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公开(公告)号：US09169975B2
公开(公告)日：2015-10-27
申请号：US13597043
申请日：2012-08-28
申请人： Michael Christopher Sarin , Rafael Mendez , Gregory M. Bartlett , Eric Hill , Keith R. Lawson , Andy Rosser
发明人： Michael Christopher Sarin , Rafael Mendez , Gregory M. Bartlett , Eric Hill , Keith R. Lawson , Andy Rosser
CPC分类号： F17D1/00 , G01F25/00 , Y02E60/34 , Y10T137/0324 , Y10T137/7722
摘要： A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
摘要翻译： 公开了一种用于验证气体通过质量流量控制器的流量的方法和系统，例如与用于半导体或太阳能电池制造的工具一起使用的质量流量控制器。 为了验证由质量流量控制器测量的质量流量，通过质量流量控制器的气体也通过质量流量计。 将通过质量流量控制器的测量流量与通过质量流量计的测量流量进行比较，并确定两个测量流量之间的任何差异。 根据任何差异的大小，可以改变气体流向质量流量控制器的流量。
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公开(公告)号：US20140060147A1
公开(公告)日：2014-03-06
申请号：US13597043
申请日：2012-08-28
申请人： Michael Christopher Sarin , Rafael Mendez , Gregory Bartlett , Eric Hill , Keith R. Lawson , Andy Rosser
发明人： Michael Christopher Sarin , Rafael Mendez , Gregory Bartlett , Eric Hill , Keith R. Lawson , Andy Rosser
CPC分类号： F17D1/00 , G01F25/00 , Y02E60/34 , Y10T137/0324 , Y10T137/7722
摘要： A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
摘要翻译： 公开了一种用于验证气体通过质量流量控制器的流量的方法和系统，例如与用于半导体或太阳能电池制造的工具一起使用的质量流量控制器。 为了验证由质量流量控制器测量的质量流量，通过质量流量控制器的气体也通过质量流量计。 将通过质量流量控制器的测量流量与通过质量流量计的测量流量进行比较，并确定两个测量流量之间的任何差异。 根据任何差异的大小，可以改变气体流向质量流量控制器的流量。
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公开(公告)号：US10520400B1
公开(公告)日：2019-12-31
申请号：US16136047
申请日：2018-09-19
申请人： Rodolfo J. Romanach , Rafael Mendez
发明人： Rodolfo J. Romanach , Rafael Mendez
摘要： A device for obtaining samples from a flowing powder stream and performing their immediate analysis using a spectroscopic method is provided. Systematic sample size reduction is achieved to provide representative samples and their immediate (real-time) analysis. The powder blends may come from pharmaceutical, vitamin and nutraceutical products, which must fulfill blend homogeneity requirements. All parts of the batch will have the same probability of being selected as a sample. Samples are obtained without disturbing or changing the composition of the powder blend during the sampling process. Unlike the sample thief commonly used in the pharmaceutical industry, the device of the invention does not disturb the powder blend and does not change the properties of the powder blend during the sampling.
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