Optical arrangement
    1.
    发明授权
    Optical arrangement 失效
    光学布置

    公开(公告)号:US4854688A

    公开(公告)日:1989-08-08

    申请号:US181612

    申请日:1988-04-14

    IPC分类号: G02B27/00 G02B27/01

    摘要: A compact optical arrangement for transfer of large field of view images to the pupil of a viewer, said optical arrangement including a cooperative collimator/combiner and ball lens, wherein the ball lens is positioned at the location of the image of said pupil formed by said collimator/combiner.

    摘要翻译: 一种紧凑的光学装置,用于将大视场图像传送到观察者的瞳孔,所述光学装置包括协作准直器/组合器和球透镜,其中球透镜位于由所述光学元件形成的所述瞳孔的图像的位置 准直器/组合器。

    Zoom lens system
    2.
    发明授权
    Zoom lens system 失效
    变焦镜头系统

    公开(公告)号:US6078433A

    公开(公告)日:2000-06-20

    申请号:US002905

    申请日:1998-01-05

    IPC分类号: G02B15/163 G02B15/14

    CPC分类号: G02B15/163

    摘要: A compact zoom lens system having four injection-molded singlet lens elements is described. In one embodiment, the compact zoom lens system includes a lens carrier and first and second lens elements coupled to the lens carrier. One surface of the first or second lens elements having a diffractive optical surface disposed thereon to correct chromatic aberrations of light passing therethrough. The lens carrier moves the first and second lens elements axially to change a focal length of the lens system. Third and fourth lens elements are fixed on either side of the first and second lens elements. The lens carrier includes an aperture stop placed proximate to the diffractive optical surface to correct chromatic aberrations over an entire range of focal lengths. The first lens element is made out of flint-like material while the other lens elements are made out of crown-like material. Moreover, the zoom lens system includes an anti-aliasing surface on one of the lens elements to control aliasing effects. A plurality of light suppression elements are provided to suppress stray light paths from scattering across a detector array of the zoom lens system.

    摘要翻译: 描述了具有四个注射成型单透镜元件的紧凑变焦透镜系统。 在一个实施例中,紧凑型变焦透镜系统包括透镜载体和耦合到透镜载体的第一和第二透镜元件。 第一或第二透镜元件的一个表面具有设置在其上的衍射光学表面,以校正通过其中的光的色差。 透镜载体轴向移动第一和第二透镜元件以改变透镜系统的焦距。 第三和第四透镜元件固定在第一和第二透镜元件的两侧。 透镜载体包括靠近衍射光学表面放置的孔径光阑,以在整个焦距范围内校正色像差。 第一透镜元件由燧石状材料制成,而另一个透镜元件由冠状材料制成。 此外,变焦透镜系统包括在一个透镜元件上的抗锯齿表面以控制混叠效应。 提供多个光抑制元件以抑制杂散光路径散射在变焦透镜系统的检测器阵列上。

    Zoom lens system
    4.
    发明授权
    Zoom lens system 有权
    变焦镜头系统

    公开(公告)号:US06297913B1

    公开(公告)日:2001-10-02

    申请号:US09595955

    申请日:2000-06-19

    IPC分类号: G02B1514

    CPC分类号: G02B15/163

    摘要: A compact zoom lens system having four injection-molded singlet lens elements is described. In one embodiment, the compact zoom lens system includes a lens carrier and first and second lens elements coupled to the lens carrier. One surface of the first or second lens elements having a diffractive optical surface disposed thereon to correct chromatic aberrations of light passing therethrough. The lens carrier moves the first and second lens elements axially to change a focal length of the lens system. Third and fourth lens elements are fixed on either side of the first and second lens elements. The lens carrier includes an aperture stop placed proximate to the diffractive optical surface to correct chromatic aberrations over an entire range of focal lengths. The first lens element is made out of flint-like material while the other lens elements are made out of crown-like material. Moreover, the zoom lens system includes an anti-aliasing surface on one of the lens elements to control aliasing effects. A plurality of light suppression elements are provided to suppress stray light paths from scattering across a detector array of the zoom lens system.

    摘要翻译: 描述了具有四个注射成型单透镜元件的紧凑变焦透镜系统。 在一个实施例中,紧凑型变焦透镜系统包括透镜载体和耦合到透镜载体的第一和第二透镜元件。 第一或第二透镜元件的一个表面具有设置在其上的衍射光学表面,以校正通过其中的光的色差。 透镜载体轴向移动第一和第二透镜元件以改变透镜系统的焦距。 第三和第四透镜元件固定在第一和第二透镜元件的两侧。 透镜载体包括靠近衍射光学表面放置的孔径光阑,以在整个焦距范围内校正色像差。 第一透镜元件由燧石状材料制成,而另一个透镜元件由冠状材料制成。 此外,变焦透镜系统包括在一个透镜元件上的抗锯齿表面以控制混叠效应。 提供多个光抑制元件以抑制杂散光路径散射在变焦透镜系统的检测器阵列上。

    Arrangement for redefining an interface while maintaining backwards compatibility
    5.
    发明授权
    Arrangement for redefining an interface while maintaining backwards compatibility 有权
    重新定义界面的同时保持向后兼容性的安排

    公开(公告)号:US06574233B1

    公开(公告)日:2003-06-03

    申请号:US09289516

    申请日:1999-04-09

    IPC分类号: H04L1228

    CPC分类号: G06F13/38

    摘要: Disclosed is a way of enhancing capabilities of an interface, such as a communications bus (100), while retaining backwards compatibility of the interface. The bus has a plurality of signal lines (250) including critical control signal lines. Legacy devices (102-103) present a legacy interface to each other over the bus by communicating with each other via a legacy protocol (251) over the bus. Critical control signals of the legacy protocol are conveyed by the critical control signal lines. New devices (104-105) present an enhanced interface to each other over the same bus by communicating with each other via an enhanced protocol (252) over the bus. Control signals of the enhanced protocol are conveyed by signal lines other than the critical control signal lines for the legacy protocol, so that the critical control signal lines remain idle or invalid for the legacy protocol. The new devices signal to each other an intent to use the enhanced protocol by sending a signal on a signal line (253) that is not used by the legacy protocol. The new devices preferably can communicate on the bus via either protocol, and thus can communicate not only with each other but also with the legacy devices.

