Scanning optical system
    1.
    发明授权
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US5247373A

    公开(公告)日:1993-09-21

    申请号:US582764

    申请日:1990-09-14

    摘要: A scanning optical system has a drawing light source, a rotary scanning deflector, a scanning lens and a detection device for detecting a rotational position of the scanning deflector. The drawing light source is controlled by a timing control signal generated by a timing control device as a function of drawing data. The scanning optical system may have a transmission scale, a scanning light receiving portion and a diffusion plate disposed between transmission scale and scanning light receiving portion and adapted to diffuse the monitor beam made incident to the scanning light receiving portion.

    摘要翻译: 扫描光学系统具有绘图光源,旋转扫描偏转器,扫描透镜和用于检测扫描偏转器的旋转位置的检测装置。 绘图光源由作为绘制数据的函数的定时控制装置产生的定时控制信号控制。 扫描光学系统可以具有传输标尺,扫描光接收部分和扩散板,其设置在传输标尺和扫描光接收部分之间,并且适于扩散入射到扫描光接收部分的监视光束。

    Scanning optical system
    2.
    发明授权
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US5194982A

    公开(公告)日:1993-03-16

    申请号:US853043

    申请日:1992-03-18

    申请人: Akira Morimoto

    发明人: Akira Morimoto

    IPC分类号: G02B26/12

    CPC分类号: G02B26/125

    摘要: A scanning optical system projects a light beam from a light source as a line spread function image in a principal scanning plane before the light beam is made incident onto a scanning deflector. A static deflector is disposed in a line spread function image position to guide a light beam from a light source to the scanning deflector. The static deflector has a slit mirror for reflecting a light beam from the light source or a mirror with a slit for permitting a light beam to be transmitted therethrough.

    摘要翻译: 在将光束入射到扫描偏转器之前,扫描光学系统将来自光源的光束作为线扩散函数图像投影在主扫描平面中。 静态偏转器设置在线扩展函数图像位置中以将来自光源的光束引导到扫描偏转器。 静电偏转器具有用于反射来自光源的光束的狭缝镜或具有允许光束透射的狭缝的反射镜。

    Exposure apparatus
    4.
    发明授权
    Exposure apparatus 失效
    曝光装置

    公开(公告)号:US5168306A

    公开(公告)日:1992-12-01

    申请号:US863538

    申请日:1992-04-06

    IPC分类号: G03F7/20 G03F9/00

    摘要: An exposure apparatus where a mask table having an exposing pattern and a work to be exposed are relative to each other movable, wherein the moving amount of the mask table is detected by a scale image formed through a projection lens system, so that even if the projection lens system has a magnification error, by optically offsetting it, the moving amount of the mask table can be detected. Thus, a more accurate control can be obtained so that a mask image can be more precisely reproduced on a work.

    摘要翻译: 其中具有曝光图案和待曝光的工件的掩模台相对于彼此可移动的曝光装置,其中通过投影透镜系统形成的标尺图像来检测掩模台的移动量,使得即使 投影透镜系统通过光学偏移来具有放大误差,可以检测掩模台的移动量。 因此,可以获得更准确的控制,使得掩模图像可以在工件上更精确地再现。

    Scanning optical system for use in a laser beam printer
    6.
    发明授权
    Scanning optical system for use in a laser beam printer 失效
    用于激光束打印机的扫描光学系统

    公开(公告)号:US4953926A

    公开(公告)日:1990-09-04

    申请号:US322030

    申请日:1989-03-13

    申请人: Akira Morimoto

    发明人: Akira Morimoto

    IPC分类号: G02B27/00 H04N1/113

    CPC分类号: H04N1/1135 G02B27/0031

    摘要: An optical scanning system for use in a laser beam printer is disclosed which comprises a cylindrical lens for imaging laser light in an auxiliary scanning cross section at a point in front of a deflector and an anamorphic scanning lens unit which converges the light rays deflected by the deflector at a point on a scanning surface. The scanning lens unit has, in order from the deflector side, a first lens which is a negative lens element having a concave toric surface with a stronger curvature in the auxiliary scanning cross section and a second lens having a convex toric surface with a stronger curvature in the auxiliary scanning cross section. The optical system further satisfying the following condition:0.015f

    摘要翻译: 公开了一种用于激光束打印机的光学扫描系统,其包括用于在偏转器前面的点处的辅助扫描横截面中的激光成像的柱面透镜和使由该偏转器偏转的光线会聚的变形扫描透镜单元 偏转器在扫描表面上的一个点处。 扫描透镜单元从偏转器侧依次具有作为副透镜元件的第一透镜,所述第一透镜具有在辅助扫描横截面中具有较强曲率的凹曲面,并且具有凸曲面的第二透镜具有较强曲率 在辅助扫描横截面。 进一步满足以下条件的光学系统:0.015f

