公开(公告)号：US09036024B2

公开(公告)日：2015-05-19

申请号：US13190149

申请日：2011-07-25

Applicant: Mathieu Perriollat

Inventor： Mathieu Perriollat

IPC: H04N7/18 ,  G01N21/956 ,  G01B11/25 ,  G01N21/88 ,  G06T1/00 ,  G01R31/308

CPC classification number: G01N21/956 ,  G01B11/2545 ,  G01N21/8851 ,  G01N2021/95638 ,  G01N2201/0635 ,  G01R31/308 ,  G06T1/0007

Abstract: An installation of optical inspection of integrated circuits or the like, comprising: a planar conveyor along a first direction of the objects to be analyzed and a photographic system placed above an area of the conveyor and in a fixed position with respect thereto, the photographic system comprising at least one first set of digital cameras each comprising an orthogonal array of pixels, said cameras being aligned in a second direction different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a first angle with the first direction.

Abstract translation: 集成电路等的光学检查的安装，包括：沿着要分析的物体的第一方向的平面传送器和放置在传送器的区域上方并处于相对于其的固定位置的照相系统，照相系统 包括至少一个第一组数字照相机，每个第一组数字照相机各自包括正交阵列的像素，所述相机在与第一方向不同的第二方向上对准，所述照相机全部定向成使得它们的像素阵列的正交方向之一形成第一 与第一个方向成角度。

公开(公告)号：US09170207B2

公开(公告)日：2015-10-27

申请号：US13190195

申请日：2011-07-25

Applicant: Mathieu Perriollat

Inventor： Mathieu Perriollat

IPC: H04N7/18 ,  G01N21/88 ,  G01B11/25 ,  G01N21/956 ,  G06T1/00 ,  G01R31/308

CPC classification number: G01N21/8851 ,  G01B11/2545 ,  G01N21/956 ,  G01N2201/0635 ,  G01R31/308 ,  G06T1/0007

Abstract: An installation of optical inspection of integrated circuits or the like includes a photographic system placed above a scene in a plane defined by a first and a second direction, the photographic system having several digital cameras each having an orthogonal array of pixels, all cameras having their respective optical axes inclined by a first angle with respect to a third direction perpendicular to the two others; and two projectors of determined patterns, these patterns being such that two straight lines projected by each of the projectors are aligned in the plane defined by the first two directions and are coplanar with a straight line interconnecting the optical centers of the two projectors.

Abstract translation: 集成电路等的光学检查的安装包括放置在由第一和第二方向限定的平面中的场景之上的摄影系统，该摄影系统具有多个数字照相机，每个摄像系统具有正交的像素阵列，所有照相机具有它们的 相应的光轴相对于垂直于另外两个的第三方向倾斜第一角度; 以及具有确定图案的两个投影仪，这些图案使得由每个投影仪投影的两条直线在由前两个方向限定的平面中对准，并且与连接两个投影仪的光学中心的直线共面。