公开(公告)号：US20070104864A1

公开(公告)日：2007-05-10

申请号：US11273268

申请日：2005-11-10

申请人： Michael Boroson ,  E. Brandt

发明人： Michael Boroson ,  E. Brandt

IPC分类号： C23C16/00 ,  B05D3/00 ,  B05D3/12

CPC分类号： C23C14/246 ,  C23C14/12 ,  H01L51/001 ,  H01L51/56

摘要： A method for vaporizing particulate material and depositing it onto a surface to form a layer, includes providing a supply of particulate material in a replenishment container, the replenishment container having a sealed interface fitting; mounting the replenishment container to a supply hopper defining at least one feed opening, and breaking the seal at the interface fitting; transferring particulate material from the replenishment container to the supply hopper; and transferring such particulate material through the feed opening along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer.

摘要翻译： 一种用于蒸发颗粒材料并将其沉积在表面上以形成层的方法，包括在补充容器中提供颗粒材料的供应，所述补充容器具有密封的界面配件; 将所述补充容器安装到限定至少一个进料口的供料斗中，并且在所述界面配件处破坏所述密封; 将颗粒材料从补充容器转移到供料斗; 并且将这样的颗粒材料沿着进料通道传送到蒸发区，其中至少部分颗粒物质被蒸发并输送到表面以形成该层。

公开(公告)号：US20060216408A1

公开(公告)日：2006-09-28

申请号：US11091428

申请日：2005-03-28

申请人： Michael Boroson ,  Kelvin Nguyen

发明人： Michael Boroson ,  Kelvin Nguyen

IPC分类号： B05D5/12

CPC分类号： H01L51/0013 ,  C09K11/06 ,  C09K2211/1007 ,  C09K2211/1011 ,  C09K2211/1014 ,  C09K2211/1029 ,  C09K2211/1033 ,  C09K2211/1037 ,  C09K2211/104 ,  C09K2211/1044 ,  C09K2211/1088 ,  C09K2211/185 ,  C23C14/048 ,  H01L51/001 ,  H01L51/0059 ,  H01L51/0081 ,  H01L51/56 ,  H05B33/14

摘要： In a method of making a device including forming an organic layer over a substrate, includes providing a donor element having top and bottom surfaces and coating the top surface of the donor element with organic material; moving the coated donor element to a transfer position in relation to the substrate in a controlled environment; and selecting a pressure difference at the transfer position between the top and bottom surfaces of the donor element to maintain a spaced position between the top surface of the donor element and the substrate wherein the selected pressure difference is such that the performance of the device is within an acceptable range.

摘要翻译： 在制造包括在衬底上形成有机层的器件的方法中，包括提供具有顶表面和底表面的施主元件，并用有机材料涂覆施主元件的顶表面; 在受控的环境中将涂覆的施主元件相对于衬底移动到转移位置; 并且在施主元件的顶表面和底表面之间的转移位置处选择压力差以保持施主元件的顶表面和基底之间的间隔位置，其中所选择的压力差使得该器件的性能在 一个可接受的范围。

公开(公告)号：US20060099345A1

公开(公告)日：2006-05-11

申请号：US10984667

申请日：2004-11-09

申请人： Jeremy Grace ,  Michael Long ,  Michael Boroson ,  Jinmei Zhang ,  Bruce Koppe ,  Thomas Palone ,  Neil Redden

发明人： Jeremy Grace ,  Michael Long ,  Michael Boroson ,  Jinmei Zhang ,  Bruce Koppe ,  Thomas Palone ,  Neil Redden

IPC分类号： B05D5/06 ,  C23C16/00

CPC分类号： C23C14/542 ,  C23C14/12 ,  C23C14/24 ,  H01L51/001 ,  H01L51/56

摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.

摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。

公开(公告)号：US20050280362A1

公开(公告)日：2005-12-22

申请号：US10871190

申请日：2004-06-18

申请人： Joel Shore ,  Dustin Winters ,  Michael Boroson

发明人： Joel Shore ,  Dustin Winters ,  Michael Boroson

IPC分类号： H01L51/52 ,  H05B33/00

CPC分类号： H01L51/5265 ,  Y10S428/917

摘要： An OLED device that has at least one first pixel that emits light in a desired region of the visible light spectrum including one or more light-emitting layer(s) and a reflector and a semitransparent reflector respectively disposed on opposite sides of the light-emitting layer(s) and arranged to resonate light produced by such layers such that the light produced by the at least one first pixel has a spectral component in the desired region of the visible light spectrum. The device also includes at least one layer disposed at a predetermined position between the reflector and semitransparent reflector which undesirably absorbs light in at least a portion of the desired region of the visible light spectrum, and wherein the predetermined position of the undesirably absorbing layer is selected to reduce the absorption of such layer in the desired region of the visible light spectrum.

