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公开(公告)号：US5078474A
公开(公告)日：1992-01-07
申请号：US616657
申请日：1990-11-21
申请人： Masatoshi Marui , Tomonori Inage , Yuji Matsui , Tazuko Ishizuka
发明人： Masatoshi Marui , Tomonori Inage , Yuji Matsui , Tazuko Ishizuka
CPC分类号： G02F1/132 , G03F7/2057 , H05K3/0082
摘要： An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.
摘要翻译： 一种用于制造印刷电路板的曝光装置。 提供了一种热写的液晶光阀，其中通过不透明部分和透明部分形成图案。 写入光学系统将加热光点引导到光阀上。 光阀和/或加热光点相对于另一个是可移动的。 布置有透射从光源发射的光束通过液晶光阀内的液晶层的投影光学系统。 投影光学系统用发射的光通量照射被摄体。
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公开(公告)号：US5062692A
公开(公告)日：1991-11-05
申请号：US616385
申请日：1990-11-21
申请人： Masatoshi Marui , Tomonori Inage , Yuji Matsui , Tazuko Ishizuka
发明人： Masatoshi Marui , Tomonori Inage , Yuji Matsui , Tazuko Ishizuka
CPC分类号： G02F1/132 , G03F7/2057 , H05K3/0082
摘要： An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.
摘要翻译： 一种用于制造印刷电路板的曝光装置。 提供了一种热写的液晶光阀，其中通过不透明部分和透明部分形成图案。 写入光学系统将加热光点引导到光阀上。 光阀和/或加热光点相对于另一个是可移动的。 布置有透射从光源发射的光束通过液晶光阀内的液晶层的投影光学系统。 投影光学系统用发射的光通量照射被摄体。
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公开(公告)号：US5026145A
公开(公告)日：1991-06-25
申请号：US249764
申请日：1988-09-26
申请人： Masatoshi Marui , Tomonori Inage , Vuji Matsui , Tazuko Ishizuka
发明人： Masatoshi Marui , Tomonori Inage , Vuji Matsui , Tazuko Ishizuka
CPC分类号： G02F1/132 , G03F7/2057 , H05K3/0082
摘要： An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.
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公开(公告)号：US4863250A
公开(公告)日：1989-09-05
申请号：US176003
申请日：1988-03-31
申请人： Tazuko Ishizuka
发明人： Tazuko Ishizuka
CPC分类号： G02B13/0005
摘要： An f..theta. lens system which incorporates the advantages of a telecentric optical system and which is also achromatized so as to permit its use with a multi-mode laser. The lens system includes, in order from the light source side, of a first lens unit composed of one or two lens elements and which has a negative refractive power with a concave surface directed toward the light source side, a second lens unit composed of a positive meniscus lens having a convex surface directed toward the image side, a third lens unit composed of two positive lens elements and one negative lens element and which has a positive refractive power, and a fourth lens unit composed of two plano-convex lens elements and which is spaced a long distance from the third lens unit so as to be located at a position close to the image plane.
摘要翻译： 一个 该透镜系统结合了远心光学系统的优点，并且还被消色化以允许其使用多模激光器。 透镜系统从光源侧依次包括由一个或两个透镜元件构成的第一透镜单元，其具有朝向光源侧的凹面的负折光力，第二透镜单元由 具有朝向图像侧的凸表面的正弯月透镜，由两个正透镜元件和一个负透镜元件组成并具有正折光力的第三透镜单元和由两个平凸透镜元件组成的第四透镜单元， 其与第三透镜单元间隔很长，以便位于靠近图像平面的位置。
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公开(公告)号：US4776654A
公开(公告)日：1988-10-11
申请号：US35573
申请日：1987-04-07
申请人： Tazuko Ishizuka , Akira Morimoto , Yuji Matui
发明人： Tazuko Ishizuka , Akira Morimoto , Yuji Matui
CPC分类号： G02B27/0031 , G02F1/11
摘要： A scanning optical device including a rotating polygonal mirror or oscillating mirror. Two acoustooptical devices are disposed along the path between the light source and the mirror and are set for respective time-constant angles of deflection to compensate for tilting of the mirror without introducing an offset.
摘要翻译： 一种包括旋转多面镜或振荡镜的扫描光学装置。 两个声光装置沿着光源和反射镜之间的路径设置，并且被设置用于相应的时间上的偏转角以补偿反射镜的倾斜而不引入偏移。
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