公开(公告)号：US20150021474A1

公开(公告)日：2015-01-22

申请号：US13960393

申请日：2013-08-06

申请人： Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

发明人： Matthias FIRNKES ,  Stefan LANIO ,  Gerald SCHÖNECKER ,  Dieter WINKLER

IPC分类号： H01J37/21 ,  H01J37/147 ,  H01J37/10

CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。