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公开(公告)号：US11635330B2
公开(公告)日：2023-04-25
申请号：US17335017
申请日：2021-05-31
Applicant: Massachusetts Institute of Technology
Inventor： Jordan Goldstein , Christopher Louis Panuski , Dirk Robert Englund
IPC: G01J5/08 , G01J5/0818 , G01J5/34
Abstract: Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.
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公开(公告)号：US20240069368A1
公开(公告)日：2024-02-29
申请号：US17898147
申请日：2022-08-29
Applicant: Massachusetts Institute of Technology
Inventor： Christopher Louis Panuski , Ian Robert Christen , Dirk Robert ENGLUND
IPC: G02F1/025 , B23K26/362
CPC classification number: G02F1/025 , B23K26/362 , B23K2101/40
Abstract: Methods and systems are described for precisely adjusting characteristics of microfabricated devices after device fabrication. The adjustments can be carried out in parallel on a plurality of the microfabricated devices. By carrying out the adjustment process, uniformity of feature sizes to a few picometers (one standard deviation) and corresponding uniformity of operating characteristics for a plurality of microfabricated devices are possible.
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公开(公告)号：US11022826B2
公开(公告)日：2021-06-01
申请号：US16872731
申请日：2020-05-12
Applicant: Massachusetts Institute of Technology
Inventor： Christopher Louis Panuski , Dirk Robert Englund
Abstract: A spatial light modulator (SLM) comprised of a 2D array of optically-controlled semiconductor nanocavities can have a fast modulation rate, small pixel pitch, low pixel tuning energy, and millions of pixels. Incoherent pump light from a control projector tunes each PhC cavity via the free-carrier dispersion effect, thereby modulating the coherent probe field emitted from the cavity array. The use of high-Q/V semiconductor cavities enables energy-efficient all-optical control and eliminates the need for individual tuning elements, which degrade the performance and limit the size of the optical surface. Using this technique, an SLM with 106 pixels, micron-order pixel pitch, and GHz-order refresh rates could be realized with less than 1 W of pump power.
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公开(公告)号：US11860458B2
公开(公告)日：2024-01-02
申请号：US17216272
申请日：2021-03-29
Applicant: Massachusetts Institute of Technology
Inventor： Christopher Louis Panuski , Dirk Robert Englund
CPC classification number: G02F1/025 , G02F2202/32 , G02F2203/12 , G02F2203/15
Abstract: A spatial light modulator (SLM) comprised of a 2D array of optically-controlled semiconductor nanocavities can have a fast modulation rate, small pixel pitch, low pixel tuning energy, and millions of pixels. Incoherent pump light from a control projector tunes each PhC cavity via the free-carrier dispersion effect, thereby modulating the coherent probe field emitted from the cavity array. The use of high-Q/V semiconductor cavities enables energy-efficient all-optical control and eliminates the need for individual tuning elements, which degrade the performance and limit the size of the optical surface. Using this technique, an SLM with 106 pixels, micron-order pixel pitch, and GHz-order refresh rates could be realized with less than 1 W of pump power.
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公开(公告)号：US11614643B2
公开(公告)日：2023-03-28
申请号：US16876477
申请日：2020-05-18
Applicant: Massachusetts Institute of Technology
Inventor： Cheng Peng , Christopher Louis Panuski , Ryan Hamerly , Dirk Robert Englund
Abstract: A reflective spatial light modulator (SLM) made of an electro-optic material in a one-sided Fabry-Perot resonator can provide phase and/or amplitude modulation with fine spatial resolution at speeds over a Gigahertz. The light is confined laterally within the electro-optic material/resonator layer stack with microlenses, index perturbations, or by patterning the layer stack into a two-dimensional (2D) array of vertically oriented micropillars. Alternatively, a photonic crystal guided mode resonator can vertically and laterally confine the resonant mode. In phase-only modulation mode, each SLM pixel can produce a π phase shift under a bias voltage below 10 V, while maintaining nearly constant reflection amplitude. This high-speed SLM can be used in a wide range of new applications, from fully tunable metasurfaces to optical computing accelerators, high-speed interconnects, true 2D phased array beam steering, beam forming, or quantum computing with cold atom arrays.
