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1.发明授权Multi-actuator design and control for a high-speed/large-range nanopositioning system 有权用于高速/大范围纳米定位系统的多执行器设计和控制公开(公告)号：US09397587B2
公开(公告)日：2016-07-19
申请号：US14547480
申请日：2014-11-19
摘要： Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
摘要翻译： 多执行器系统 该系统包括具有不同范围和带宽的至少两个纳米定位器，其位于级联串行形式中以接触和移动物体。 控制系统采用基于数据的控制设计来组合至少两个纳米定位器，以便在至少两个纳米定位器之间分配致动责任，以便在移动物体时补偿它们的耦合动力学。 优选地提供单独的控制器，用于分别控制至少两个纳米定位器中的每一个。 可以通过最小化输出误差来确定单独控制器的参数。
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2.发明申请MULTI-ACTUATOR DESIGN AND CONTROL FOR A HIGH-SPEED/LARGE-RANGE NANOPOSITIONING SYSTEM 有权高速/大范围纳米系统的多执行器设计与控制公开(公告)号：US20150137712A1
公开(公告)日：2015-05-21
申请号：US14547480
申请日：2014-11-19
摘要： Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
摘要翻译： 多执行器系统 该系统包括具有不同范围和带宽的至少两个纳米定位器，其位于级联串行形式中以接触和移动物体。 控制系统采用基于数据的控制设计来组合至少两个纳米定位器，以便在至少两个纳米定位器之间分配致动责任，以便在移动物体时补偿它们的耦合动力学。 优选地提供单独的控制器，用于分别控制至少两个纳米定位器中的每一个。 可以通过最小化输出误差来确定单独控制器的参数。
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