公开(公告)号：US11181454B2

公开(公告)日：2021-11-23

申请号：US16258295

申请日：2019-01-25

Applicant: Massachusetts Institute of Technology

Inventor： Robin Singh ,  Anuradha M. Agarwal ,  Danhao Ma ,  Peter X. Su ,  Brian W. Anthony

IPC: G01N15/02 ,  G01N21/552 ,  G01N33/543 ,  G01N21/39 ,  G01N15/06 ,  G01N21/77 ,  G01N21/45 ,  G02B6/12 ,  G01N15/00 ,  G02B6/293

Abstract: A photonic aerosol particle sensor includes a plurality of photonic waveguide resonators each having a photonic waveguide disposed along a separate waveguide resonator path and each photonic waveguide having a lateral waveguide width different than the waveguide width of other photonic waveguide resonators in the plurality. All waveguides in the plurality of photonic waveguide resonators have a common vertical thickness and are formed of a common photonic waveguide material. An optical input connection couples light into the waveguide resonators. A particle input conveys aerosol particles toward the waveguide resonators and an aerosol particle output conveys aerosol particles away from the waveguide resonators. At least one optical output connection is optically connected to accept light out of the plurality of photonic waveguide resonators to provide a signal indicative of at least one characteristic of the aerosol particles to be analyzed.

公开(公告)号：US11686659B2

公开(公告)日：2023-06-27

申请号：US17507563

申请日：2021-10-21

Applicant: Massachusetts Institute of Technology

Inventor： Robin Singh ,  Anuradha M. Agarwal ,  Danhao Ma ,  Peter X. Su ,  Brian W. Anthony

IPC: G01N15/02 ,  G01N21/552 ,  G01N33/543 ,  G01N21/39 ,  G01N15/06 ,  G01N21/77 ,  G01N21/45 ,  G02B6/12 ,  G01N15/00 ,  G02B6/293

CPC classification number: G01N15/0205 ,  G01N15/06 ,  G01N21/39 ,  G01N21/45 ,  G01N21/552 ,  G01N21/7703 ,  G01N21/7746 ,  G01N33/543 ,  G01N33/54373 ,  G02B6/12004 ,  G02B6/12007 ,  G01N2015/0046 ,  G01N2015/03 ,  G01N2015/0693 ,  G02B6/2938 ,  G02B6/29338

Abstract: A photonic aerosol particle sensor includes a microfluidic sensor chamber in which is disposed a plurality of photonic waveguide resonators each having a photonic waveguide on an underlying substrate, along a separate waveguide resonator path with a lateral width different than that of other photonic waveguide resonators. All waveguides in the plurality have a common vertical thickness of a common waveguide material having a refractive index that is larger than that of the underlying substrate material. An optical input connection couples light into the waveguide resonators. An aerosol particle input fluidically connected to the microfluidic chamber fluidically conveys aerosol particles to the chamber, and an aerosol particle output fluidically connected to the microfluidic chamber fluidically conveys aerosol particles out of the chamber. At least one optical output connection accepts light out of the plurality of photonic waveguide resonators to provide a signal indicative of at least one aerosol particle characteristic.

公开(公告)号：US20190234850A1

公开(公告)日：2019-08-01

申请号：US16258295

申请日：2019-01-25

Applicant: Massachusetts Institute of Technology

Inventor： Robin Singh ,  Anuradha M. Agarwal ,  Danhao Ma ,  Peter X. Su ,  Brian W. Anthony

IPC: G01N15/02 ,  G02B6/12

CPC classification number: G01N15/0205 ,  G01N15/06 ,  G01N21/39 ,  G01N21/45 ,  G01N21/552 ,  G01N21/7703 ,  G01N21/7746 ,  G01N33/543 ,  G01N33/54373 ,  G01N2015/0046 ,  G01N2015/03 ,  G01N2015/0693 ,  G02B6/12004 ,  G02B6/12007 ,  G02B6/29338 ,  G02B6/2938

Abstract: A photonic aerosol particle sensor includes a plurality of photonic waveguide resonators each having a photonic waveguide disposed along a separate waveguide resonator path and each photonic waveguide having a lateral waveguide width different than the waveguide width of other photonic waveguide resonators in the plurality. All waveguides in the plurality of photonic waveguide resonators have a common vertical thickness and are formed of a common photonic waveguide material. An optical input connection couples light into the waveguide resonators. A particle input conveys aerosol particles toward the waveguide resonators and an aerosol particle output conveys aerosol particles away from the waveguide resonators. At least one optical output connection is optically connected to accept light out of the plurality of photonic waveguide resonators to provide a signal indicative of at least one characteristic of the aerosol particles to be analyzed.