公开(公告)号：US5098190A

公开(公告)日：1992-03-24

申请号：US390192

申请日：1989-08-07

申请人： Geert J. Wijntjes ,  Michael Hercher

发明人： Geert J. Wijntjes ,  Michael Hercher

IPC分类号： G01D5/38

CPC分类号： G01D5/38

摘要： A metrology system includes means for generating an interference fringe pattern as a function of a parameter to be measured, transducer apparatus for simultaneously generating three intensity-modulated optical signals, I.sub.R, I.sub.S and I.sub.T, that are related to the interference fringe pattern; signal processing apparatus for accurately determining an aspect of the interference fringe pattern from the three signals; means for accumulating phase information proportional to the aspect of the interference fringe pattern; and means for converting the accumulated phase and aspect information to desired outputs indicative of the parameter to be measured.

摘要翻译： 计量系统包括用于产生作为待测量参数的函数的干涉条纹图案的装置，用于同时产生与干涉条纹图案相关的三个强度调制光信号IR，IS和IT的换能器装置; 信号处理装置，用于从三个信号中精确地确定干涉条纹图案的一个方面; 用于累积与干涉条纹图案的方面成比例的相位信息的装置; 以及用于将累积相位和方位信息转换成指示要测量的参数的期望输出的装置。

公开(公告)号：US5812266A

公开(公告)日：1998-09-22

申请号：US573170

申请日：1995-12-15

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B11/03 ,  G01D5/26 ,  G01D5/28 ,  G01D5/30 ,  G11B5/48 ,  G11B5/55 ,  G11B5/596 ,  G11B21/08 ,  G01B11/14

CPC分类号： G11B5/59677 ,  G01D5/26 ,  G01D5/28 ,  G01D5/285 ,  G01D5/305 ,  G11B21/083 ,  G11B21/086 ,  G11B5/4826 ,  G11B5/5534

摘要： A device for measuring the displacement of a movable object includes a stationary light source that produces an incident light beam. A target feature, attached to, or integral with, the object, reflects the incident light beam. A stationary photodetector, spaced from the object, receives the reflected light beam and, in response thereto, produces an electric signal having a characteristic (such as amplituded) which is proportional to a received location on the photodetector of the reflected light beam and which represents a position of the object. An imaging lens receives the reflected light beam and focusses an image of the light source on the photodetector. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like image of the light source is focussed on the photodetector. The displacement sensor device is particularly useful in a disk drive servo system application.

公开(公告)号：US4823348A

公开(公告)日：1989-04-18

申请号：US235834

申请日：1988-08-18

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： H01S3/139 ,  H01S3/13

CPC分类号： H01S3/139

摘要： Frequency stabilization is disclosed for a laser device, wherein the laser tube is provided with end mirrors which are mounted in extensions at the respective ends of the laser tube. The laser tube extensions have reduced sections which are movable to allow adjustment of the end mirrors in the laser device. The reduced sections are preferably made of metallic material. The means to stabilize frequency provided is the application of heat or current or both to and around a reduced metallic section in the laser tube extension. This may be accomplished by the passing of current through a wire wrapped around the reduced metallic section. The passing of such current causes the reduced metallic section to contract and expand along an axis in line with the laser tube, and as well as a magnetic field is induced upon the gaseous medium within the laser tube. By such means controlled by suitable circuitry, laser frequency stabilization is accomplished. The means provided may be mounted on commercially available laser devices.

摘要翻译： 公开了用于激光装置的频率稳定化，其中激光管设置有端镜，其安装在激光管的相应端部处的延伸部中。 激光管延伸部具有减小的部分，其可移动以允许调整激光装置中的端镜。 还原部分优选地由金属材料制成。 提供稳定频率的手段是在激光管延伸部中向减少的金属部分施加热或电流或两者。 这可以通过电流通过缠绕在还原的金属部分周围的电线来实现。 这种电流的通过导致金属部分的减少沿与激光管一致的轴线收缩并且在激光管内的气体介质上产生磁场。 通过这种由合适的电路控制的手段，实现了激光频率稳定。 所提供的装置可以安装在市售的激光装置上。

公开(公告)号：US06459492B1

公开(公告)日：2002-10-01

申请号：US09380437

申请日：1999-12-06

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B1114

CPC分类号： G11B21/10 ,  G01D5/28 ,  G11B5/59677

摘要： A device for measuring the displacement of a movable object includes a stationary light source (10) that produces an incident light beam. A target feature (17), attached to, or integral with, the object, reflects the incident light beam and forms a first image of the light source in close proximity of the target feature. An imaging lens (26) receives the reflected light beam and reforms the first image of the light source as a second image on the photodetector (20). The photodetector, spaced from the object, receives the reflected light beam and produces an electric signal having a characteristic which is proportional to a received location on the photodetector of the second image and which represents a position of the object. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like first image of the light source is formed and reformed as a second image on the photodetector.

