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1.发明申请METHOD FOR IMPROVING A PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK WITH ANNEALING 有权用于改进带有退火的图形磁性记录磁盘的方法公开(公告)号：US20130270221A1
公开(公告)日：2013-10-17
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。
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2.发明授权Method for improving a patterned perpendicular magnetic recording disk with annealing 有权用于退火的图案化垂直磁记录盘的改进方法公开(公告)号：US09147423B2
公开(公告)日：2015-09-29
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。
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3.发明申请METHOD FOR MAKING A PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK HAVING A FePt or CoPt CHEMICALLY ORDERED RECORDING LAYER 有权制作具有FePt或CoPt化学订购记录层的图形磁性记录磁盘的方法公开(公告)号：US20130084387A1
公开(公告)日：2013-04-04
申请号：US13248086
申请日：2011-09-29
申请人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
发明人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
CPC分类号： G11B5/855
摘要： A method for making a bit-patterned-media (BPM) magnetic recording disk includes depositing a FePt (or CoPt) alloy recording layer, and then depositing a sealing layer on the FePt layer before high-temperature annealing. The high-temperature annealing causes the FePt to become substantially chemically-ordered in the L10 phase. After annealing, the sealing layer is removed. The sealing layer prevents nanoclustering and agglomeration of the FePt material at the surface of the FePt layer and the sealing layer, which would result in undesirable high surface roughness of the FePt, making patterning of the FePt layer difficult. The FePt layer can be patterned into the discrete islands for the BPM disk either before deposition of the sealing layer or after deposition and removal of the sealing layer. After patterning and removal of the sealing layer, the disk protective overcoat is deposited over the discrete data islands.
摘要翻译： 一种制造位图形介质（BPM）磁记录盘的方法包括沉积FePt（或CoPt）合金记录层，然后在高温退火之前在FePt层上沉积密封层。 高温退火使FePt在L10相中变得基本化学排序。 退火后，去除密封层。 密封层防止FePt材料在FePt层和密封层的表面的纳米聚集和聚集，这将导致FePt的不希望的高表面粗糙度，使得FePt层的图案化变得困难。 在沉积密封层之前或在沉积和去除密封层之后，FePt层可以被图案化成用于BPM盘的离散岛。 在图案化和去除密封层之后，盘保护外涂层沉积在离散的数据岛上。
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4.发明授权Method for making a patterned perpendicular magnetic recording disk having a FePt or CoPt chemically ordered recording layer 有权制造具有FePt或CoPt化学有序记录层的图案化垂直磁记录盘的方法公开(公告)号：US08399051B1
公开(公告)日：2013-03-19
申请号：US13248086
申请日：2011-09-29
申请人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
发明人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： A method for making a bit-patterned-media (BPM) magnetic recording disk includes depositing a FePt (or CoPt) alloy recording layer, and then depositing a sealing layer on the FePt layer before high-temperature annealing. The high-temperature annealing causes the FePt to become substantially chemically-ordered in the L10 phase. After annealing, the sealing layer is removed. The sealing layer prevents nanoclustering and agglomeration of the FePt material at the surface of the FePt layer and the sealing layer, which would result in undesirable high surface roughness of the FePt, making patterning of the FePt layer difficult. The FePt layer can be patterned into the discrete islands for the BPM disk either before deposition of the sealing layer or after deposition and removal of the sealing layer. After patterning and removal of the sealing layer, the disk protective overcoat is deposited over the discrete data islands.