    Scanning optical system for use in laser beam printer
    7.
    发明授权
    Scanning optical system for use in laser beam printer 失效
    扫描光学系统用于激光束打印机

    公开(公告)号:US4930850A

    公开(公告)日:1990-06-05

    申请号:US267892

    申请日:1988-11-07

    申请人: Akira Morimoto

    发明人: Akira Morimoto

    摘要: A scanning optical system for use in a laser beam printer which is small and available at low cost, and yet is capable of effectively compensating for tilting and beam shaping. The scanning lens unit in this optical system has two-element composition consisting of, in order from a deflector side, a first lens of a negative lens element having a concave spherical surface on the deflector side and a concave cylindrical surface oon the scanning surface side having a curvature in the auxiliary scanning cross section, and the second lens having a planar surface on the deflector side and a convex toric surface on the scanning surface side which has a stronger curvature in the auxiliary scanning cross section. The scanning lens unit has a shorter focal length in the auxiliary scanning cross section than in the main scanning direction and forms an image at a finite distance with the object point lying at focusing point where image is formed by the cylindrical lens. Thus, the scanning lens unit greatly reduces the effects of tilting of the deflector positioned between the focusing point and the scanning lens unit.

    摘要翻译: 一种用于激光束打印机的扫描光学系统,其小型且可用于低成本,并且能够有效地补偿倾斜和光束成形。 该光学系统中的扫描透镜单元具有由偏转器侧依次排列的偏转器侧的具有凹球面的负透镜元件的第一透镜和扫描面侧的凹圆柱面的双元件结构 在辅助扫描横截面中具有曲率,并且第二透镜在偏转器侧具有平坦表面,在辅助扫描横截面上具有较强曲率的扫描表面侧上的凸面复曲面。 扫描透镜单元在辅助扫描横截面中的焦距比在主扫描方向上更短,并且形成有限距离的图像,其中物点位于由柱面透镜形成图像的聚焦点处。 因此,扫描透镜单元大大降低了位于聚焦点和扫描透镜单元之间的偏转器的倾斜效果。

    Scanning optical system for use in a laser beam printer
    8.
    发明授权
    Scanning optical system for use in a laser beam printer 失效
    用于激光束打印机的扫描光学系统

    公开(公告)号:US4756583A

    公开(公告)日:1988-07-12

    申请号:US11566

    申请日:1987-02-06

    申请人: Akira Morimoto

    发明人: Akira Morimoto

    摘要: An optical system particularly for a laser beam printer comprising a semiconductor laser, a collimating lens, a cylindrical lens having curvature in the sub-scanning cross section, a deflector and anamorphic scanning lens system concentrating the light on a scanning plane. The anamorphic scanning lens system may have one to four lenses but has one lens with a convex toric surface facing the scanning plane. The anamorphic scanning lens system has stronger power in the sub-scanning cross section than in the main scanning cross section.

    摘要翻译: 一种特别用于激光束打印机的光学系统,包括半导体激光器,准直透镜,在副扫描横截面中具有曲率的柱面透镜,偏转器和变形扫描透镜系统将光集中在扫描平面上。 变形扫描透镜系统可以具有一至四个透镜,但是具有一个具有面向扫描平面的凸曲面的透镜。 变形扫描透镜系统在副扫描横截面中比在主扫描横截面中具有更强的功率。

    Scanning optical system for laser beam printers
    9.
    发明授权
    Scanning optical system for laser beam printers 失效
    激光束打印机扫描光学系统

    公开(公告)号:US4715699A

    公开(公告)日:1987-12-29

    申请号:US823236

    申请日:1986-01-28

    申请人: Akira Morimoto

    发明人: Akira Morimoto

    IPC分类号: G06K15/12 G02B26/08

    CPC分类号: G06K15/1228

    摘要: A scanning optical system such as a laser beam printer that comprising a semiconductor laser, a collimator lens that produces substantially parallel rays of light from the beam emitted from the semiconductor laser, a convex cylinder lens having a curvature within a cross section taken in the auxiliary scanning direction, a deflector, and a scanning lens that focuses the deflected rays to form a spot on a scanning surface. The normal direction of light emitting from the semiconductor laser being in alignment with the scanning direction of the scanning lens system, and the scanning lens system having an anamorphic configuration.

    摘要翻译: 一种扫描光学系统,例如激光束打印机,其包括半导体激光器,准直透镜,其从半导体激光器发射的光束产生基本上平行的光线;凸圆柱透镜,其具有在辅助部件内的横截面中的曲率 扫描方向,偏转器和聚焦偏转光线以在扫描表面上形成斑点的扫描透镜。 从半导体激光器发出的光的正常方向与扫描透镜系统的扫描方向对准,并且具有变形构型的扫描透镜系统。