公开(公告)号：US11709422B2

公开(公告)日：2023-07-25

申请号：US17024081

申请日：2020-09-17

Applicant: Meta Platforms Technologies, LLC

Inventor： Elliott Franke ,  Nihar Ranjan Mohanty ,  Ankit Vora ,  Austin Lane ,  Matthew E. Colburn

IPC: G03F7/00 ,  G03F7/09 ,  G03F7/11 ,  G02B27/01 ,  G03F7/12 ,  F21V8/00

CPC classification number: G03F7/0005 ,  G02B6/0016 ,  G02B6/0038 ,  G02B6/0065 ,  G02B27/0172 ,  G03F7/091 ,  G03F7/11 ,  G03F7/12 ,  G02B2027/0178

Abstract: Gray-tone lithography techniques for controlling the thickness profile of an overcoat layer on a surface-relief grating that has a non-uniform grating parameter (e.g., depth, duty cycle, or period), compensating for the non-uniform etch rate in a large area, defining etch/block regions, and/or controlling the thickness of the grating layer.

公开(公告)号：US11662584B2

公开(公告)日：2023-05-30

申请号：US17124807

申请日：2020-12-17

Applicant: Meta Platforms Technologies, LLC

Inventor： Hee Yoon Lee ,  Yu Shi ,  Elliott Franke

IPC: G02B27/01 ,  G02B6/34

CPC classification number: G02B27/0172 ,  G02B6/34 ,  G02B2027/0178

Abstract: A waveguide display includes a waveguide, an input coupler configured to couple display light into the waveguide, and a surface-relief grating on the waveguide and configured to couple the display light out of the waveguide towards an eyebox of the waveguide display on a first side of the waveguide. The surface-relief grating is formed in a plurality of grating layers having uniform or non-uniform thickness profiles. The plurality of grating layers is characterized by a refractive index modulation that increases and then decreases as the distance of the grating layer from the waveguide increases.

公开(公告)号：US20220317346A1

公开(公告)日：2022-10-06

申请号：US17216969

申请日：2021-03-30

Applicant: META PLATFORMS TECHNOLOGIES, LLC

Inventor： Elliott Franke ,  Nihar Ranjan Mohanty ,  Vivek Gupta ,  Geraud Jean-Michel Dubois

IPC: G02B5/18

Abstract: A multilayer architecture includes an amorphous optical layer, a crystalline optical layer overlying the amorphous optical layer, and a barrier layer located between the amorphous optical layer and the crystalline optical layer. The barrier layer may be configured to mediate the structure of the later-formed amorphous optical layer. For instance, a low absorption barrier layer may be formed over the crystalline optical layer within the multilayer architecture and accordingly inhibit crystallization within a subsequently formed optical layer, thus providing phase separation between the neighboring optical layers and a desired refractive index gradient within the multilayer architecture without adversely affecting the optical path length therethrough. Such a multilayer structure may be configured as a light retention layer, antireflective coating, bandpass filter, etc.