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公开(公告)号：US11042073B2
公开(公告)日：2021-06-22
申请号：US16268566
申请日：2019-02-06
发明人： Cheng Peng , Dirk Englund
IPC分类号： G02F1/29 , H01L27/092
摘要： Modulating graphene's optical conductivity with an electrolyte nanopatterning technique reduces or eliminates scattering loss caused by rough edges from etching. This technique uses a resist mask patterned with features as small as 30 nm to shield graphene from ions in an electrolyte. It can provide a carrier density variation of about 1014 cm−2 across a length of just 15 nm. And it can be combined with a technique of growing or transferring graphene on atomically smooth hexagonal boron nitride (hBN) to increase graphene's carrier mobility, e.g., to 10,000 cm2/(V·s) or more. The resulting graphene metamaterials can be used to make voltage-tunable electro-optical devices, such as beam-steering devices, electro-optical switch and modulators, and reconfigurable holograms.
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公开(公告)号：US11614643B2
公开(公告)日：2023-03-28
申请号：US16876477
申请日：2020-05-18
摘要： A reflective spatial light modulator (SLM) made of an electro-optic material in a one-sided Fabry-Perot resonator can provide phase and/or amplitude modulation with fine spatial resolution at speeds over a Gigahertz. The light is confined laterally within the electro-optic material/resonator layer stack with microlenses, index perturbations, or by patterning the layer stack into a two-dimensional (2D) array of vertically oriented micropillars. Alternatively, a photonic crystal guided mode resonator can vertically and laterally confine the resonant mode. In phase-only modulation mode, each SLM pixel can produce a π phase shift under a bias voltage below 10 V, while maintaining nearly constant reflection amplitude. This high-speed SLM can be used in a wide range of new applications, from fully tunable metasurfaces to optical computing accelerators, high-speed interconnects, true 2D phased array beam steering, beam forming, or quantum computing with cold atom arrays.
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