    摘要翻译: 公开了一种提高诸如通信总线(100)的接口的能力的方式,同时保持接口的向后兼容性。 总线具有包括关键控制信号线的多条信号线(250)。 传统设备(102-103)通过总线通过传统协议(251)通过总线彼此通信来呈现通过总线彼此的传统接口。 传统协议的关键控制信号由关键控制信号线传送。 新设备(104-105)通过总线上经由增强协议(252)彼此通信来在同一总线上呈现彼此的增强接口。 增强协议的控制信号由传统协议的关键控制信号线以外的信号线传送,使得关键控制信号线对于传统协议保持空闲或无效。 新设备通过在传统协议不使用的信号线(253)上发送信号来彼此发信号通知使用增强协议。 新设备优选地可以经由任一协议在总线上进行通信,并且因此可以不仅彼此通信,而且可以与传统设备进行通信。

    Selective memory duplication arrangement
    6.
    发明授权
    Selective memory duplication arrangement 有权
    选择性内存复制安排

    公开(公告)号:US06275915B1

    公开(公告)日:2001-08-14

    申请号:US09289240

    申请日:1999-04-09

    IPC分类号: G06F1120

    CPC分类号: G06F11/2069 G06F11/2084

    摘要: An active-standby dual processor (100) performs only selective memory duplication and does so via hardware (114, 117, 118) and the operating system (109). A page table (217) stores a shadowing flag (203) for each memory page of the active memory (116) of the processor (101) that indicates whether or not the corresponding page is shadowed. When the operating system allocates (302, 402) memory to a process—either statically at creation of the process or dynamically during execution of the process—it checks (304, 404) whether the process program's data statement indicates shadowing or whether the MALLOC request includes a segment selector that indicates shadowing; if so, it sets (306, 406) the allocated page's shadowing flag. When the active processor performs (600, 602) a write of its memory, a page table controller (117) checks (500-508) if the written page's shadowing flag is set. If so, an interprocessor interface (118) is caused (510, 604-606) to replicate the write on the standby processor's memory; if not, the write is not replicated.

    摘要翻译: 主动式待机双处理器(100)仅执行选择性存储器复制,并通过硬件(114,117,118)和操作系统(109)进行。 页表(217)存储用于处理器(101)的活动存储器(116)的每个存储器页面的阴影标记(203),其指示对应的页面是否被遮蔽。 当操作系统在进程的创建过程中静态地分配(302,402)存储器时,或者在执行过程期间动态地分配(302,402)存储器 - 它检查(304,404)过程程序的数据语句是否指示阴影或者是否是MALLOC请求 包括指示阴影的段选择器; 如果是,则设置(306,406)分配的页面的阴影标记。 当活动处理器执行(600,602)其存储器的写入时,页表控制器(117)检查(500-508)是否设置了写入页面的阴影标志。 如果是,则使处理器间接口(118)(510,606-606)复制备用处理器的存储器上的写入; 如果不是,则不复制该写入。

    Reflective fly's eye condenser for EUV lithography
    7.
    发明授权
    Reflective fly's eye condenser for EUV lithography 有权
    用于EUV光刻的反射式蝇眼聚光镜

    公开(公告)号:US06195201B1

    公开(公告)日:2001-02-27

    申请号:US09238976

    申请日:1999-01-27

    IPC分类号: G02B1700

    摘要: An illumination source or condenser used to project the image of a reticle onto a photosensitive substrate used in photolithography having a first reflective fly's eye, faceted mirror, or mirror array with predeterminedly positioned facets or elements and a second reflective fly's eye, faceted mirror, or mirror array having predeterminedly positioned facets or elements for creating a desired radiant intensity, pupil fill, or angular distribution. A source of extreme ultraviolet electromagnetic radiation is provided to a first fly's eye or mirror array with arcuate shaped facets or elements. The arcuate shaped facets or elements are positioned to create an image of the source at corresponding facet in a second reflective fly's eye or mirror array. A desired shape and irradiance together with a desired radiant intensity, pupil fill, or angular distribution is obtained. An arcuate illumination field or image is formed with high efficiency in a compact package. The illumination system of the present invention facilitates imaging of feature sizes as small as 0.025 microns, utilizing electromagnetic radiation in the extreme ultraviolet and ranging from 1 nanometer to approximately 157 nanometers.

    摘要翻译: 一种照明源或冷凝器,用于将掩模版的图像投影到用于光刻中的光敏基底上,该感光基底具有具有预定定位的小面或元件的第一反射蝇眼,分面镜或反射镜阵列,以及第二反射飞行的眼睛,刻面镜或 具有预定定位的小面或元件的反射镜阵列,用于产生期望的辐射强度,光瞳填充或角度分布。 向具有弧形小面或元件的第一蝇眼或反射镜阵列提供极紫外电磁辐射源。 弧形小面或元件被定位成在第二反射飞视眼或反射镜阵列中的相应小平面处产生源的图像。 获得期望的形状和辐照度以及期望的辐射强度,光瞳填充或角度分布。 在紧凑型封装中以高效率形成弓形照明场或图像。 本发明的照明系统利用极紫外线的电磁辐射并且范围从1纳米到大约157纳米的特征尺寸的小到0.025微米的成像。