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公开(公告)号：US07437927B2
公开(公告)日：2008-10-21
申请号：US11835981
申请日：2007-08-08
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： The invention provides a thermal type flow meter which has a high reliability and a low cost. In a thermal type flow meter provided with a flow rate detecting element in which at least a heat generating resistor and a lead electrode are formed on a surface of a tabular substrate, and a support body in which a concave portion accommodating the flow rate detecting element is formed on a surface, and in which the flow rate detecting element is firmly fixed and accommodated by an adhesive agent in a back surface of the tabular substrate and a part of a bottom surface of the concave portion, an approximately straight discharge groove which is deeper than a bottom surface of the concave portion and passes through both end surfaces in upward and downward sides of the concave portion is formed from the upstream side of the support body concave portion to the downstream side, between the cavity of the tabular substrate and the back surface region of the tabular substrate in which the lead electrode is formed. Accordingly, it is possible to achieve the thermal type flow meter which has the high reliability and the low cost.
摘要翻译： 本发明提供一种具有高可靠性和低成本的热式流量计。 在具有流量检测元件的热式流量计中，至少在片状基板的表面上形成有发热电阻体和引线电极，在支承体中容纳流量检测元件的凹部 形成在表面上，其中流量检测元件通过粘合剂牢固地固定并容纳在平板状基板的背面和凹部的底面的一部分中，大致直线的排出槽是 比凹部的底面深，并且穿过凹部的上下两侧的两个端面，从支撑体凹部的上游侧到下游侧，在平板状基板的空腔和 形成引线电极的平板状基板的背面区域。 因此，可以实现具有高可靠性和低成本的热式流量计。
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公开(公告)号：US06698282B2
公开(公告)日：2004-03-02
申请号：US09811439
申请日：2001-03-20
IPC分类号： G01F168
CPC分类号： F02D41/187 , G01F1/6845
摘要： The object of this invention is to provide a heated type air flow rate sensor for measuring an air flow rate using heat generating resistive element or resistor formed within a diaphragm of which periphery is fixed, in which diaphragm destruction due to the collusion of dust is adapted to be prevented. Tapers of two or more stages are formed at a diaphragm fixing flange, and the angle of the most inside taper is made smaller than the angle of the taper which is outside with respect to the most inside taper. When dust collides with the diaphragm and the kinetic energy is transformed into distortion energy, the diaphragm destruction is avoided by making small the slope of the load-displacement curve at the neighborhood of the diaphragm flange to make the generated load small.
摘要翻译： 本发明的目的是提供一种加热式空气流量传感器，用于使用在其周边固定的隔膜中形成的发热电阻元件或电阻器来测量空气流量，其中由于灰尘共谋而造成的隔膜破坏 在隔膜固定凸缘上形成两级或更多级的塔，最内侧锥形的角度比相对于最内侧的锥度的外侧锥形的角度小。当灰尘与 隔膜和动能被转化为变形能量，通过使膜片法兰附近的负载 - 位移曲线的斜率变小，避免了膜片的破坏，使得产生的载荷变小。
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公开(公告)号：US20070089504A1
公开(公告)日：2007-04-26
申请号：US11483549
申请日：2006-07-11
申请人： Keiji Hanzawa , Satoshi Shimada , Akio Yasukawa , Naoki Saito , Keiichi Nakada , Izumi Watanabe
发明人： Keiji Hanzawa , Satoshi Shimada , Akio Yasukawa , Naoki Saito , Keiichi Nakada , Izumi Watanabe
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , H01L2924/0002 , H01L2924/00
摘要： A gas flow measuring apparatus includes a detecting element including a heating resistor and a thermo-sensitive resistor disposed on a diaphragm and external terminals connected to the heating resistor and the thermo-sensitive resistor, and a flow rate detecting unit which controls heating temperature of the heating resistor and which detects a flow rate of gas according to a change in a resistance value of the heating resistor or the thermo-sensitive resistor. The detecting element includes a resistor area in which the heating resistor and the thermo-sensitive resistor are formed and a fixed section area in which the external terminals are formed. A stress mitigating unit is formed between the resistor area and the fixed section area.
摘要翻译： 一种气体流量测量装置，包括检测元件，该检测元件包括加热电阻器和设置在隔膜上的热敏电阻器和连接到加热电阻器和热敏电阻器的外部端子，以及流量检测单元，其控制 加热电阻器，其根据加热电阻器或热敏电阻器的电阻值的变化来检测气体的流量。 检测元件包括其中形成有加热电阻器和热敏电阻器的电阻器区域和形成有外部端子的固定部分区域。 在电阻器区域和固定部分区域之间形成减压单元。
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公开(公告)号：US06877383B2
公开(公告)日：2005-04-12
申请号：US10247637
申请日：2002-09-20
申请人： Junichi Horie , Yasuo Onose , Norio Ichikawa , Seiji Kuryu , Satoshi Shimada , Akihiko Saito , Keiji Hanzawa , Masahiro Matsumoto , Hiroshi Moriya , Akio Yasukawa , Atsushi Miyazaki
发明人： Junichi Horie , Yasuo Onose , Norio Ichikawa , Seiji Kuryu , Satoshi Shimada , Akihiko Saito , Keiji Hanzawa , Masahiro Matsumoto , Hiroshi Moriya , Akio Yasukawa , Atsushi Miyazaki
CPC分类号： G01L9/0073
摘要： By sealing a diaphragm with less processes and lower cost and reducing deformation due to remaining stress, a stable and highly reliable pressure sensor construction is proposed. The pressure sensor is low in measurement error and small in floating capacitance and leakage current and good in characteristic. As a means to attain the above object, a polycrystalline silicon diaphragm is sealed with a silicon oxide film deposited through a LPCVD method and then completely covered. The diaphragm is placed on a surface of a semiconductor substrate with a nearly constant gap of 0.15 to 1.3 μm, and has difference-in-grade constructions of a deformation reducing means due to remaining stress.
