公开(公告)号：US11709422B2

公开(公告)日：2023-07-25

申请号：US17024081

申请日：2020-09-17

Applicant: Meta Platforms Technologies, LLC

Inventor： Elliott Franke ,  Nihar Ranjan Mohanty ,  Ankit Vora ,  Austin Lane ,  Matthew E. Colburn

IPC: G03F7/00 ,  G03F7/09 ,  G03F7/11 ,  G02B27/01 ,  G03F7/12 ,  F21V8/00

CPC classification number: G03F7/0005 ,  G02B6/0016 ,  G02B6/0038 ,  G02B6/0065 ,  G02B27/0172 ,  G03F7/091 ,  G03F7/11 ,  G03F7/12 ,  G02B2027/0178

Abstract: Gray-tone lithography techniques for controlling the thickness profile of an overcoat layer on a surface-relief grating that has a non-uniform grating parameter (e.g., depth, duty cycle, or period), compensating for the non-uniform etch rate in a large area, defining etch/block regions, and/or controlling the thickness of the grating layer.

公开(公告)号：US11543584B2

公开(公告)日：2023-01-03

申请号：US17364678

申请日：2021-06-30

Applicant: META PLATFORMS TECHNOLOGIES, LLC

Inventor： Giuseppe Calafiore ,  Tingling Rao ,  Ankit Vora ,  Peter Topalian

IPC: G03F7/00 ,  F21V8/00

Abstract: The disclosure provides high refractive index ceramic material nanoimprint lithography (NIL) gratings having a relatively lower amount of carbon compared to traditional NIL gratings, and methods of making and using thereof, and devices including such gratings. The ceramic material includes one or more of titanium oxide, zirconium oxide, hafnium oxide, tungsten oxide, zinc tellurium, gallium phosphide, or any combination or derivative thereof.