摘要翻译： 一种OLED器件，其具有至少一个第一像素，其在可见光谱的期望区域中发射光，包括一个或多个发光层和分别设置在发光的相对侧上的反射器和半透明反射器 并且布置成使由这些层产生的光共振，使得由至少一个第一像素产生的光在可见光谱的期望区域中具有光谱分量。 该装置还包括设置在反射器和半透明反射器之间的预定位置处的至少一层，其不期望地吸收可见光谱的期望区域的至少一部分中的光，并且其中选择不希望的吸收层的预定位置 以减少在可见光谱的所需区域中这种层的吸收。

公开(公告)号：US20050048862A1

公开(公告)日：2005-03-03

申请号：US10647499

申请日：2003-08-25

申请人： Giana Phelan ,  Michael Boroson ,  Lee Tutt

发明人： Giana Phelan ,  Michael Boroson ,  Lee Tutt

IPC分类号： H01L21/66 ,  H01L51/00 ,  H01L51/30 ,  H01L51/40 ,  H01L51/50 ,  H01L51/56 ,  B05D5/12 ,  G03F7/34

CPC分类号： H01L51/56 ,  H01L51/0051 ,  H01L51/0052 ,  H01L51/0062 ,  H01L51/0077 ,  H01L51/0081 ,  H01L51/0084 ,  H01L51/0085 ,  H01L51/0089 ,  H01L2251/568

摘要： A method of making an OLED device that corrects for potential defect(s) identified in one processing station by adjusting a subsequent processing station includes processing an OLED substrate by adding at least one organic layer and measuring in-situ one or more parameters associated with such organic layer to produce a signal representative of potential defect(s) in a produced OLED device, and adjusting in a subsequent processing station in response to the signal to change the formation of a subsequent organic layer added to the OLED device to compensate for the potential defect(s).

摘要翻译： 通过调整随后的处理站来制造用于校正在一个处理站中识别的潜在缺陷的OLED器件的方法包括通过添加至少一个有机层并原位测量一个或多个与此相关联的参数来处理OLED衬底 有机层以产生表示所制造的OLED器件中的潜在缺陷的信号，并且响应于信号调整后续处理站，以改变添加到OLED器件中的后续有机层的形成以补偿电位 缺陷。

公开(公告)号：US20050012449A1

公开(公告)日：2005-01-20

申请号：US10620670

申请日：2003-07-16

申请人： Michael Boroson ,  Giana Phelan

发明人： Michael Boroson ,  Giana Phelan

IPC分类号： H01L27/32 ,  H01L51/00 ,  H01L51/30 ,  H01L51/40 ,  H01L51/56 ,  H01J1/62

CPC分类号： H01L27/3244 ,  C23C14/048 ,  H01L27/3281 ,  H01L51/0013 ,  H01L51/0052 ,  H01L51/0059 ,  H01L51/0062 ,  H01L51/0081 ,  H01L51/0084 ,  H01L51/0085 ,  H01L51/0089 ,  H01L51/56

摘要： A method of improving the aperture ratio or resolution of an OLED device which includes a plurality of laterally spaced electrodes and one or more electrodes vertically spaced apart from the plurality of laterally spaced electrodes. The improvement includes providing a donor having transferable organic material in spaced relationship with the laterally spaced electrodes, and illuminating the donor with radiation in patterns corresponding to the area of the laterally spaced electrodes to transfer organic material over the laterally spaced electrodes such that substantially all of the organic material is transferred and the edge taper region of the organic material is less than 8 microns thereby permitting the reduction in spacing between the laterally spaced electrodes and improvement in the aperture ratio, the resolution, or both, of the OLED device.

摘要翻译： 一种改善OLED器件的开口率或分辨率的方法，其包括多个横向隔开的电极和与多个横向间隔开的电极垂直间隔开的一个或多个电极。 该改进包括提供具有与横向隔开的电极间隔开的可转移有机材料的供体，并且以对应于横向间隔开的电极的区域的图案的辐射照射供体，以将有机材料转移到横向间隔开的电极上，使得基本上全部 有机材料被转移并且有机材料的边缘锥形区域小于8微米，从而允许减小横向间隔开的电极之间的间隔，并提高OLED器件的开口率，分辨率或两者。

公开(公告)号：US20070231490A1

公开(公告)日：2007-10-04

申请号：US11392004

申请日：2006-03-29

申请人： Michael Boroson ,  Michael Long

发明人： Michael Boroson ,  Michael Long

IPC分类号： C23C16/00

CPC分类号： C23C14/24 ,  C23C14/06 ,  C23C14/246 ,  C23C14/548

摘要： A method for mixing and depositing first and second separate vaporized materials onto a substrate surface to form a layer wherein the first material includes a metal and the second material is non-metallic, including providing a mixing manifold disposed so that vaporized materials are deliverable onto the substrate surface; providing first and second heating elements for separately vaporizing the first and second materials, the heating elements being disposed so that the vaporized materials are deliverable into the mixing manifold; and metering at a controlled rate the first and second materials to the first and second heating elements respectively, so that vaporized materials, including the metal, are delivered to the mixing manifold where they are mixed and subsequently deposited onto the substrate surface to form the layer including the metal.