摘要翻译： 用于测量可移动物体的位移的装置包括产生入射光束的固定光源（10）。 与物体相连或与其成一体的目标特征（17）反映了入射光束，并形成了紧邻目标特征的光源的第一图像。 成像透镜（26）接收反射光束并将光源的第一图像作为第二图像重新设置在光电检测器（20）上。 与物体间隔开的光电检测器接收反射光束并产生具有与第二图像的光电检测器上的接收位置成比例的特征的电信号，该特征表示物体的位置。 目标特征包括反射光束的弯曲表面，使得形成光源的小的点状或线状的第一图像并将其重新形成为光电检测器上的第二图像。

公开(公告)号：US5530543A

公开(公告)日：1996-06-25

申请号：US271310

申请日：1994-07-06

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B9/02 ,  G01D5/38

CPC分类号： G01D5/38

摘要： A detector is described, intended for use in metrology systems of the type which produce interference fringe patterns which contain a phase which is characteristic of the parameter under measurement, particularly displacement or position. The detector is in the form of an array of elements whose outputs are electrically interconnected so as to form three or more signals displaced from one another in phase by a fixed amount. The detector is provided on a single monolithic, silicon substrate using microelectronics techniques.

摘要翻译： 描述了一种检测器，用于产生干涉条纹图案的测量系统，该测量系统包含测量参数特别是位移或位置特性的相位。 检测器是一组元件的形式，其输出电气互连，以便形成三个或更多个相位相移一定数量的信号。 使用微电子技术将检测器提供在单个单片硅衬底上。

公开(公告)号：US4655587A

公开(公告)日：1987-04-07

申请号：US781185

申请日：1985-09-25

申请人： Geert Wijntjes ,  Michael Hercher

发明人： Geert Wijntjes ,  Michael Hercher

IPC分类号： G01J3/453 ,  G01J3/45 ,  G01B9/02

CPC分类号： G01J3/4535

摘要： An improved mirror scan control for driving a movable mirror in an interferometer with a constant scan velocity comprises a closed loop servo control which provides constant velocity mirror scan in response to a phase comparison of a signal derived from the beat frequency of a two frequency laser beam passing through the interferometer and a selected frequency reference signal, wherein the difference in frequencies or beat frequency of the two frequency laser beam is stabilized at a specified difference in frequencies. The mirror scan control employs a phase lock control loop which locks the frequency of the referenced signal with the frequency of the signal derived from the laser beam to provide precise mirror velocity control.

摘要翻译： 用于以恒定扫描速度驱动干涉仪中的可移动反射镜的改进的反射镜扫描控制包括闭环伺服控制器，其响应于从两个频率激光束的拍频产生的信号的相位比较而提供恒定速度镜像扫描 通过干涉仪和选定的频率参考信号，其中两个频率激光束的频率或拍频的差异被稳定在特定的频率差。 镜像扫描控制采用锁相控制环路，其以参考信号的频率与从激光束得到的信号的频率进行锁定，以提供精确的镜像速度控制。

公开(公告)号：US06413702B1

公开(公告)日：2002-07-02

申请号：US09603981

申请日：2000-06-27

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G03H104

CPC分类号： G01D5/38 ,  G03H1/04 ,  G03H2001/043

摘要： A method for fabricating an error-free linear position encoder incorporates the generation of fringes on a holographic plate by the interference of light from two point sources. The fringes are projected onto a curved holographic plate without intervening optical elements, the curve being such that the fringes have a constant pitch along the surface of the plate. A methodology for generating such a curve includes the creation of a graphic representation of the hyperbolic fringes generated by the interference between two coherent point sources, which would fall on an appropriately curved holographic plate. A numerical technique derived from the graphic representation produces a “constant-pitch” curve such that all of the fringes projected onto the curve are equidistant. The holographic plate, coated with a photosensitive material, is fabricated or formed in the shape of the constant-pitch curve. After the plate is exposed to the interference fringe pattern, the plate is processed to produce a corresponding amplitude or phase structure on the plate. The plate is then flattened and used either as a precise linear encoder, or as a master from which precise linear encoders may be replicated.

摘要翻译： 用于制造无误差线性位置编码器的方法包括通过来自两个点源的光的干扰在全息板上产生条纹。 条纹被投影到没有中间的光学元件的弯曲全息板上，曲线使得边缘沿着板的表面具有恒定的间距。 用于产生这样的曲线的方法包括创建由两个相干点源之间的干涉产生的双曲线条的图形表示，这两个相干点源将落在适当弯曲的全息板上。 从图形表示得到的数值技术产生“恒定间距”曲线，使得投影到曲线上的所有条纹都是等距的。 涂有感光材料的全息板被制成或形成为恒定间距曲线的形状。 在板暴露于干涉条纹图案之后，对板进行处理以在板上产生相应的振幅或相位结构。 然后将板平坦化并用作精确的线性编码器，或者用作可以复制精确线性编码器的主机。