摘要翻译： 一种制造位图形介质（BPM）磁记录盘的方法包括沉积FePt（或CoPt）合金记录层，然后在高温退火之前在FePt层上沉积密封层。 高温退火使FePt在L10相中变得基本化学排序。 退火后，去除密封层。 密封层防止FePt材料在FePt层和密封层的表面的纳米聚集和聚集，这将导致FePt的不希望的高表面粗糙度，使得FePt层的图案化变得困难。 在沉积密封层之前或在沉积和去除密封层之后，FePt层可以被图案化成用于BPM盘的离散岛。 在图案化和去除密封层之后，盘保护外涂层沉积在离散的数据岛上。
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5.发明申请PATTERNED PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH EXCHANGE-COUPLED COMPOSITE RECORDING STRUCTURE OF A FePt LAYER AND A Co/X MULTILAYER 审中-公开具有FePt层和Co / X多层的交换耦合复合记录结构的图形磁性记录介质公开(公告)号：US20120147718A1
公开(公告)日：2012-06-14
申请号：US12964643
申请日：2010-12-09
CPC分类号： G11B5/855 , G11B5/1278 , G11B5/66 , G11B5/7325 , G11B5/746 , G11B5/82
摘要： A bit-patterned media (BPM) magnetic recording disk has discrete data islands with an exchange-coupled composite (ECC) recording layer (RL) formed of a high-anisotropy chemically-ordered FePt alloy lower layer, a lower-anisotropy Co/X laminate or multilayer (ML) upper layer with perpendicular magnetic anisotropy, wherein X is Pt, Pd or Ni, and an optional nonmagnetic separation layer or coupling layer (CL) between the FePt layer and the ML. The FePt alloy layer is sputter deposited onto a seed layer structure, like a CrRu/Pt bilayer, while the disk substrate is maintained at an elevated temperature to assure the high anisotropy field Hk is achieved. The high-temperature deposition together with the CrRu/Pt seed layer structure provide a very smooth surface for subsequent deposition of the ML (and optional CL). The separate Co/X ML has by itself a very narrow switching field distribution (SFD), so that the SFD of the ECC RL is much narrower than the SFD for the FePt layer alone.
摘要翻译： 位图形介质（BPM）磁记录盘具有离散数据岛，其具有由高各向异性化学排序的FePt合金下层，较低各向异性Co / X的低交换耦合复合（ECC）记录层 具有垂直磁各向异性的层压或多层（ML）上层，其中X是Pt，Pd或Ni，以及FePt层和ML之间的任选的非磁性分离层或偶合层（CL）。 将FePt合金层溅射沉积到种子层结构上，如CrRu / Pt双层，同时将盘基底保持在升高的温度，以确保实现高各向异性场Hk。 高温沉积与CrRu / Pt种子层结构一起提供了非常光滑的表面，用于随后沉积ML（和可选的CL）。 单独的Co / X ML本身具有非常窄的开关场分布（SFD），使得ECC RL的SFD比仅用于FePt层的SFD窄得多。
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6.发明授权Thermally-assisted recording (TAR) disk with low thermal-conductivity underlayer 有权热辅助记录（TAR）磁盘，具有低导热性底层公开(公告)号：US08509039B1
公开(公告)日：2013-08-13
申请号：US13535499
申请日：2012-06-28
CPC分类号： G11B5/65 , G11B5/7325 , G11B5/746 , G11B2005/0021
摘要： A thermally-assisted recording (TAR) disk has an improved insulating layer beneath the chemically-ordered FePt (or CoPt) alloy recording layer. The insulating layer is a solid substitution crystalline alloy MgXO, where the element X is selected from nickel (Ni) and cobalt (Co). The composition of the MgXO crystalline solid substitutional alloy is of the form (Mg(100-y)Xy)O where y is between 10 and 90, and more preferably between 20 and 80. An optional layer of crystalline “pure” MgO may be located between the MgXO layer and the FePt recording layer and in contact with the recording layer, or between an underlayer and the MgXO layer.
摘要翻译： 热辅助记录（TAR）盘在化学有序的FePt（或CoPt）合金记录层下面具有改进的绝缘层。 绝缘层是固体取代结晶合金MgXO，元素X选自镍（Ni）和钴（Co）。 MgXO结晶固体取代合金的组成为（Mg（100-y）Xy）O形式，其中y在10和90之间，更优选在20和80之间。任选的结晶“纯”MgO层可以是 位于MgXO层和FePt记录层之间并与记录层接触，或位于底层与MgXO层之间。
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