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公开(公告)号：US07883583B2
公开(公告)日：2011-02-08
申请号：US11970548
申请日：2008-01-08
IPC分类号： C23C16/448 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C14/246 , C23C16/4486
摘要： Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
摘要翻译： 用于蒸发颗粒材料的装置，包括计量装置，包括：储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴，所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀，其端部与旋转轴中的槽基本相同的横截面，刮刀与槽配合以移除保留在其中的颗粒材料，并且响应于轴旋转，传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
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公开(公告)号：US07625602B2
公开(公告)日：2009-12-01
申请号：US11121242
申请日：2005-05-03
申请人： Michael Long , Neil P. Redden , Bruce E. Koppe , Thomas W. Palone
发明人： Michael Long , Neil P. Redden , Bruce E. Koppe , Thomas W. Palone
IPC分类号： C23C16/00
CPC分类号： C23C14/246 , C23C16/448
摘要： A method for metering powdered or granular material onto a heated surface to vaporize such material. The method comprises providing a rotatable auger d for receiving powdered or granular material and as the rotatable auger rotates, such rotatable auger translates such powdered or granular material along a feed path to a feeding location. The method also providing at least one opening at the feeding location such that the pressure produced by the rotating rotatable auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner. The material is agitated or fluidized proximate to the feeding location.
摘要翻译： 将粉末或颗粒材料计量到加热表面上以蒸发这种材料的方法。 该方法包括提供用于接收粉末或颗粒材料的可旋转螺旋钻d，并且当可旋转螺旋钻旋转时，这种可旋转螺旋钻将这种粉末状或颗粒状材料沿着进给路径转换到进给位置。 该方法还在进给位置处提供至少一个开口，使得由馈送位置处的旋转可旋转螺旋钻产生的压力导致粉末状或颗粒状材料以可控方式被迫穿过加热表面上的开口。 材料在靠近进料位置被搅动或流动。
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公开(公告)号：US08012537B2
公开(公告)日：2011-09-06
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。
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公开(公告)号：US07398605B2
公开(公告)日：2008-07-15
申请号：US11153066
申请日：2005-06-15
申请人： Michael Long , Bruce E. Koppe , Thomas W. Palone
发明人： Michael Long , Bruce E. Koppe , Thomas W. Palone
IPC分类号： F26B7/00
CPC分类号： C23C14/12 , C23C14/24 , C23C14/246 , H01L51/001 , H01L51/56
摘要： A method for the vaporization of particulate material includes providing one or more containers each containing possibly distinct particulate materials each having at least one component, fluidizing the particulate material in at least one of the containers, and providing a vaporization zone that is thermally isolated from at least one of the containers. The method further includes delivering particulate material received from each container to the vaporization zone, and applying heat to vaporize the delivered particulate materials at the vaporization zone.
摘要翻译： 一种用于蒸发颗粒材料的方法包括提供一个或多个容器，每个容器各自含有不同的颗粒材料，每个容器具有至少一种组分，使至少一个容器中的颗粒材料流化，并且提供与之热隔离的蒸发区 至少一个容器。 该方法还包括将从每个容器接收的颗粒材料输送到蒸发区域，并且在蒸发区域施加热量以蒸发输送的颗粒材料。
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公开(公告)号：US07165340B2
公开(公告)日：2007-01-23
申请号：US11050934
申请日：2005-02-04
申请人： Michael Long , Bruce E. Koppe , Thomas W. Palone
发明人： Michael Long , Bruce E. Koppe , Thomas W. Palone
IPC分类号： F26B19/00
CPC分类号： C23C14/246 , C23C14/12 , H01L51/001 , H01L51/56
摘要： Apparatus for vaporization of powdered material, includes one or more containers each containing possibly distinct powdered materials each having at least one component; a structure for fluidizing the powdered material in each container; a vaporization zone that is thermally isolated from at least one of the containers; a transporting structure for receiving fluidized powdered material from each container and delivering such fluidized powdered materials to the vaporization zone; and vaporizing the delivered powdered materials at the vaporization zone by applying heat.
摘要翻译： 用于蒸发粉末材料的装置包括一个或多个容器，每个容器可能具有不同的粉末材料，每个容器具有至少一种组分; 用于使每个容器中的粉末材料流化的结构; 蒸发区，其与所述容器中的至少一个热隔离; 用于从每个容器接收流化的粉末材料并将这种流化的粉末材料输送到蒸发区的输送结构; 并通过施加热量在蒸发区蒸发输送的粉末材料。
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公开(公告)号：US07465475B2
公开(公告)日：2008-12-16
申请号：US10984667
申请日：2004-11-09
申请人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： C23C16/448
CPC分类号： C23C14/542 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/56
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。
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公开(公告)号：US08101235B2
公开(公告)日：2012-01-24
申请号：US12959803
申请日：2010-12-03
CPC分类号： C23C14/246 , C23C16/4486
摘要： Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
摘要翻译： 用于蒸发颗粒材料的装置，包括计量装置，包括：储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴，所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀，其端部与旋转轴中的槽基本相同的横截面，刮刀与槽配合以移除保留在其中的颗粒材料，并且响应于轴旋转，传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
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公开(公告)号：US07625601B2
公开(公告)日：2009-12-01
申请号：US11050924
申请日：2005-02-04
申请人： Michael Long , Thomas W. Palone , Bruce E. Koppe
发明人： Michael Long , Thomas W. Palone , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/246 , C23C14/12 , H01L51/001 , H01L51/56
摘要： A method for metering powdered or granular material onto a heated surface to vaporize such material, includes providing a container with powdered or granular material having at least one component; providing a rotatable auger disposed in material receiving relationship with the container for receiving powdered or granular material from the container and as the auger rotates, such rotating auger translates such powdered or granular material along a feed path to a feeding location; and providing at least one opening at the feeding location such that the pressure produced by the rotating auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner.
摘要翻译： 将粉末或颗粒材料计量到加热表面上以蒸发这种材料的方法包括向容器提供具有至少一种组分的粉末状或颗粒状材料; 提供可旋转的螺旋推运器，其设置成与所述容器接合的材料，用于从所述容器接收粉末或颗粒材料，并且当所述螺旋推运器旋转时，所述旋转螺旋钻将所述粉末或颗粒材料沿着进给路径转换到进给位置; 并且在进给位置处提供至少一个开口，使得由馈送位置处的旋转螺旋钻产生的压力导致粉末或颗粒材料以可控的方式被迫穿过加热表面上的开口。
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公开(公告)号：US20100233367A1
公开(公告)日：2010-09-16
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： B05D1/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译： 一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数 的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。
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公开(公告)号：US07704554B2
公开(公告)日：2010-04-27
申请号：US11745504
申请日：2007-05-08
申请人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。
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