摘要翻译： 通过以较少的工艺密封隔膜，降低成本，减少由于剩余应力引起的变形，提出了一种稳定可靠的压力传感器结构。 压力传感器测量误差小，浮动电容和漏电流小，特性好。 作为实现上述目的的手段，用通过LPCVD方法沉积的氧化硅膜密封多晶硅隔膜，然后完全覆盖。 隔膜被放置在半导体衬底的表面上，具有0.15-1.3μm的几乎恒定的间隙，并且由于剩余应力而具有变形减小装置的不同级别的构造。
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5.发明授权Capacitance type pressure sensor with capacitive elements actuated by a diaphragm 失效电容型压力传感器，其电容元件由隔膜驱动公开(公告)号：US06167761A
公开(公告)日：2001-01-02
申请号：US09103612
申请日：1998-06-24
申请人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.
摘要翻译： 在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。 在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。 氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变 薄膜和可动电极。 固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。
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公开(公告)号：US5936235A
公开(公告)日：1999-08-10
申请号：US30853
申请日：1998-02-26
CPC分类号： G01L23/16 , G01L23/221 , G01L9/0076
摘要： A cylinder pressure sensor is adapted to detect a cylinder pressure by detecting a change in the amount of light being transmitted through an optical fiber in an axial direction. Two support portions support the optical fiber at two points along the length thereof. A diaphragm in contact with the optical fiber causes bending of the optical fiber in dependence upon a change in the cylinder pressure. The position at which a force is applied against the optical fiber by the diaphragm is deviated from a center position between the two support portions. The resulting cylinder pressure sensor is capable of accurately measuring cylinder pressure and knocking over a long period of time with a low cost and reduced initial variations.
摘要翻译： 气缸压力传感器适于通过检测在轴向方向上透过光纤的光量的变化来检测气缸压力。 两个支撑部分沿其长度的两个点处支撑光纤。 与光纤接触的隔膜根据气缸压力的变化导致光纤弯曲。 通过隔膜向光纤施加力的位置偏离两个支撑部之间的中心位置。 所得到的气缸压力传感器能够以低成本和初始变化降低，精确地测量气缸压力和敲击长时间。
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公开(公告)号：US4292618A
公开(公告)日：1981-09-29
申请号：US129195
申请日：1980-03-11
摘要： A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.
摘要翻译： 半导体衬底具有主表面，在第一主表面的相对侧上的另一个主表面，通过在其中扩散杂质而形成在第二主表面的中心部分中的应变计条，以及连接到应变计条纹的电极。 这些应变计条纹与第二主表面的周缘间隔大于同一主表面长度的1/3。 半导体基板的第一主表面与弹性金属负载板接合。
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公开(公告)号：US07992435B2
公开(公告)日：2011-08-09
申请号：US12512512
申请日：2009-07-30
申请人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。
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公开(公告)号：US07942053B2
公开(公告)日：2011-05-17
申请号：US12261700
申请日：2008-10-30
申请人： Naoki Saito , Takeshi Morino , Yuki Okamoto , Keiji Hanzawa , Hiromu Kikawa , Akio Yasukawa
发明人： Naoki Saito , Takeshi Morino , Yuki Okamoto , Keiji Hanzawa , Hiromu Kikawa , Akio Yasukawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F5/00 , G01F15/12
摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.
摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。
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10.发明授权Heating resistor type flow measuring device housing structure having projection and recess for preventing mis-installation 有权加热电阻式流量测量装置壳体结构具有用于防止错误安装的突出和凹陷公开(公告)号：US07469582B2
公开(公告)日：2008-12-30
申请号：US11905490
申请日：2007-10-01
申请人： Naoki Saito , Masayuki Kozawa , Shinya Igarashi , Hiromu Kikawa , Akio Yasukawa , Akira Takasago
发明人： Naoki Saito , Masayuki Kozawa , Shinya Igarashi , Hiromu Kikawa , Akio Yasukawa , Akira Takasago
IPC分类号： G01F1/68
CPC分类号： G01F1/684 , F02D41/187 , G01F1/6842 , G01F1/688 , G01F1/69 , G01F5/00
摘要： A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity. Further, a distance is provided between the support part and a metal plate forming a route for conducting the heat transferred to the metal base fixing an electronic circuit substrate by a plastic mold so as to form a structure obstructing a heat transfer, or a clearance is provided in a portion spaced by the plastic mold between the support part and the metal base so as to form a structure obstructing a heat transfer.
摘要翻译： 一种加热电阻器型流量测量装置，包括：壳体，其具有设置在框体和连接器之间的支撑部，并且连接到流体通道的安装部分;流量检测元件，其保持在壳体的框体侧;以及 电子电路保持在壳体上并与流量检测元件和连接器电连接，其中电子电路被保持在壳体的框架主体侧并且定位在流体通道中，刚性高于 壳体的主结构构件与支撑部一体地形成，壳体通过构件以高刚性固定到流体通道。 将金属板插入支撑部，以增加刚性。 此外，在支撑部分和金属板之间设置一个距离，该金属板形成用于传导通过塑料模具固定电子电路基板的传送到金属基座的热量的路线，以便形成阻碍热传递的结构，或者间隙是 设置在由塑料模具在支撑部分和金属基座之间间隔开的部分中，以形成阻碍热传递的结构。
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