公开(公告)号：US20070131173A1

公开(公告)日：2007-06-14

申请号：US11668409

申请日：2007-01-29

申请人： Michael Halpin ,  Mark Hawkins ,  Derrick Foster ,  Robert Vyne ,  John Wengert ,  Cornelius van der Jeugd ,  Loren Jacobs ,  Frank Van Bilsen ,  Matthew Goodman ,  Hartmann Glenn ,  Jason Layton

发明人： Michael Halpin ,  Mark Hawkins ,  Derrick Foster ,  Robert Vyne ,  John Wengert ,  Cornelius van der Jeugd ,  Loren Jacobs ,  Frank Van Bilsen ,  Matthew Goodman ,  Hartmann Glenn ,  Jason Layton

IPC分类号： C23C16/00

CPC分类号： C23C16/4586 ,  H01L21/68735 ,  H01L21/6875 ,  H01L21/68792 ,  H01L2924/0002 ,  H01L2924/00

摘要： A wafer support system comprising a susceptor having top and bottom sections and gas flow passages therethrough. One or more spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the susceptor and travels through the gas flow passages to exit in at least one circular array of outlets in the recess and underneath the spaced wafer. The sweep gas travels radially outward between the susceptor and wafer to prevent back-side contamination of the wafer. The gas is delivered through a hollow drive shaft and into a multi-armed susceptor support underneath the susceptor. The support arms conduct the sweep gas from the drive shaft to the gas passages in the susceptor. The gas passages are arranged to heat the sweep gas prior to delivery underneath the wafer. Short purge channels may be provided to deliver some of the sweep gas to regions surrounding the spacers to cause a continuous flow of protective purge gas around the spacers.

摘要翻译： 一种晶片支撑系统，其包括具有顶部和底部部分以及穿过其的气体流动通道的基座。 从形成在基座的顶部的凹部突出的一个或多个间隔件相对于凹部以间隔的关系支撑晶片。 吹扫气体被引入到基座的底部，并且穿过气体流动通道，以在凹槽中的至少一个圆形阵列的出口和在间隔开的晶片之下排出。 吹扫气体在基座和晶片之间径向向外行进，以防止晶片的背面污染。 气体通过中空驱动轴输送到基座下方的多臂感受器支架中。 支撑臂将吹扫气体从驱动轴传导到基座中的气体通道。 气体通道被布置成在散布在晶片之下之前加热吹扫气体。 可以提供短的吹扫通道以将一些吹扫气体输送到围绕间隔物的区域，以引起隔离物周围的保护性吹扫气体的连续流动。

公开(公告)号：US20190314704A1

公开(公告)日：2019-10-17

申请号：US16383824

申请日：2019-04-15

申请人： Jason Layton

发明人： Jason Layton

IPC分类号： A63B71/06

摘要： An event management system and method for organizing and facilitating wrestling matches, as well as better matching of the wrestlers, utilizing storing and displaying results and ratings from wrestling events, analyzing the results and ratings and generating Elo-derived ratings and weigh-adjusted Elo-derived ratings for participants, and predicting the probability that a given participant will defeat another using the accurate Elo-derived ratings and weigh-adjusted Elo-derived ratings.