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Patent Agency Ranking
公开(公告)号：US20230288637A1
公开(公告)日：2023-09-14
申请号：US18152638
申请日：2023-01-10
Applicant: Massachusetts Institute of Technology
Inventor： Artur Hermans , Adrian Johannes Menssen , Christopher Louis Panuski , Ian Robert Christen , Dirk Robert ENGLUND
CPC classification number: G02B6/1225 , G02B6/124 , G02B6/12002 , G06N10/40 , G02B2006/12061 , G02B2006/12142
Abstract: An atom control architecture based on VIS-IR photonic integrated circuit (PIC) technology is characterized by (1) visible (VIS) and near-infrared (IR) wavelength operation, (2) channel counts extensible beyond 1000s of individually addressable atoms, (3) high intensity modulation extinction and (4) repeatability compatible with low gate errors, and (5) fast switching times. A 16-channel SiN-based APIC with (5.8±0.4) ns response times and
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公开(公告)号：US20210240016A1
公开(公告)日：2021-08-05
申请号：US17216272
申请日：2021-03-29
Applicant: Massachusetts Institute of Technology
Inventor： Christopher Louis Panuski , Dirk Robert ENGLUND
IPC: G02F1/025
Abstract: A spatial light modulator (SLM) comprised of a 2D array of optically-controlled semiconductor nanocavities can have a fast modulation rate, small pixel pitch, low pixel tuning energy, and millions of pixels. Incoherent pump light from a control projector tunes each PhC cavity via the free-carrier dispersion effect, thereby modulating the coherent probe field emitted from the cavity array. The use of high-Q/V semiconductor cavities enables energy-efficient all-optical control and eliminates the need for individual tuning elements, which degrade the performance and limit the size of the optical surface. Using this technique, an SLM with 106 pixels, micron-order pixel pitch, and GHz-order refresh rates could be realized with less than 1 W of pump power.
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公开(公告)号：US20220236113A1
公开(公告)日：2022-07-28
申请号：US17335017
申请日：2021-05-31
Applicant: Massachusetts Institute of Technology
Inventor： Jordan Goldstein , Christopher Louis Panuski , Dirk Robert ENGLUND
Abstract: Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.
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公开(公告)号：US20210255258A1
公开(公告)日：2021-08-19
申请号：US17188316
申请日：2021-03-01
Applicant: Massachusetts Institute of Technology
Inventor： John F. Barry , Erik R. Eisenach , Michael F. O'Keeffe , Jonah A. Majumder , Linh M. Pham , Isaac Chuang , Erik M. Thompson , Christopher Louis Panuski , Xingyu Zhang , Danielle A. Braje
Abstract: Microwave resonator readout of the cavity-spin interaction between a spin defect center ensemble and a microwave resonator yields fidelities that are orders of magnitude higher than is possible with optical readouts. In microwave resonator readout, microwave photons probe a microwave resonator coupled to a spin defect center ensemble subjected to a physical parameter to be measured. The physical parameter shifts the spin defect centers' resonances, which in turn change the dispersion and/or absorption of the microwave resonator. The microwave photons probe these dispersion and/or absorption changes, yielding a measurement with higher visibility, lower shot noise, better sensitivity, and higher signal-to-noise ratio than a comparable fluorescence measurement. In addition, microwave resonator readout enables coherent averaging of spin defect center ensembles and is compatible with spin systems other than nitrogen vacancies in diamond.
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公开(公告)号：US10962611B2
公开(公告)日：2021-03-30
申请号：US16551799
申请日：2019-08-27
Applicant: Massachusetts Institute of Technology
Inventor： John F. Barry , Erik R. Eisenach , Michael F. O'Keeffe , Jonah A. Majumder , Linh M. Pham , Isaac Chuang , Erik M. Thompson , Christopher Louis Panuski , Xingyu Zhang , Danielle A. Braje
Abstract: Microwave resonator readout of the cavity-spin interaction between a spin defect center ensemble and a microwave resonator yields fidelities that are orders of magnitude higher than is possible with optical readouts. In microwave resonator readout, microwave photons probe a microwave resonator coupled to a spin defect center ensemble subjected to a physical parameter to be measured. The physical parameter shifts the spin defect centers' resonances, which in turn change the dispersion and/or absorption of the microwave resonator. The microwave photons probe these dispersion and/or absorption changes, yielding a measurement with higher visibility, lower shot noise, better sensitivity, and higher signal-to-noise ratio than a comparable fluorescence measurement. In addition, microwave resonator readout enables coherent averaging of spin defect center ensembles and is compatible with spin systems other than nitrogen vacancies in diamond.
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