公开(公告)号：US5982494A

公开(公告)日：1999-11-09

申请号：US170815

申请日：1998-10-13

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B11/03 ,  G01D5/26 ,  G01D5/28 ,  G01D5/30 ,  G11B5/48 ,  G11B5/55 ,  G11B5/596 ,  G11B21/08 ,  G01B11/14

CPC分类号： G11B5/59677 ,  G01D5/26 ,  G01D5/28 ,  G01D5/285 ,  G01D5/305 ,  G11B21/083 ,  G11B21/086 ,  G11B5/4826 ,  G11B5/5534

摘要： A device for measuring the displacement of a movable object includes a stationary light source that produces an incident light beam. A target feature, attached to, or integral with, the object, reflects the incident light beam. A stationary photodetector, spaced from the object, receives the reflected light beam and, in response thereto, produces an electric signal having a characteristic (such as amplituded) which is proportional to a received location on the photodetector of the reflected light beam and which represents a position of the object. An imaging lens receives the reflected light beam and focusses an image of the light source on the photodetector. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like image of the light source is focussed on the photodetector. The displacement sensor device is particularly useful in a disk drive servo system application.

摘要翻译： 用于测量可移动物体的位移的装置包括产生入射光束的固定光源。 与物体相连或与其成一体的目标特征反映入射光束。 与物体间隔开的固定光电检测器接收反射光束，并响应于此产生具有与反射光束的光电检测器上的接收位置成比例的特征（例如，幅度）的电信号，并且代表 对象的位置。 成像透镜接收反射光束并将光源的图像聚焦在光电检测器上。 目标特征包括反射光束的弯曲表面，使得光源的小的点状或线状图像聚焦在光电检测器上。 位移传感器装置在盘驱动器伺服系统应用中特别有用。

公开(公告)号：US5886787A

公开(公告)日：1999-03-23

申请号：US872607

申请日：1997-06-10

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B11/00 ,  G01B11/03 ,  G01D5/26 ,  G01D5/28 ,  G01D5/30 ,  G11B5/48 ,  G11B5/55 ,  G11B5/596 ,  G11B21/08 ,  G11B21/10 ,  G01B11/14

CPC分类号： G01D5/26 ,  G01D5/28 ,  G01D5/285 ,  G01D5/305 ,  G11B21/083 ,  G11B21/086 ,  G11B5/4826 ,  G11B5/5534 ,  G11B5/59677

摘要： A device for measuring the displacement of a movable object includes a stationary light source that produces an incident light beam. A target feature, attached to, or integral with, the object, reflects the incident light beam and forms a first image of the light source in close proximity of the target feature. An imaging lens receives the reflected light beam and reforms the first image of the light source as a second image on the photodetector. The photodetector, spaced from the object, receives the reflected light beam and, in response thereto, produces an electric signal having a characteristic (such as amplitude) which is proportional to a received location on the photodetector of the second image and which represents a position of the object. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like first image of the light source is formed and reformed as a second image on the photodetector. The displacement sensor device is particularly useful in a disk drive servo system application. The target feature is formed by ruling a groove within a surface of the object.

摘要翻译： 用于测量可移动物体的位移的装置包括产生入射光束的固定光源。 与物体相连或与其成一体的目标特征反映了入射光束，并形成了靠近目标特征的光源的第一图像。 成像透镜接收反射光束，并将光源的第一图像作为第二图像重新设置在光电检测器上。 与物体间隔开的光电检测器接收反射光束，并且响应于此产生具有与第二图像的光电检测器上的接收位置成比例的特征（例如振幅）的电信号，并且表示位置 的对象。 目标特征包括反射光束的弯曲表面，使得形成光源的小的点状或线状的第一图像并将其重新形成为光电检测器上的第二图像。 位移传感器装置在盘驱动器伺服系统应用中特别有用。 目标特征是通过在对象的表面内划出凹槽来形成的。

公开(公告)号：US5835224A

公开(公告)日：1998-11-10

申请号：US820280

申请日：1997-03-18

申请人： Michael Hercher

发明人： Michael Hercher

IPC分类号： G01B11/03 ,  G01D5/26 ,  G01D5/28 ,  G01D5/30 ,  G11B5/48 ,  G11B5/55 ,  G11B5/596 ,  G11B21/08 ,  G01B11/14

CPC分类号： G11B5/59677 ,  G01D5/26 ,  G01D5/28 ,  G01D5/285 ,  G01D5/305 ,  G11B21/083 ,  G11B21/086 ,  G11B5/4826 ,  G11B5/5534

摘要： A device for measuring the displacement of a movable object includes a stationary light source that produces an incident light beam. A target feature, attached to, or integral with, the object, reflects the incident light beam. A stationary photodetector, spaced from the object, receives the reflected light beam and, in response thereto, produces an electric signal having a characteristic (such as amplituded) which is proportional to a received location on the photodetector of the reflected light beam and which represents a position of the object. An imaging lens receives the reflected light beam and focusses an image of the light source on the photodetector. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like image of the light source is focussed on the photodetector. The displacement sensor device is particularly useful in a disk drive servo system application.