计。 热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制，用于执行 加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。 可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。
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公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译： 提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。 在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。 在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。 矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。 因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。
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公开(公告)号：US07685874B2
公开(公告)日：2010-03-30
申请号：US11779128
申请日：2007-07-17
IPC分类号： G01F1/68
CPC分类号： G01F1/6842 , G01F1/6845
摘要： A thermal type flow sensor includes a base portion provided along the direction of a fluid flowing through a main passage, and a sensor element mounted on the base portion and having an exothermic resistor formed on a substrate for detecting the fluid flow rate. The base portion has a rectangular recessed portion in which the sensor element is fixed so that the surface of the detecting portion of the sensor element is positioned lower than an upper edge of the recessed portion. A wall portion of the measuring passage facing the sensor element is constricted. The exothermic resistor is disposed along the fluid passage and spaced away from the upstream side upper edge of the recessed portion and cannot be substantially affected by a fluid flow disturbance due to a step portion formed between the upper edge of the recessed portion and the detecting portion surface.
摘要翻译： 热式流量传感器包括沿着流过主通道的流体的方向设置的基部，以及安装在基部上的传感器元件，并且具有形成在基板上的用于检测流体流速的放热电阻。 基部具有矩形凹部，传感器元件固定在该矩形凹部中，使得传感器元件的检测部分的表面位于比凹部的上边缘低的位置。 面向传感器元件的测量通道的壁部分被收缩。 放热电阻器沿着流体通道设置并且与凹部的上游侧上边缘隔开间隔开，并且不能由于在凹部的上边缘和检测部分之间形成的台阶部分而受到流体流动干扰的显着影响 表面。
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6.发明授权Thermal fluid flow meter having heat-generating resistor and temperature adjuster therefor 有权具有发热电阻和温度调节器的热流体流量计公开(公告)号：US07337661B2
公开(公告)日：2008-03-04
申请号：US11352212
申请日：2006-02-13
IPC分类号： G01F1/68
摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.
摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 还包括用于调节发热电阻器的过温度（DeltaTh = Th-Ta）的调节装置，其是测量介质的温度（Ta）与发热量的测量温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。
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公开(公告)号：US07269999B2
公开(公告)日：2007-09-18
申请号：US10560896
申请日：2006-03-05
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/696
摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.
摘要翻译： 提供流量测量精度优异的热气流计。 气流计具有流量测量元件，其包括形成在第一基底构件上的热电阻器和温度补偿电阻器。 具有驱动电路和信号处理器的气流计的第二基座容纳在保持流量测量元件的壳体中。 流量测量元件设置在空气通道中。 在用于在热气流计的两点测量温度的两个温度传感器中，分别在流量测量元件的第一基底上设置第一温度传感器，并且在壳体内部设置第二温度传感器。 信号处理器具有基于流量测量元件的输出信号和第一和第二传感器的各个输出信号来计算气流速率，空气温度和空气通道壁面温度的功能。
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公开(公告)号：US20060220662A1
公开(公告)日：2006-10-05
申请号：US11353937
申请日：2006-02-15
IPC分类号： G01R27/08
CPC分类号： G01C9/00 , G01F1/6845 , G01F1/69 , G01P15/008
摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.
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公开(公告)号：US20060207320A1
公开(公告)日：2006-09-21
申请号：US11352212
申请日：2006-02-13
IPC分类号： G01F1/68
摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.
摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 它还包括调节装置，用于调节发热电阻器的过热温度（DeltaTh = Th-Ta），该温度是测量介质的温度（Ta）与发热量之间的温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。
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公开(公告)号：US20090000372A1
公开(公告)日：2009-01-01
申请号：US11814308
申请日：2006-02-20
申请人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
IPC分类号： G01F1/69
CPC分类号： G01F15/006 , G01F1/6845 , G01F1/692
摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.
摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。
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