摘要翻译： 一种用于将第一和第二分离的汽化材料混合并沉积到衬底表面上以形成层的方法，其中所述第一材料包括金属，所述第二材料是非金属的，包括提供混合歧管，使得蒸发的材料可输送到 基材表面; 提供用于单独蒸发所述第一和第二材料的第一和第二加热元件，所述加热元件设置成使得所述蒸发的材料可输送到所述混合歧管中; 并且以受控的速率将第一和第二材料以第一和第二材料分别计量到第一和第二加热元件，使得包括金属的气化材料被输送到混合歧管，在混合歧管中它们被混合并随后沉积到基底表面上以形成层 包括金属。

公开(公告)号：US20070104890A1

公开(公告)日：2007-05-10

申请号：US11272320

申请日：2005-11-10

申请人： Michael Boroson ,  Ronald Cok ,  Michael Long ,  Dennis Freeman ,  Jeremy Grace

发明人： Michael Boroson ,  Ronald Cok ,  Michael Long ,  Dennis Freeman ,  Jeremy Grace

IPC分类号： C23C16/00 ,  B05D3/06

CPC分类号： C23C14/246 ,  C23C14/12 ,  C23C14/564

摘要： A method for evaporating a plurality of purified organic materials in a thermal physical vapor deposition system, comprising the steps of: mixing predetermined amounts of first and second organic materials to form a mixture of materials at a predetermined ratio; processing at least one of the organic materials at less than the sublimation temperature of the at least one of the organic materials before or after mixing to remove a first contaminant, wherein if processing is after mixing, the processing temperature is lower than the sublimation temperature of each of the organic materials; providing a thermal physical vapor deposition source; transferring the purified mixture of organic materials into the thermal physical vapor deposition source while maintaining the purified mixture of organic materials in a controlled, contaminant-free environment; and using the source to evaporate the purified mixture of organic materials.

摘要翻译： 一种用于在热物理气相沉积系统中蒸发多个纯化的有机材料的方法，包括以下步骤：混合预定量的第一和第二有机材料以形成预定比例的材料混合物; 在混合之前或之后以少于有机材料的升华温度处理至少一种有机材料以除去第一污染物，其中如果在混合后进行处理，则处理温度低于 每种有机材料; 提供热物理气相沉积源; 将有机材料的纯化混合物转移到热物理气相沉积源中，同时将有机材料的纯化混合物保持在受控的无污染环境中; 并使用源蒸发有机材料的纯化混合物。

公开(公告)号：US20060199475A1

公开(公告)日：2006-09-07

申请号：US11071702

申请日：2005-03-03

申请人： Ronald Cok ,  Timothy Tredwell ,  Dustin Winters ,  Andrea Rivers ,  Michael Boroson

发明人： Ronald Cok ,  Timothy Tredwell ,  Dustin Winters ,  Andrea Rivers ,  Michael Boroson

IPC分类号： B24C1/00

CPC分类号： H01L51/0017 ,  B23K26/12 ,  B23K26/1224 ,  B23K26/123 ,  B23K26/16 ,  H01L51/56

摘要： A method and apparatus for forming vias in one or more layers, comprising providing a vacuum chamber, one or more beams in the vacuum chamber. The array of directed beams located in alignment with a layer for ablating one or more areas of the layer for forming vias. A cold trap is also provided in the vacuum chamber that is in fixed alignment with respect to the one or more beams such that the ablated material condenses upon the cold trap at the time and location when the one or more vias is being formed.

摘要翻译： 一种用于在一个或多个层中形成通孔的方法和装置，包括提供真空室，真空室中的一个或多个梁。 定向束的阵列与用于烧蚀用于形成通孔的层的一个或多个区域的层对准。 在真空室中还设有冷阱，该真空室相对于一个或多个梁固定对准，使得当形成一个或多个通孔时，消融的材料在冷阱处凝结在时间和位置。

公开(公告)号：US20060099344A1

公开(公告)日：2006-05-11

申请号：US10984095

申请日：2004-11-09

申请人： Michael Boroson ,  Michael Long ,  Jeremy Grace ,  Jinmei Zhang ,  Bruce Koppe ,  Thomas Palone ,  Neil Redden

发明人： Michael Boroson ,  Michael Long ,  Jeremy Grace ,  Jinmei Zhang ,  Bruce Koppe ,  Thomas Palone ,  Neil Redden

IPC分类号： B05D5/06 ,  C23C16/00

CPC分类号： C23C14/542 ,  C23C14/12 ,  C23C14/246 ,  H01L51/001

摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.

摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。